VM

6-8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

VM

6-8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

EXxx-OMS0026CN

1 byte (2)(EX600-DYB)1 byte (5)SI (EX600-SEN3)4 byte Diagnostic mode 0 (LSB-MSB) 1 Lo byte DYB(1) 07 Byte0 AXA 0 Byte1 Hi byte DYB(2) 07 (0) Byte2 AXA 1 Lo byte 07 (0) Byte3 Hi byte 815 SEN3(5) Byte4 DXB(3) 07 1623 Byte5 07 2431 DXD(4) Byte6 815 Byte7 Padding 8 byte 6 byte Diagnostic mode 0 (MSB-LSB) 1 Hi byte DYB(1) 07 Byte0 AXA 0 Byte1 Lo byte DYB(2) 07 (0) Byte2 AXA 1 Hi byte 07

Compact and Lightweight

ZH20DA-10-12-12 112.2 62.2 Metric ZH05DA-07-07-07 11.15 11.15 11.15 1/4" 1/4" 1/4" 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-07-07-07 55 ZH10DA-07-07-09 13.2 5/16" 14.2 61.7 ZH13DA-09-11-11 13.2 15.45 15.45 5/16" 3/8" 3/8" 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-09-11-11 83.6 51.4 ZH18DA-11-13-13 15.45 19.3 19.3 3/8" 1

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 12 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Note) Metric size KE Inch size 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 04 06 08 10 12 4 6 8 10 12 AS-FG AS-FG With One-touch fitting AS-FP Stainless steel specifications (SUS303) AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 702.

AS-FG/ASD-FG

Type Applicable tube outside diameter Metric size Inch size 2 3 Elbow Universal 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 3.2 4 6 8 10 12 23 04 06 08 10 12 Control method 0 1 Meter-out Meter-in With One-touch fittings Use a 1/8" tube.

reduces flow setting time

, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS2052FS AS1002FS AS2002FS Inlet pressure: 0.5 MPa 500 Inlet pressure: 0.5 MPa 100 08, 09 Inlet pressure: 0.5 MPa 06, 07 01, 23, 03, 04, 06, 07 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] 200 400 06, 07 03, 04 300 50 100 200 100 0 0 5 10 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002FS AS4002FS Inlet pressure

Speed Controller with One-touch Fitting

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

F

16 65 10 18 29.5 27 40 12 16 18.5 5/32 6 22 KM11-03-09-6 19.5 5/16 10 86 10 18 29.5 27 10.6 61.5 12 16 18.5 5/32 6 30 KM11-03-09-10 21.5 3/8 6 77.8 10 19.5 31.5 30.5 13.3 48 13 17 21 1/4 7 32 KM11-07-11-6 21.5 10 13.3 3/8 104 10 19.5 31.5 30.5 73.5 13 17 21 1/4 7 44 KM11-07-11-10 25 1/2 6 85 12.8 24 37.7 35.9 15.2 52.8 15 18.5 22 5/16 9.5 44 KM11-09-13-6 25 1/2 10 115 12.8 24 37.7 35.9 15.2

VM

Voltage AC125V 2 2 4 4 15 10 15 10 AC250V 1.5 1.5 3 3 15 10 15 10 DC8V 1.5 2.5 3 5 15 15 15 15 DC14V 1.5 2.5 3 5 15 10 15 10 DC30V 1.5 2.5 3 5 6 5 6 5 DC125V 0.3 0.05 0.3 0.05 0.5 0.05 0.5 0.05 DC250V 0.2 0.03 0.2 0.03 0.25 0.03 0.25 0.03 JIS Symbol Construction Precautions Component Parts Be sure to read before handling.

Series KV2 Fittings

(g) Bag/Box Quantity MB D2 D3 D4 D5 D6 L1 L2 L3 5/32** 5/32 5/32 5/32 1/4** 1/4 1/4 1/4 3/8** 3/8** 3/8 3/8 3/8 1/2** 1/2** 1/2** 1/2 1/2 1/2 5/8** 1/4 5/32 5/32 5/32 3/8 1/4 1/4 1/4 1/4 1/4 3/8 3/8 3/8 1/4 3/8 3/8 1/2 1/2 1/2 5/8 1/4-18 1/16-18 1/8-27 1/4-18 1/4-18 1/8-27 1/4-18 3/8-18 1/4-18 3/8-18 1/4-18 3/8-18 1/2-14 1/2-14 3/8-18 1/2-14 1/4-18 3/8-18 1/2-14 1/2-14 KV2Y03-07-35S KV2Y03

Table of Contents

4 7,, 9= 5,'., ?4 , 9= 5,'., ?4 77, 9= 5,'., ?4 70, 9= 5,'., ?4 0( 9= 5,'., ?

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations AS-FG AS-FG Note) -U10/32 has the same specification as M5.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-07 23.9 31 15 21 21 33.1 40.2 18.5 13.2 10 1/4" 18.5 19 AS221FG-02-04 AS221FG-N01-09 15 25.3 32.4 16 25.2 34.4 10.4 15.2 4 5/16" 21 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 18.2 17 25.2 34.4 12.8 10.4 6 5/32" 16 18.5 35.4 40.4 17 34.4 29.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 18.2 24.9 34.2 34 18.5 27.2 36.4 15.2 11.4 8 3/16" 17 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 17.5 25.2 34.5 20

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Flow Rate and Sonic Conductance AS121F-M3 AS121F-M5 AS131F-M5 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS131F-M3 Model AS121F-M5-02 2, 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size Tubing O.D. 1/8" , 3/16" 1/8" , 5/32" 1/8" , 5/32" 3/16" , 1/4" , 1/4" , 5/16" , 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 1/4" , 5/32" 5/16" 3/8" Controlled