Series: VP700, Exhaust Type: Individual Exhaust, Pilot Type: Internal Pilot, Stations: 12 Stations, Symbol: 3, Port Size: 1/2, Thread Type: NPT
Series: VP700, Exhaust Type: Individual Exhaust, Pilot Type: Internal Pilot, Stations: 3 Stations, Symbol: 3, Port Size: 1/2, Thread Type: NPT
Series: VP700, Exhaust Type: Individual Exhaust, Pilot Type: Internal Pilot, Stations: 6 Stations, Symbol: 3, Port Size: 1/2, Thread Type: NPT
CM2 12.5 25 37.5 50 75 100 125 149 162 174 187 212 237 262 19 36 32 77 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 181 194 206 219 244 269 294 22 46 40 Built-in One-touch fitting Boss-cut With air cushion Bore Bore ZZ N1 G WA P WB Q Bore 20 20 With gaiter Without gaiter 17.5 8 13 6 8.5 23 1 to 50 25 25 17.5 8 13 6 10.5 26 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 t o500 103
103 103 30 30 30 30 52.5 52.5 52.5 52.5 20 20 20 20 94.5 97.5 97.5 97.5 17 2 Port Solenoid Valve For Dust Collector Series VXF2 Dimensions: Flange type VXF25B<<
Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Mounting Caution Mounting of Workpiece 1. Do not apply scratches and dents on mounting side of body and table (guide table). The damage will decrease parallelism, increase vibration of guide and increase moving part resistance. D H 2.
53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1 4 1 2 62 97 64 50 93 (103) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392-20
7 5 5 5 4.9 9.7 4.9 3-M5 (M3) (18.1) ( ): M3 Broken line: locking style manual override 2.9-8 Series VQ100 Dimensions L plug connector VQ1l0l-lLlM5 (M3) (37.8) 31.4 Manual override 6.1 4.9 12.4 14.8 SY Lead wire color: Black E Lead wire color: Red 2-2.7 SYJ 12 3.7 (Mounting hole) 18.1 (Lead wire length) (Latching) VK Latching and large flow capacity style (Lead wire length) 35.6 300 42
53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1 4 1 2 62 97 64 50 93 (103) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392-20
Leakage current: 4mA Red Blue White Green About 300 Servo amplifier NFB Driver MC L2 L1 Power supply 29 5 hole L3 42 4 29 7 Radio noise filter FR-BIF -(H) 58 200V class: FR-BIF 400V class: FR-BIF-H 44 (f) Varistors for input power supply (Recommended) Varistors are effective to prevent exogenous noise and lightning surge from entering the driver.
Before starting the software 30 Download the I/O Configurator (NFC version) 33 Start the I/O Configurator (NFC version) 34 Screen Layouts of the I/O Configurator (NFC Version) 35 Monitoring and setting up 37 Setting/Adjustment of the Wireless Unit 38 Parameter settings of a Remote (optional) 38 Remote setting 38 Parameter settings of the Base 40 CC-Link setting 40 System setting 42
B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80
125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P Port) (42.9 ) (20.0) (15)
AFF Select accessories sold separately. 6 Refer to page 103.
A XL Series Case Model Weight (kg) A (mm) Conductance (L/s) XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 B (mm) 40 103 0.25 5 50 113 0.45 14 65 158 1.1 45 Little heavy metal contamination 70 170 1.6 80 88 196 2.9 160 90 235 5.0 200 The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination
Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79
Interrupting operation Item . 42 - . Procedure for power set up ..
13.5 Prepared hole diameter 3.3 2-M3 x 0.5 (Plug: M-3P) 6 (fitting seat surface dimension) 170.05 M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port 2-M3 x 0.5 A 5 5.5 A 3.2 J 2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42
6.5 9 6.5 9 38.5 42 38 41.5 6.5 10.5 10 14 Bore size (mm) Long stroke 32 40 9.5 13 17.5 23.5 31.5 35 7 10.5 15 21 34 37.5 10 13.5 18 24 35 38.5 10.5 14 18.5 24.5 38.5 42 10 13.5 10 13.5 18 24 18 24 38.5 42 38 41.5 Bore size (mm) 3.8-13 World Wide QS\E Support...
L dimension Weight (g) 460.5 448 435.5 423 410.5 398 385.5 373 360.5 585.5 573 560.5 548 535.5 523 510.5 498 485.5 473 610.5 598 82.9 80.6 78.4 76.1 73.9 71.6 69.4 67.1 64.9 105.4 103.1 100.9 98.6 96.4 94.1 91.9 89.6 87.4 85.1 109.9 107.6 62 61 60 59 49 58 48 57 47 56 46 55 45 54 44 53 43 52 42 51 50 No.