3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P Port) (42.9 ) (20.0) (15)

Refrigerated Air Dryer

AFF Select accessories sold separately. 6 Refer to page 103.

Aluminum High Vacuum Angle Valve

A XL Series Case Model Weight (kg) A (mm) Conductance (L/s) XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 B (mm) 40 103 0.25 5 50 113 0.45 14 65 158 1.1 45 Little heavy metal contamination 70 170 1.6 80 88 196 2.9 160 90 235 5.0 200 The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination

High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

DOC1023125

Interrupting operation Item . 42 - . Procedure for power set up ..

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

13.5 Prepared hole diameter 3.3 2-M3 x 0.5 (Plug: M-3P) 6 (fitting seat surface dimension) 170.05 M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port 2-M3 x 0.5 A 5 5.5 A 3.2 J 2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42

CXT

6.5 9 6.5 9 38.5 42 38 41.5 6.5 10.5 10 14 Bore size (mm) Long stroke 32 40 9.5 13 17.5 23.5 31.5 35 7 10.5 15 21 34 37.5 10 13.5 18 24 35 38.5 10.5 14 18.5 24.5 38.5 42 10 13.5 10 13.5 18 24 18 24 38.5 42 38 41.5 Bore size (mm) 3.8-13 World Wide QS\E Support...

CV/MVGQ

48 42 42.5 41 85 85.5 41 93 91 93.5 91 41 80 59 55.5 50 54 50 51 48.5 93.5 94 48.5 101.5 107 102 107 49.5 100 69.5 63 57.5 62 57.5 59 56 104 104 56 112 121 112 121 58.5 Operating Range Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

3 Position Cylinder Series RZQ

40 46 36 40 50 37 47 37.5 47.5 42.5 52.5 34.5 44.5 33 43 Auto Switch Mounting Height D-A7H D-A80H D-F7/F7F D-J79/J79W D-F7W D-F7BAL D-F7NTL Auto switch model D-M9V D-M9WV D-M9AVL D-A9V D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-P4DWL D-A7 D-A80 D-A73C D-A80C Bore size U U U U U U U U U 32 40 50 63 27 29 31.5 32.5 38.5 35 38 34 30.5 32.5 35 36 42 38.5 41.5 37.5 44 REA 36.5 38.5 41 42 48 44.5

AC Servo Motor Driver (CC-Link Type)

. -26- Recommended Parameter Values [LEJ] LEJS40 LEJS63 LEJB40 LEJB63 Series Lead symbol H A B H A B T Lead 24 16 8 30 20 10 27 42 Parameter *1,*2 Para. Initial value Recommended value No.

OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

U D-F9BAL A Auto switch mounting heights (mm) D-A7H D-A80H D-J79 D-J79W D-F7 D-F7F D-F7NTL D-F7BAL D-F7W D-A73C D-A80C D-F7WV D-A7 D-A80 D-F9V D-F9WV D-F9BAL D-J79C D-A79W D-A9V D-F7V D-F7BAVL Bore size (mm) U U U U U U U U U 20 31 24.5 25.5 31.5 28 27 32 38 29 31.5 32.5 38.5 35 34 26.5 27 40 41.5 32.5 35 36 42 38.5 37.5 30 30.5 50 47.5 38.5 41 42 48 44.5 43.5 36 36.5 63 54 42 47.5 48.5

3 Position Cylinder Series RZQ

U U U U U 32 31.5 32.5 38.5 35 38 34 27 29 26.5 40 35 36 42 38.5 44 41.5 37.5 30.5 32.5 30 50 41 42 48 44.5 47.5 50 43.5 36.5 38.5 36 63 47.5 48.5 54.5 51 54 50 56.5 40 42 39.5 12 Series RZQ Auto Switch Mounting Follow the procedures below to mount auto switches.

Compact Rotary Actuator Series CRQ2

P. 313 Calculation of necessary torque 2 Inertial load: Ta Ta = 2 = [rad/s2] t2 Necessary torque: T T = Ta x 10 2 x = 0.003896 x x 10 = 0.015 [Nm] 42 (t is calculated with 2s per 90.) 0.109 Nm < Effective torque OK Calculate necessary torque corresponding to the load type, and ensure it is within effective torque range.

Basic Type/Direct Mount Type

26 30 46 42 28 32 48 44 32 48 44 17.5 21.5 76.5 56.5 72.5 60.5 19.5 23.5 87.5 35.5 67.5 83.5 39.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

DOC1023126

Interrupting operation Item. 42 - . Procedure for power set up ..

LECA6_C

CN5I/O . 23 6.1 . 23 6.2 (NPNPNP ) . 23 (1) I/O (NPNPNP ) . 23 (2) I/O . 23 6.3 . 24 6.4 I/O . 27 7. . 28 7.1 . 28 7.2 . 31 7.3 . 33 8. . 34 8.1 . 34 8.2 . 34 8.3 . 35 (1) . 35 (2) (). 35 (3) . 35 8.4 . 36 8.5 . 36 9. (). 37 9.1 . 37 9.2 . 38 10. . 39 10.1 . 39 10.2 I/O . 39 (1) . 39 (2) . 40 (3) . 41 (4) HOLD. 42 (5) . 42 2 - 6 . 42 (7) . 43 11. . 44 11.1 . 44 11.2 (). 45 11.3 I/O . 46 11.4

LECP6_C

CN5I/O .23 6.1 /.23 6.2 /(NPNPNP ).23 (1) I/O (NPNPNP ).23 (2) I/O .23 63 /.24 64 I/O .27 7 .28 71 .28 72 .31 73 .33 8 .34 81 .34 82 .34 83 .35 1 .35 2 (.35 3 .35 84 .36 85 .36 9 .37 91 .37 92 .38 10 .39 101 .39 102 I/O .39 1 .39 2 .40 3 .41 4 HOLD.42 5 .42 2 - 6 .42 7 .43 11 .44 111 [5m ].44 112 [820m].44 113 [5m ].45 114 [820m] .45 115 I/O .46 116 .46 117 .47 12. .48 12.1 .48 12.2 .49 13

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Setting Data Entry . 39 7.1 Step data . 39 7.2 Basic parameter . 42 7.3 Return to origin parameter . 44 8.

CE

Switches or relays, etc. should not be installed in the power supply line (12 to 24VDC). 42 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA CHINA SMC (China) Co., Ltd. HONG KONG SMC Pneumatics (Hong kong) Ltd. INDIA SMC Pneumatics (India) Pvt. Ltd. MALAYSIA SMC Pneumatics (S.E.A.) Sdn. Bhd. NORTH AMERICA CANADA SMC Pneumatics (Canada) Ltd.