Precision Regulator

0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

Micro Mechanical Valve Series VM1000

F.O.F. 4.5 mm 2.0 mm 2.5 mm 6 N Applicable tube Mounting hole 2 x 3.3 One way roller lever VM1000-4N-02 VM1000-4NU-02 VM1100-4N-02 VM1100-4NU-02 Symbol/2 port 3 port (A) 2 (A) 2 12 12 10 10 1 (P) 1 (P) 3 (R) 0.5 MPa supply Applicable tubing VM1100-4N-02 VM1000-4N-02 T0425 TU0425, T0403,TS0425 Side ported 3 port 2 port VM1100-4NU-02 VM1000-4NU-02 T.T. O.T. P.T.

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

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External pilot solenoid 1 Y A G 1 T Z B1 10 1 70 2 SGH SGHA Air operated 1 A G B1 10 1 2 70 q w e r t y u i o !0 !1 !2 q Series w Valve type e Seal material 70 r Pressure range t Thread type y Port size 1 2 3 4 1 2 A B 10 15 20 25 Nil G N T SGH100 SGH200 SGH300 SGH400 SGH100 SGH200 SGH300 SGH400 N.C. N.O.

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

AR20-B to AR60-B

AR20K-B to AR60K-B A-A w A 2 OUT 1 I N C SM A w w Pressure in diaphragm chamber Inlet pressure (IN) Pressure in diaphragm chamber Inlet pressure (IN) r r IN OUT IN (Inlet pressure) OUT (Outlet pressure) q q e e Figure 1 Normal Figure 2 Backflow When the inlet pressure is higher than the regulating pressure, the check valve w closes and operates as a normal regulator (Figure 1).

Miniature Regulator Series ARJ210

5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

Clean Gas Filter

0.001 IDFA A B Model Connection Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 46 76 IDFB 51 96 IDH 0.0001 1000 1 10 100 59 120 ID Flow rate L/min (ANR) IDG SFA20 SFA102, SFA202, SFA302 IDK 0.1 2 x TSJ 1/4 Inlet pressure AMG 0.3 MPa Max. flow rate line AFF Pressure drop MPa 0.1 MPa B IN 0.01 AM 0.7 MPa AMD A 0.001 AMH 0.5 MPa A B Model