Soft Start-up Valve )-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.
H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04
type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating pressure Knob Cv 0.7 1.3 1.0 1.0 1.0 Option (AP3150 only) Ports 2 ports Code 3000 psig (20.7 MPa) 1) 1300 psig (9.0 MPa) 3000 psig (20.7 MPa) 1) 1300 psig (9.0 MPa) 1300 psig (9.0 MPa) 00 02
-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.
-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.
-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.
): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil
(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)
): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil
5 Port Air Operated Valve Series VFA3000 How to Order Thread type (Including pilot port) Nil Rc G NPT NPTF Port size (P, A, B port) F N T 01 02 1 8 1 4 R1, R2 port are 1/8. Option F Foot bracket Mounting bracket are supplied, but unattached.
Twist selector (2 position) Black Green Yellow Key selector (2 position) VM-34CB VFM350-02-34B VM-34CG VFM350-02-34G VM-34CY VFM350-02-34Y VM-36C VFM350-02-36 Note) Actuator replacement is available for all styles. 3.5-47 VFM300 How to Order E S 01 02 0 VFM35 Option Suffix of actuator F Foot bracket (Only internal pilot) Actuator G B Red Hard steel roller R S Area code Port size Basic Roller
PA13 Selection of command input pulse form Pulse train form Forward rotation command Reverse rotation command Setting Forward rotation pulse train Reverse rotation pulse train PP 00 NP Positive logic PP Signed pulse train 01 NP L H PP A-phase pulse train B-phase pulse train 02 NP PP Forward rotation pulse train Reverse rotation pulse train 10 NP Negative logic PP Signed pulse train 11 L H
VXA 2 1 VCHm Thread type 1 Rc NPT G Nil N F VDW Voltage VQ 1 2 3 4 7 8 J 100 VAC 200 VAC 110 VAC 220 VAC 240 VAC 48 VAC 230 VAC Port size LVM Class 3 v v v Class 2 v v Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 v v v v Symbol 01 02 03 04 06 VCA VCB Please consult with SMC regarding other voltages.
AC-OMX0051-D PRODUCT NAME Air Combination MODEL / Series / Product Number AC20(A)-(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,3,6,C,J,N,R,Z,ZA)-D AC20B,C,D -(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,6,C,J,N,R,Z,ZA)-D AC30(A)-(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC30B,C,D -(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC40(A)-(F,N)02~(F,N)04(C,D
Regulator for 2 MPa Option None Nil Regulating pressure range B 1348112 G361001 G461002 G36401 G46402 G36P10N01 G46P10N02 G36P4N01 G46P4N02 1348110A Bracket ARX20 Nil F 0.05 to 0.85 MPa 0.05 to 0.30 MPa 0 1 ARX21 Nil F Note 1) Thread type (2) G Pressure gauge ARX20N Rc NPT G Nil N F ARX21N P Port size Panel nut 01 02 1/8 1/4 Option combination numbers Panel nut is also included with B
Direct exhaust with silencer box: Exhaust from both sides (F/L kits only) Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust Enclosure IP65 (Except F kit) (2) (2) 01 1 station Stations Note 1) When two or more symbols are specified, indicate them alphabetically. Example) -CDK Note 2) Combination of [C ] and [S ] is not possible.
VCB F N G Coil type NPT G Grommet / Tape winding W Grommet / Molded VCL Port size VCS Port size Symbol Series 20 p p 30 10 p VCW M5 01 02 p p M5 1/8 (6A) 1/4 (8A) Magnet wire protection: Tape winding Magnet wire protection: Resin Molded Orifice diameter F Faston terminal / Molded Orifice diameter (mm ) Symbol Series 1 2 1 2 3 2 3 4 1 10 1.6 1.6 2.3 20 3.2 2 Magnet wire protection:
8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01
(Value in the initial stage) Base mounted Body ported Model Flow characteristics (2) Pilot port piping location b Cv b Cv Port size Rc 14/2(PA/B) 4/25/3(A/BEA/EB) Pilot port size Valve model Function Single Double Closed center Exhaust center VZA4121-01 VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02
Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M5 x 0.8 AS231FG-01 AS221FG-01 R 1/8 AS231FG-02 AS221FG-02 R 1/4 AS331FG-02 AS321FG-02 R 1/4 AS331FG-03 AS321FG-03 R 3/8 AS431FG-04 AS421FG-04 R 1/2 AS131FG-U10/32 AS121FG-U10/32 10-32 UNF AS231FG-N01 AS221FG-N01 NPT 1/8 AS231FG-N02 AS221FG-N02 NPT 1/4 AS331FG-N02