SMC Corporation of America
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Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and pages 14-14-6 to 14-14-8 for Precautions on every series. 5. Tightening torque for installing the membrane module and the case (for IDG5/10/20/5H/10H/20H) Use caution not to tighten excessively.

Series CUK Free Mount Cylinder: Long Stroke Type Non-rotating Rod, Double Acting, Single Rod 6, 10, 16, 20, 25, 32 . 7 8 9 9 10 11 12 13 14 19 21 21 22 23 23 24 25 25 26 28 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 29 29 30 31 32 34 34 35 36 38 42 42 43 43 44

25.5 28.9 30.2 33.4 34.5 38.6 39.4 41 51.6 52.6 12.7 9.1 15.4 8.8 3.3 5.5 11 13.7 12.7 13.7 17 18 17 18 21 21 22 17 10.5 12.6 3.3 5.5 10 12 4.3 7.8 14 17 22.8 4.3 8 19.3 22 25 12 20.5 4.3 8 25 28 33 14 26.2 Note) Reference dimensions Proper tightening torque for a lock nut is shown in the below table.

Date and time, Operation time and Alarm history are not reset. (1) Data reset setting screen Table 5.4-21 Data reset setting No.

Parameter Configuration using Setup software (MR Configurator2TM) .19 5.1 PC Setup software (MR Configurator2TM ) . 19 5.1.1 Installation Method . 19 5.2 Basic driver set-up for Initial Test Drive . 19 5.2.1 Start up the Setup software (MR Configurator2TM). 20 5.2.2 System Settings . 21 5.2.3 Model Selection . 21 5.2.4 Driver ON LINE Check . 22 5.2.5 Help Function . 22 5.3 Parameter setting

IIIB OA DB IOL lou DC OX iDE .1 00 DS OH Z ODHIl ": ~ 46 , 31 1 21 18 5 3a , 2' 1 51 l a.5 6.6 If 7 32 1184 lO ' ;~ 52 35 ,24 I 22 15.5 41 21 i 54 16.5 6.6 11 9 ' 36 l a, J:!'

11.5 32 10 10 150.5 15 26 54 10 8 M8 x 1.25 6 11 25 to 800 25 to 650 35 50 32 80.5 27 70 46 21 52 24 20 28.5 10.5 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 25 to 800 25 to 650 35 60 32 98.5 27 85 23 64 24 20 28.5 13.5 40 10 15 17 26 67 18 11 M10 x 1.25 9 48.5 174 14 25 to 750 25 to 600 40 70 37 32 23 78 25 15.5 52 14 17 21 30 72 23 13 M12 x 1.75 11 117.5 102 55 26.5 36 189 17 25 to 750

Replacement parts/Grease pack part no: P523010-21 (10 g) 311 CRQ2X Series Construction With auto switch Size 20/30/40 With auto switch Size 10/15 !0 !3 !3 !0 !4 !7 !1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

: Body ported (A, B port top ported) How to Order Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) VK VK A port: Rc 1/8, M5 x 0.8 A, B port: Rc 1/8, M5 x 0.8 VV5K3 21 05 VT VK3120 Valve stations Thread type VK332 Q CE-compliant Nil CE-compliant 01 1 station Nil Rc Applicable blanking plate assembly VK3000-7-1A F N T G 20 20 stations R1 port: M5 x 0.8 R2

Maintenance handle white ( Accessory ) Filter case Fig. 3-21 CH1 particle filter case removal Maintenance handle black ( Accessory ) Filter case Fig. 3-22 CH2 particle filter case removal 2. Insert the element and mount the filter case.

Table 4.3-3 List of set values Set values Explanation Initial value (Default setting) MODBUS protocol Simple communication protocol 1 Simple communication protocol 21 1: When the setting of the contact input 2 is Remote signal, Simplified communication protocol 2 cannot be set. Communication specification Setting and checking 5. Press the [SEL] key once.

Table 4.3-3 List of set values Set values Explanation Initial value (Default setting) MODBUS protocol Simple communication protocol 1 Simple communication protocol 21 1: When the setting of the contact input 2 is Remote signal, Simplified communication protocol 2 cannot be set. Communication specification Setting and checking 5. Press the [SEL] key once.

24 4 18 20.7 10.4 7.5 7.5 D1 10 6 19.5 22.8 12.8 11 11 D1 14 8 21.5 26.3 15.2 21 21 12 D2 M 45 52 45 57 H 10 24 29.4 18.5 17 17 Connection threads 12 57 57 25 31.4 20.9 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

(mm) Rod end male threads a b c e f g h Bore size (mm) 20 11 15 M10 x 1.25 6 10 23 66 25 14 18 M12 x 1.25 6 12 26 71 32 21 25 M16 x 1.5 7 14 35 86 40 26 30 M20 x 1.5 7 19 40 95 50 31 35 M24 x 1.5 8 24 46 106 63 41 45 M30 x 1.5 9 30 58 125 80 56 60 M39 x 1.5 14 41 77 155 100 71 75 M48 x 1.5 21 50 101 197 7 Series CHKDB Auto Switch Specifications Auto Switches: Proper Mounting Positions and

Rod end male threads (mm) Bore size (mm) a b c e f g h 20 11 15 M10 x 1.25 6 10 23 66 25 14 18 M12 x 1.25 6 12 26 71 32 21 25 M16 x 1.5 7 14 35 91 40 26 30 M20 x 1.5 7 19 40 105 50 31 35 M24 x 1.5 8 24 46 116 63 41 45 M30 x 1.5 9 30 58 135 80 56 60 M39 x 1.5 14 41 77 165 100 71 75 M48 x 1.5 21 50 101 207 19 Series CHKGB Auto Switch Specifications Auto Switches: Proper Mounting Positions

KPY10-02 KPY10-03 KPY12-03 KPY12-04 4 18 20.7 10.4 7.5 7.5 D1 10 6 19.5 22.8 12.8 11 11 D1 14 8 21.5 26.3 15.2 21 21 12 D2 M 45 52 45 57 10 H 24 29.4 18.5 17 17 Connection threads 12 57 57 25 31.4 20.9 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

Refer to"LECSB Operation Manual, chapter 5 for details of each parameter. 21 - 5.3.1 Change of parameter block To enable settings for all parameters. Select Basic tab and change PA19 value to 000C. Click the PA19 row then click Selected Items Write. Cycle the power for parameters for this driver to be enabled. Please click Read".

<> UPDOWN[F 2] SET UP DOWN OFF SET UP DOWN [OFF] OFF SET SET 21 [Err] SET [P_2] [P2L][P2H] [P_2][n_2] "P""n" (55) SET -32No.PS-OMV0003CN-G 21 [H_2] [WH2] (55) SET 23 ON OFF SET UP DOWN ON ON ON ON OFF OFF OFF OFF OUT1 OUT1 OUT2 OUT2 SET [F 2] OUT2 1SET 2SETSET2 -33No.PS-OMV0003CN-G [F 3] 0.01 sec.0.0030.00 sec. <> UPDOWN[F 3] SET UP DOWN SET [F

And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y: