This is a legacy product, and replaced byVT307-5DO1-01F-Q, VALVE, SOL, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, .36076 lb

This is a legacy product, and replaced byVT307-BDO1-01F-Q, VALVE, SOL, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, .30864 lb

This is a legacy product, and replaced byVT307-5DZ1-01F-Q, VT3 BASE MT 1/8, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, 0.42793 lb

This is a legacy product, and replaced byVT307-5D1-01F-Q, VT3 BASE MT 1/8, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, 0.31691 lb

Fieldbus System

How to Order Valves SV 1 1 00 F 5 U Series Made to Order 1 2 3 SV1000 SV2000 SV3000 X90 Nil Fluororubber specification Manual override Type of actuation Nil: Non-locking push type D: Push-turn locking slotted type 1 2 3 4 5 A B C 2-position single 2-position double 3-position closed center 3-position exhaust center 3-position pressure center 4-position dual 3-port valve (N.C.

Series SV

No. 1 2 3 2 Sensor power supply + Drain/Shield 1 1 5 Open N.C (SIGNAL) V+ Circuit power supply + 2 2 4 3 4 1 Sensor power supply SW V Circuit power supply 3 3 5 Sensor input signal SIGNAL CAN_H Signal H 4 4 Sensor ground E CAN_L Signal L 5 5 In the case of a 4 input block (EX250-IE2), this is the sensor input signal. 0 0 0 0 BUS 1 1 1 P 1 2 B 1 2 B 2 B 2 B 2 B 2 2 PWR E 3/5 3 3 4 A 4 A

C95

R GL WB C85 GL 1 T BG 4 x RT 4 x RT C76 VA I9 VD V H1 VB BG H1 Q GF GE CG1 I12 F AM I12 AM BN 2 G WH 18 H + Stroke H + Stroke ZY + Stroke MB MB1 CP95 C95 C92 Be 11 46 52 65 75 95 114 Bore size (mm) B AM BP BN D EE GE BG GL 1 H 2 E1 GF H F GL E G GA GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Series VCS

2 Port for Steam Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Angle Seat Valve /

VXB215C F(H).

High Purity Chemical Valve

S) 2 x Q Breathing port: R H G C SMC SMC SMC SMC N V 1/4 1/4 1/4 U 3/8 E Pitch = B Dimensions (mm) Station n x A port 2 3 4 5 Model Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 LLC2A 75 106 137 168 146 177 208 239 73 109.5 146 182.5 LLC3A 84 120.5 157 193.5 183 219.5 256 292.5 Dimensions (mm) 94 141 188 235 A B Q C D E G H K N R S U V W Y LLC4A Model LLC2A LLC3A LLC4A LLC5A 109

Fieldbus System

How to OrderValves (With two mounting screws) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

0 #8 @4 q i #5 #4 $8 @8 $7 $3 @7 @0 $9 #9 $1 @6 #1 $6 #0 @2 $7 $5 $0 @9 @1 $3 @5 !3 $4 !9 #7 $2 #6 #3 !2 A #2 @3 A Section A-A !7 !8 t !7 Enlarged drawing of shim part !6 y !

Angle Seat Valve

VXB215C F(H).

/

0 3 port 3 port 7 MPa 7 MPa i i o o PE port 12 port PE port 12 port u y t u t y w w e q e q 1 port 2 port 1 port 2 port r r !0 !0 3 port 3 port Component Parts Description Material Note No.

Compact 5-Port Solenoid Valve

Product Precautions 14 JSY1000/3000/5000 Series Valve Construction Rubber Seal 2-position double 2-position single q e r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position

Wedge Cam Operation Gripper Series MHK2

Wedge Cam Operation Gripper 2 Finger 12, 16, 20, 25 Series MHK2 Wedge cam actuation for precision/rigidity Dust cover for adverse environments Compact and Lightweight Mounts from 3 directions Auto switch capable Q Q Q Table of Contents Q Q Q Q Product Features .page 4-5 Operation Guide/Safety Instructions .page 6-9 How to Order .page 10 Specifications .page 11 Construction

HRL

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

MXQ

8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16