VCC

mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.

CG1

/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 106 (114) 16 16 16 16 18 18 22 22 15 (16) 8 10 12 16 20 20 25 30 14 11 11 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 Up to 200 201to350 23 30 16.5 20 26 32 38 50 60 M5 Depth 7.5 5.5 M6 X 0.75 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) Up to 300 301to400 25 25 M5 Depth 8 35.5 44 55 69 80

VCL

71 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 342 Series VCS Direct Operated 2 Port Solenoid Valve For Steam How to Order Manifold How to Order Manifold Assembly VV2C S D 2 02 01 Enter the mounting valve

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

(0 to 1 MPa) 0 R(PT) 1/8, M5 X 0.8 01 R(PT) 1/4, M5 X 0.8 02 NPTF 1/8, M5 X 0.8 T01 NPTF 1/4, M5 X 0.8 T02 Sensor Specifications/General Purpose Fluid Applications PSE520-01 PSE520-02 PSE520-T01 PSE520-T02 Model 0 to 1 MPa Operating pressure range 2MPa Max. pressure Fluid non corrosive to SUS304, SUS630 Fluid Analog (1 to 5V, Load impedance: 10k or more) Output specification 12 to 24 V DC

AIR COMBINATION

AD38-A AD48-A Y100-A Y200-A Y300-A Y400-A Y500-A Spacer Y100T-A Y200T-A Y300T-A Y400T-A Y500T-A Spacer with bracket AKM2000-01-A AKM3000-(01)-A AKM4000-(02)-A Check valve Note4) Note5) AKM2000-(02)-A AKM3000-02-A AKM4000-03-A IS10M-20-A IS10M-30-A IS10M-40-A IS10M-50-A Pressure switch Note5) Y210-01-A Y310-(01)-A Y410-(02)-A Y510-(02)-A T-Spacer Note4) Note5) Y110-M5-A Y210-(02)-A Y310

Process Pump

For AIR EXH: AN20-02 (: Either Nil or N is entered as a thread symbol.)

Modular Type Regulator Series AR

Note 3) For M5 and NPT thread types.

Membrane Air Dryer

Port size Symbol Port size Size 30 50 60 75 100 02 03 04 Bracket Assembly (Accessory) Part No. $ $ 1/4 $ $ $ $ $ 3/8 Part no.

modular-press-e

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Hydraulic

Example: M5 x 50l 4pcs.

ZP

(mm) Pad type Material Series ZPT Without buffer ZPT U N 02 A5 Vacuum entry/Mounting thread diameter Pad diameter (mm) 2 to 8 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) Connection ZX Symbol 2004 2 x 4 Thread diameter 10 to 16 20 to 32 40, 50 3507 3.5 x 7 ZR 4010 4 x 10 02 04 2 A5 A6 A8 M4 x 0.7 B4 M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 Rc B01 M5 x 0.8 M6 x 1 M8 x 1 Male thread Female

Fieldbus System

1 A, B port size q Series 3 SY3000 5 SY5000 7 SY7000 Nil Standard (0.7 MPa) B Quick response type (0.7 MPa) K* High pressure type (1.0 MPa) Thread piping Symbol Port size Applicable series M5 M5 x 0.8 SY3000 01 1/8 SY5000 02 1/4 SY7000 * Only metal seal type is available for high pressure type.

Table of Contents

(Inlet air pressure: 0.7 MPa, Inlet air temperature: 20C) HA How to Order AT ID 20 02 0 ID AMG ID400 Option B Bracket Z Adsorbent for low dew point Basic size AFF 20 30 40 60 Port size AM ID200 02 B 04 06 1 4 B 1 2 B 3 4 Nil Rc Thread type Misc.

ITV

x 0.8 SRF M5 x 0.8 Air introduction port Air introduction port VCHR 19 34 19 34 ITV ITV VAC.

0.4

thread With One-touch fittings for 3.2 With One-touch fittings for 4 With One-touch fittings for 6 M5 thread C3 C4 C6 M5 L3 L4 L6 L5 (R1)5 1 (P) 3(R2) Side ported S 4 position dual 3 port valve 4(A) 2(B) kit A(2) (1) Top ported 3(R) 1(P) C 4 position dual 3 port valve Note 1) Can be changed to side ported configuration.

Air Cylinder Series CM2

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 6, 8 3.2, 4 8, 10 3.2, 4, 6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" Inch size 5/32" 3/16" 7 12 Air flow (l/min (ANR)) 38 Controlled flow 0.1 0.2 Effective area (mm2) 0.6 230 180 460 100 Flow rate (l/min (ANR)) 260 390

Electric Actuators

Performance/Specifications General specifications LC5-1-T1-02 Part no.

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

Modular Type Lubricators Series AL

Example) AL30-03B-2R Symbol Description Body size 20 30 40 50 60 10 Metric thread (M5) Rc NPT G Nil Thread type N F + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 1) Option (Mounting) Without mounting option With bracket + Polycarbonate bowl 1000 cm3 tank 1000 cm3 tank (with switch) Lowest limit ON 1000 cm3 tank (with switch) Lowest limit OFF Metal bowl Nylon bowl