Type: Manual Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Seal Material: FKM 1349-80, Amount of leakage(Pa·m³/s): Internal: 1.3 × 10^-10, External

Type: Manual Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Seal Material: FKM 1349-80, Amount of leakage(Pa·m³/s): Internal: 1.3 × 10^-10, External

Type: Solenoid Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Electrical Entry Method

Type: Solenoid Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Electrical Entry Method

Type: Solenoid Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Electrical Entry Method

Type: Solenoid Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Electrical Entry Method

Type: Solenoid Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Electrical Entry Method

Type: Pilot Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: No auto-switch (no magnet

Fieldbus system EtherCAT compatible SI Unit

(Only EX600-DX#C1) (2) Check if the connector is loose and if the wire is broken. Red/green all LEDs are flashing. An internal memory error occurred in the Digital input unit. Turn OFF the power for the unit and then turn it ON again. If the error is not eliminated, stop the operation and contact SMC. 2 Red ST LED is ON.

MQQ

36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 28 10 to 50, 75, 100 60.5 M6 x 1.0 48.5 13 16 52 8.5 M8 x 1.25 7 69 5 14 12 40 5.5 9 26 10 57 10 With rod end male thread: MQQDM Rod end nut H1 Bore size (mm) L1 C1

Compact Type

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

Electric Actuators

LC7R1 Single Option Standard motor vertical mount specification electric actuator S0 Regenerative absorption unit connector and pin Series LC1 connector and pin S1 C1 Series LC1 connection cable (0.5m) Note 3) Note 3) The temperature control output cable length is 1m. Also, the connector cable already has the required contact pin and connector assembled.

MQQ

60 44 34 8 8 36 5.5 16 47 7 10 25.5 5.4 9 M6 x 1.0 7 19.5 10 6 M5 x 0.8 10 to 60 47.5 37.5 10 10 40 5.5 20 52 8 10 28 5.4 9 M6 x 1.0 7 23 10 49.5 7 M6 x 1.0 10 to 50, 75, 100 54 42 12 12 45 8.5 25 60 4.5 10 12 34 5.5 9 M6 x 1.0 7 26 10 57 10 M8 x 1.25 10 to 50, 75, 100 60.5 48.5 13 16 52 8.5 28 69 5 14 12 40 5.5 9 With rod end male thread/MQQ DM Rod end nut H1 (mm) Bore size (mm) L1 C1

Low Friction Cylinders Series MQ

H1 X 10 23.5 10.5 15.5 M5 x 0.8 16 26.5 11.5 16.5 M6 x 1.0 C1 20 28.5 13.5 18.5 M8 x 1.25 Rod end thread adapter X 25 34.5 16.5 M10 x 1.25 22.5 L1 30 40.5 22.5 M14 x 1.5 28.5 40 40.5 22.5 M14 x 1.5 28.5 Refer to page 1180 for details regarding the rod end thread adapter and the rod end nut. 1178 Compact Low Friction Cylinder Metal Seal Series MQQ (mm) Foot type: MQQLL 10, 16, 20 Special

Compact Cylinder with Lock Series CLQ

L1 X C1 H2 Rod end nut Dimensions for cylinders with a rubber bumper are the same as the standard type above.

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

Mini Free Mount Cylinder

(mm) B1 H1 Bore size (mm) d H1 B1 C1 Part no.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

64.5 4 16 54.5 5 C1 4 x 22l SWRM B E 80 80 all types Polished round 18SPCC 71.5 4 16 61.5 5 A 5 x 30l SWRM 100 Polished round 20SPCC 100, 125 all types 82 5 20 72 5 5 x 30l SWRM 160 Polished round 22SPCC 160 all types 94 5 20 79 7.5 Knuckle Material: Carbon steel d (H8) L (F8) Applicable cylinder type Order no.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

X L1 Rod end male thread (mm) Bore size (mm) C1 X H1 L1 32 20.5 23.5 28.5 M14 x 1.5 40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5 33.5 M18 x 1.5 (mm) Without auto switch With auto switch A B A B U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33 9 depth 7 32 50 43 13 16 45 7.5 M8 x 1.25 60 4.5 14 7 34 5.5 1/8 10.5 58.5 31.5 14 75, 100 50 43 5 to 50 46.5 39.5 9 depth

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

With rod end male thread: MQQ-DM Rod end nut H1 (mm) Bore size (mm) L1 C1 H1 X 10 23.5 10.5 M5 x 0.8 15.5 16 26.5 11.5 M6 x 1.0 16.5 C1 20 28.5 13.5 M8 x 1.25 18.5 Rod end thread adapter X 25 34.5 16.5 M10 x 1.25 22.5 L1 30 40.5 22.5 M14 x 1.5 28.5 40 40.5 22.5 M14 x 1.5 28.5 Refer to page 9 for details regarding the rod end thread adapter and the rod end nut. 5 Compact Low Friction Cylinder