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F|drinser rype Fighr angle lhgd q! ffiffi Key connection is ideal tor impact resistance.

VCW

Grommet: G Conduit: C 2-M 2-M L L K Approx. 300 K Q F D Approx. 280 D Q F C R C G (PF) 1/2 R E B A H E 2-P Port size A H 2-P Port size B DIN connector: D Conduit terminal: T 2-M 2-M L L K Cable 6.8 to 10 K 27.5 F F Q (Q) 34 S 25 U R C R C G (PF) 1/2 (44) E B A H D (S) E G (PF) 1/2 B A H D 2-P Port size 2-P Port size N.C.

Electric Rotary Table

q Check the actuator label for model number. This matches the driver. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

4-channel Flow Monitor ( compatible)

(Display pattern for 3rd, 4th, 5th, 8th and 9th digit from the left) Characters Q, X, Z, /, or cannot be displayed. (Display patter for 1st., 2nd., 6th., and 7th digit) Characters A to Z can be displayed (the same as the 3 digits on the right).

OMU0023

Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B { 28 1C FS 60 3C < 92 5C \ 124 7C

High Purity Chemical Valve

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

5 Port Solenoid Valve Series VQZ1000/2000/3000

SZ 75 VP4 39.5 S0700 VQ VQ4 Individual SUP spacer VVQZ1000-P-5-M5 (-Q) (for VQZ1000) VVQZ2000-P-5-01 (-Q) (for VQZ2000) VVQZ3000-P-5-02 (-Q) (for VQZ3000) VQ5 + Rc1/8:VQZ2000 M5:VQZ1000 VQC Rc1/4:VQZ3000 VQZ D Supply port can be installed individually by mounting an individual supply spacer onto the manifold block.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Environment

How to Order w e r t q y u i o !0 !1 !2 !

CXWM/CXWL

Theoretical Output (N) Operating pressure (MPa) Piston area (mm 2) Model Rod size (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 CXWM106 101 20 30 40 51 61 71 81 91 CXWM1610 245 49 74 98 123 147 172 196 221 CXWM2012 402 80 121 161 201 241 281 322 362 CXWM2514 597 119 179 239 299 358 418 478 537 CXWM32Made to Order Specifications (For details, refer to page 8-31-1.) 20 980 196 294 392 490 588 686 784

HRX-OM-Q026

(IEC 60417-5032-1) How to see the serial number Q Z 001 December 2012 Q Z 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2012 Q Repeated from A to Z in alphabetic al order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2013 R 2 P 2014 S 3 Q Fig. 1-1 Position of the product label HRSH Series 1.4 Product Label 1-3 HRX-OM-Q026 Chapter 1 Safety

Clamp Cylinder Series CK1

9 @0 t q @2 w @3 e @4 @1 !5 !4 !6 y !7 !0 i u !8 MK CKQ CLKQ o CK1 !3 CLK2 !1 !2 @1 @4 Component Parts No.

Ejector Valve Unit Series ZYY/ZYX 1

Silencer (AN203-KM81 pc) 51 26 16 2.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

B Counterbore depth C T Y 0 -0.1 L Cylinder tube outer circumference: TC WP Hard chrome plated + special treatment X F GW 4 x LD GP D QW PW 2 x P (Piping port) 4 x 3.2 2 x 4 x MM Thread depth M W K Z + Stroke Q + Stroke WP G G 4 x 6.5 12-CY3R6 (mm) A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 K 7 9 14 11 15

Prevents Micro-Bubbles

J type fitting assembly procedure J type Pull out the lever pin q. Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 y Tubing !

Compact Rotary Actuator Series CRQ2

2 q w r y !5 i q w r y !5 !6 i Component Parts Component Parts Description Note Material No.

Air Cylinder

D-Across Flats CD F CW CW CB 2-EE (NPTF) Q Width Across Flats KK C KK AA Bore 200 250 325 400 Q 3/4 3/4 1 1/16 1 1/16 MM B B EA LR A C DD FA G A J R LF + Stroke E L M ZB + Stroke XD + Stroke X119US Option (in) C Bore (in) AA Y A E LF XD WF B EA D CD P EE F CW MM ZB J M LR KK CB DD G L FA R 1/2 200 (2") 2.6 2.09 1 1/8 2 1/2 3 5/8 5 3/4 1 3/8 1 1/2 0.3 7/8 1/2 2.40 3/8 3/8 1/2 1 5 1/8 1.06

Compressed Air Preparation Filter

Example) AM30-N03BD-6RZ-D q e r t y w Symbol Description w Body size 20 30 40 50 60 AFF Nominal filtration rating: 1 m V V V V V Water droplet removal ratio: 99% AM Nominal filtration rating: 0.1 m V V V V V Oil mist concentration on the outlet side: 1 mg/m3 q Filter type AMD Nominal filtration rating: 0.01 m V V V V V Oil mist concentration on the outlet side: 0.1 mg/m3 + e Thread type

VM

Component Parts w q Description Brass Brass t r Description Stainless steel Material Note No. Material Note No.