LJ1H

10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

dust cap) 12 12 stations P Port R Port NPTF NPTF 14 Accessories Series SYJ3000 How to Order Pilot Valve Ass'y How to Order Connector Ass'y SY114 5 G SY100-30-4ADC : Indicator light and surge voltage suppressor Voltage SY100-30-1A100VAC : 5 6 V S R 1 2 24VDC 12VDC 6VDC 5VDC 3VDC 100VAC50/60Hz 200VAC50/60Hz 110VAC50/60Hz [115VAC50/60Hz] Without indicator light and surge voltage suppressor

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

Mechanically Jointed Rodless Cylinder Series MY2

Static moment M1 M1 m1 x g x Y m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

KJ

35.5 12 1 4 11.11 12 10 13.6 39 35 1 8 Reference dimensions after NPT thread installation.

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

MVGQ

Enclosure Dustproof Grommet (G)/(H), L plug connector (L), M Plug connector (M) RS Q G Electrical entry RS H A 24, 12, 6, 5, 3 DC Coil rated voltage (V) 100, 110, 200, 220 AC50/60 Hz Standard Stroke RZQ 10% of the rated voltage Allowable voltage (W) (2) (%) Model Standard stroke (mm) 0.5 (With indicator light: 0.55) Power consumption DC MI W S M L MVGQ 12/16 10, 20, 30, 40, 50, 75, 100 0.9

Cylinder with Lock Series CLS

(n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 2 pcs. (Different surfaces, Same surface), 1 pc. 15 105 110 115 D-M9 D-M9W 15 + 40 (n2) 2 105 + 40 (n4) 2 110 + 40 (n4) 2 115 + 40 (n4) 2 n pcs. (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 pcs.

MGP

B+stroke E A+stroke MGP MGQ MGG MGPM, MGPL/Common Dimensions Bore (mm) Standard stroke (mm) MGC B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q GC 84.5 62.5 12 12 16 16 10 10 12 12 48 54 64 78 12.5 9 12.5 112 120 148 162 M6 24 27 32 39 M8 X 1.25 20 20 22 22 M8 X 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 16 16 20 20 24 27 32 39 11 11 14 14 30 30 40 50 34 40 46 58 7.5 7.5 9 9 Rc1/8

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) M3 Static load m M1 m1 x g x X m2 x g x X m4 x g x Z M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

/

PE 12 E Bracket Main port R T J D 1 2 3 I O M C N P: For mounting 4 locations B H G A Drawing indicates conduit terminal type.

Programless controller (with stroke study) Step motor (servo 24 VDC)

(5) Stroke study . 12 (6) Registering of the stopping position . 12 (7) Operation check . 12 (8) The operation of the electric actuator . 12 3.

T

(mm) 6 8 10 12 2.5 I.D.

CRBU

Model A B C D E(g6) F(h9) G H K L M N R S1 S2 T U V W X Y Z 12 0 -0.043 14 0 -0.043 16 0 -0.043 24 1 30 1 5-0.004 -0.012 6-0.004 -0.012 8-0.005 -0.014 34 25 21 3 29 36 48 29 18 1.5 15.5 10 0.5 10.5 10.5 M5 X 0.8 3.5 M3 X 0.5 18.5 CDRBUW15-lD 42 34.5 17 11 26 4 36 44 59 25 30 20 1.5 10 0.5 11.5 M5 X 0.8 4.5 M4 X 0.7 CDRBUW20-lD 34.5 3 25.5 3 17.5 12 50 47.5 13 29 4.5 42 52 69 25 31 22 2 12

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

P, R port thread type Stations SV 04 4 stations Applicable blanking plate assembly SYJ3000-21-3A (With dust cap) Nil Rc : : 00F G SZ 12 12 stations P port 1/8 1/8 00N NPT R port 00T NPTF SY Applicable solenoid valve Refer to page 1-5-15. Type 32P How to Order SS5YJ332P 07 C4 SYJ A, B port M5 x 0.8, C4 Applicable connector assembly Refer to page 1-5-15.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Sine Cylinder Series REC

22 19.5 13 12 17 10 9 10.5 11 22 45 6 46.5 5.5 30 10 40 M14 x 1.5 32 24 21 16 14 22 15 10 13.5 12.5 26.5 50 8 56.2 7 39 12 NA NN P RR S U Z ZZ Bore (mm) 20 M20 x 1.5 30 1/8 9 146 14 217 226 25 M26 x 1.5 34.5 1/8 9 146 14 221 230 32 M26 x 1.5 42.5 1/8 9 159 14 234 243 40 M32 x 2 51 1/4 11 181 18 270 281 Double clevis style: RECD 2 x P (Rc, NPT, G) NN +0.058 0 CDH10 G G H1 Plugged (M5 x 0.8

Sine Cylinder Series REC

22 19.5 13 12 17 10 9 10.5 11 22 45 6 46.5 5.5 30 10 40 M14 x 1.5 32 24 21 16 14 22 15 10 13.5 12.5 26.5 50 8 56.2 7 39 12 NA NN P RR S U Z ZZ Bore (mm) 20 M20 x 1.5 30 1/8 9 146 14 217 226 25 M26 x 1.5 34.5 1/8 9 146 14 221 230 32 M26 x 1.5 42.5 1/8 9 159 14 234 243 40 M32 x 2 51 1/4 11 181 18 270 281 Double clevis style: RECD 2 x P (Rc, NPT, G) NN +0.058 0 CDH10 G G H1 Plugged (M5 x 0.8