VFS

Max. 3.5 With light/surge voltage suppressor Light With light/surge voltage suppressor (DZ) Light Applicable heavy-duty code O.D. 6 to 8 (Y: 4.7 to 7) Conduit terminal: VFS2610-T-01 02 With light/surge voltage suppressor Light ( ): Y, YZ Applicable heavy-duty code O.D. 6 to 8 3-8-40 41 Series VFS2000 Manifold Specifications Plug-in Type: With Attachment Plug Lead Wire Thread type The insert

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

(g) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D When mounting Series CU, refer to the below table. Tightening Torque/ 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) Bore size (mm) Hexagon socket head cap screw dia.

asilltr

, tri.gr,o*e 056 (r/6) h l:0.36 ot s 1s1"1 % l=0.36 r06 (170') % , 1 L l=0.52 150 \1%',) ls, th l=0.5 2O0 (2') h, t1 t:O.44 250121/z') h t:O.44 300 (3') 16, 1n l-0.55 400 (4') th, la l=0.65 056 (%6') 11,4a o75 (%',I 1'Aa 1 % 106 (1%a) 't% 15o 11%'l 13A 2 200 (2'1 1'la 2'Aa 25O l2%',) 1151e 213,4e 300 (3') 2 2% 400 (41 2uAe 33Aa NOTE l) Female lhread length ('l l rs shorter lor lhe above listed

Vacuum

manifold assembly: sta. 1-4) NZXl101-KlsLZ-EC-M NZZXlO4-TB-A Parl Number / Configuration Six station manitold assembly: sra. 1) NZX 1071 -K3sMZ-F-M sta. 2-5) NZX1071-K1sLZ-EC-M sta. 6) zx'l-BABI NZZXl O6-TB-A 4tl 2 ' Part Number / Configuratlon Four station manifold assembly: sta. 1-2) NZX'I101-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41

EXxx-OMA1018_Eng

Caution UNITED KINGDOM (44) 0845 121 5122 La puissance de sortie mise par lappareil de sans fil est infrieure la limite d'exposition aux frquences radio dInnovation, Sciences et Dveloppement conomique Canada. Utilisez lappareil de sans fil de faon minimiser les contacts humains lors du fonctionnement normal.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

RWr(n+20) RWw(n+20) RWr(n+21) RWw(n+21) IO-Link IO-Link : : Process data Process data Port 1 Port 1 RWr(n+2E) RWw(n+2E) RWr(n+2F) RWw(n+2F) RWr(n+30) RWw(n+30) RWr(n+31) RWw(n+31) IO-Link IO-Link : : Process data Process data Port 2 Port 2 RWr(n+3E) RWw(n+3E) RWr(n+3F) RWw(n+3F) Unit No.1 EX600-GILB RWr(n+40) RWw(n+40) RWr(n+41) RWw(n+41) IO-Link IO-Link : : Process data Process data Port

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

pressure MPa 5 to 60C (41 to 140F) Ambient and fluid temperature 1.0 (145 psi) Max. operating pressure MPa 0.15 (22 psi) Min. operating pressure MPa Speed adjustment range sec/90 0.1 to 1.0 Basic type + Switch unit Allowable kinetic energy J 0.12 (0.09 ftlb) 0.16 (0.12 ftlb) 390 (87.6 lbf) Allowable radial load Shaft load N 340 (76.4 lbf) Allowable thrust load Bearings Bearing Side ports

Turntable Cylinder Series MGT

54 62 39 46 56 M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41

Air Cylinder NCQ7 Series Compact Cylinder

, tri.gr,o*e 056 (r/6) h l:0.36 ot s 1s1"1 % l=0.36 r06 (170') % , 1 L l=0.52 150 \1%',) ls, th l=0.5 2O0 (2') h, t1 t:O.44 250121/z') h t:O.44 300 (3') 16, 1n l-0.55 400 (4') th, la l=0.65 056 (%6') 11,4a o75 (%',I 1'Aa 1 % 106 (1%a) 't% 15o 11%'l 13A 2 200 (2'1 1'la 2'Aa 25O l2%',) 1151e 213,4e 300 (3') 2 2% 400 (41 2uAe 33Aa NOTE l) Female lhread length ('l l rs shorter lor lhe above listed

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

(Initial value) Note 3) Value for high pressure type (1.5W) specification Note 4) Value for the low power consumption (0.5W) specification 56 Series VQ1000 VQ1000/Flat Cable Kit Stations VV5Q13J 0(D) U S Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) L2 23.5 P = 11 13.2 L1 6.2 41 35 Indicator light 1.5 1.5 (11) 19.5 (Mounting hole dimension) Manual override 2-

High Vacuum L Type Valve

XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0019 6.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

45.5 46 118 142 162 106.5 115 137 172 198 233 20 25 30 16 160.5 171 208 29.5 18.5 21 25 30 36 109.5 121 130 147 13 5 33.5 31 216 251 165.5 192 186 218 8-24-7 8 Series MGT Proper Auto Switch Mounting Position (Detection at stroke end) Proper auto switch mounting position for cylinder (stroke end) Proper auto switch mounting position for table position detection Auto switch A B Auto switch

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 7 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 9 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 15 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 3 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 5 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 13 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 16 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 20 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)