Step Motor Controller

3 Cable color Circuit U V W Red White Black Connector D terminal no. 12 13 7 6 9 8 11 10 3 Connector A2 terminal no.

XL

D-F9N D-F9P D-F9B Lateral Electrical entry 3 wire 2 wire Wiring system NPN type PNP type Output system 24VDC relay, PLC Applicable load Power supply voltage 12/24VDC (10 to 28VDC) Current consumption 8mA or less 10mA or less Load voltage 28VDC or less 24VDC (10 to 28VDC) Load current 50mA or less 5 to 30mA Auto Switch Internal Circuits Internal voltage drop 0.4V or less 1.5V or less 4.5V

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

High Vacuum Angle Valve, XL Series

D-F9N D-F9P D-F9B Lateral Electrical entry 3 wire 2 wire Wiring system NPN type PNP type Output system 24VDC relay, PLC Applicable load Power supply voltage 12/24VDC (10 to 28VDC) Current consumption 8mA or less 10mA or less Load voltage 28VDC or less 24VDC (10 to 28VDC) Load current 50mA or less 5 to 30mA Auto Switch Internal Circuits Internal voltage drop 0.4V or less 1.5V or less 4.5V

Electric Actuator

Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver Stroke (mm) Model 200 300 400 500 700 600 800 900 1000 1200 1500 2000 3000 LEJB40 LEJB63 D ) D D D ) ) D D D D ) ) D D ) ) D ) D D D D D 3: Strokes other than those shown above are produced as special order (1 mm increments). For auto switches, refer to pages 19, 20.

HEC_001W-E

U p p e r / L o w e r T e m p . A l a r m S e q u e n c e M O D E < O f f 7-10 Operation 7.6.3 Setting mode, Level 3 1.Unit Number Setting range : 0 to F (Hex decimal) Indicated content : Unit number (Ex. : 0) Function : Sets unit number used. This item is applicable only when multiple units are used. U n i t N u m b e r M O D E < 0 2.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

E D C ZL 3 2 ZY Dimensions: 10 mm Stroke A B (mm) J H F D C E A B I Model ZQ ZPR10F10-0-A10 10 12.5 39.5 10 12 23.4 50.5 84.5 With a stroke of 10 mm ZPR13F10-0-A10 13 15 23 ZF 10.5 13 40 23.9 51 85 ZPR16F10-0-A10 16 18 ZP S (mm) M14 x 1 ZCU Q: 4 Q: 6 Y Model R S R S Hexagon width across flats 19 AMJ ZPR10F10-0-A10 1.5 I 5 ZPR13F10-0-A10 10.4 20.6 12.8 21.6 Misc. 2 ZPR16F10-0-A10 Additional

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

2 (Different surfaces) 10 n 10 + 30 (n 2) 2 (Same surface) 50 D-A9l 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) 2 (Same surface) 40 D-A9lV 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) * n = 3, 4, 5 * The D-M9lV/M9lWV/M9lAV/A9lV are mountable on 32 to 63.

MGC

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

NCM

D-M9W D-A9 D-A9V D-H7C D-C73C D-C80C D-G5NTL D-B5 D-B59W D-B64 Auto switch model D-M9V D-M9WV D-H7 D-H7W D-H7BAL D-H7NF D-C7 D-C80 (in) D-M9 D-M9W D-A9 D-H7 D-H7W D-H7C D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-G5NTL D-B5 D-B64 D-B59W Auto switch model HS 0.96 1.02 1.12 1.22 1.34 1.59 HS 0.98 1.04 1.14 1.24 1.36 1.61 HS 0.85 0.91 0.96 1.06 1.18 1.44 HS 0.87 0.93 0.98 1.08 1.20 1.46 HS 0.98

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

) 16.5 23.7 (GZ, GS: 24.4) [25.4] P=19 23.5 11.5 122 (GZ, GS: 123.4) [125.4] 0.5 30 16.6 62.8 83.7 (GZ, GS: 84.7) [85.7] 21 2.8 R R R R P A A A A A 63.6 60 P 42 B B B B B 6-Rc(PT)1/4 (P, R port) Manual override L2 10 Depress and turn to operate and lock override.

C95

R CJ2 SW1 EE EE KK KK CM2 WA B D E B D ??

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

n +4 0 R ra g n 0 n io at ot ra R 18 R n ot io ve R at at oo io ot ot R n gr ra y ng at ke e of +4 0 io n 0 ra 19 ng e e ov of o ke gr y Switch A Switch B Proper Auto Switch Mounting Position at Rotation End CDRA1W30 CDRA150 to 100 Auto switch D-A5 (A6/F5/J5) Auto switch D-A7 (A8/F7/J7) Operating range at proper mounting position (Lm/2) Operating angle m: Converts the operating range (Lm

ZP

Model Size C10 A 10 ZP10C B 12 C 4 D 13 E F Y 1.7 7.7 7.7 8.2 9.5 9.5 10 13.7 14.7 12 12 12.5 14 14 14.5 18.5 19.5 3.8 ZP10U to 50U C13 13 ZP13C 15 4 13 1.8 C16 16 ZP16C 18 4 13 1.2 C20 20 ZP20C 23 4 15 1.7 C25 25 ZP25C 28 4 15 1.8 C32 32 ZP32C 35 4 15 2.3 C40 40 ZP40C 43 7 18 3.3 C50 50 ZP50C 53 7 18 Deep (D) ZP10D to 40D Model Size U02 A ZP02U B 2.6 C 1.2 D E F Y 2 4 6 8 10 13 16 20 25

Vacuum Pad: Ball Joint Type

tubing O.D.Q I 5 H R J F Hexagon width across flats 10 Hexagon width across flats 2 E Hexagon width across flats 12 Applicable tubing O.D.Q D C Y 2 R H A B Hexagon width across flats 12 Hexagon width across flats 3 F E D C 3 2 Dimensions: 10 mm Stroke A A B (mm) B C D E F H I J Model ZPR10F10-0-A10 10 12 10 12.5 23.4 39.5 50.5 84.5 Stroke: 10 mm ZPR13F10-0-A10 13 15 23 10.5 13 23.9 40 51

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

D Bus voltage (Note 4) 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 -10[V] CW direction Note 1.

Compressed Air Preparation Filter

[mm] Mass concentration Cp Pressure dew point Concentration of liquid water Cw Concentration of total oil 0.1 < d 0.5 0.5 < d 1.0 1.0 < d 5.0 [mg/m3] [C] [g/m3] [mg/m3] 0 As specified by the equipment user or supplier and more stringent than class 1 1 20 400 10 70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

, R port) M5 x 0.8 (A port) (Pitch) P=16 23 Manual override L1 L2 4.5 (Station 1) (Station n) (Light/surge voltage suppressor) + + + + 54.1 [61.1] 38.7 25.5 DIN terminal (D) M8 connector (W0) L plug connector (L) M plug connector (M) 49 49 49 49 P R P R P R P R 57.2 [59.4] 52.2 67 [69.2] 58.7 66.1 76.1 Max. 10 77 Pg7 65.2 [72.2] Approx. 300 (Lead wire length) 41.1 M8 x 1 58.6 68.1 Approx.

Air Pilot Operated Series NVSA

>Aiv EJ E) =:-:H8 I 10 l 1 I : i/b.a $n a ltfllon!. @nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.