Passage: Top Ported Common EXH-Integrated, Stations: 9 Stations Top Ported/Valve, Port Size: None, Thread: NPTF

Passage: Top Ported Common EXH-Integrated, Stations: 8 Stations Top Ported/Valve, Port Size: None, Thread: NPTF

Passage: Top Ported Common EXH-Integrated, Stations: 4 Stations Top Ported/Valve, Port Size: None, Thread: NPTF

Passage: Top Ported Common EXH-Integrated, Stations: 2 Stations Top Ported/Valve, Port Size: None, Thread: NPTF

Passage: Top Ported Common EXH-Integrated, Stations: 6 Stations Top Ported/Valve, Port Size: None, Thread: NPTF

Passage: Top Ported Common EXH-Integrated, Stations: 8 Stations Top Ported/Valve, Port Size: None, Thread: G

CV/MVGQ

Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Bore size (mm) Z NN NA N MM Symbol Q QY Bore (mm) 20 25 32 40 ZZ S ZZ S ZZ S ZZ S ZZ S 20 25 32 40 20 25 32 40 191 137 166 112 141 87 37 M20 x 1.5 24 15 M8 x 1.25 19.8 14 65.3 195 137 170 112 145 87 41 M26 x 1.5 30 15 M10 x 1.25 22 14 70.5 222 164 197 139 172 114 147 89 41 M26 x 1.5 34.5 15 M10 x 1.25 25.8

VFS

VVFS2000-30A-6 15 m VVZS3000-21A-6 15 m VVFS2000-30A-7 20 m VVZS3000-21A-7 30 m VVZS3000-21A-8 20 m Option Option Cable Color List of Each Terminal No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less

90

[kPa] 80 Vacuum pressure 60 Suction flow (Silencer exhaust) 40 Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 Suction flow [L/min (ANR)] ZK210 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 0 10 20 30 40 50 60 70 80 90 100 100 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 Suction flow (

Vacuum System Peripherals:

Series ZM 13-14-20 4.

HEC-OM-S008

Host ENQ 32H Check sum CR (H) (L) Thermo-con STX 32H Internal sensor ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) Note) 2DH is entered in 101 digit is attached to temperature data.

A_HEC-OM-J017

Host ENQ 32H Check sum CR () () Thermo-con STX 32H Internal sensor ETX Check sum CR 101 100 10-1 10-2 () () Host ACK CR (Possible to omit) Note2DH is entered in 101 digit is attached to temperature data.

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

Smooth Cylinder/Low Speed Cylinder

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

5

45 50 12 37 43 50 57 63 70 16 49 57 66 74 83 92 20 75 88 101 114 127 140 153 165 178 191 REA 25 109 125 140 156 172 188 204 220 236 252 REB Weights/With Auto Switch (Built-in magnet) (g) Bore size (mm) Cylinder stroke (mm) 5 10 15 20 25 30 35 40 45 50 REC 12 45 51 58 65 71 78 Smooth Smooth 16 59 67 76 85 94 103 20 106 119 132 145 157 170 183 195 208 221 Low Speed 25 151 167 183 199 215 231

Free Mount Cylinder Series CU

) 10, 16 5, 10, 15, 20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 Precautions Be sure to read before handling.

MY1

20 20 1.