1

Refer to the table below if spacers are required separately. 2 Size 2 2 3 3 4.5 4 6 2 1/4 3 3/8 3 Size 3 3 4.5 4 6 2 1/4 3 3/8 Electrical entry DC AC Female thread type 1 Size 1 1 2 2 3 1 1/8 G Grommet 2 Size 2 2 3 3 4.5 2 1/4 *1 GS Grommet (With surge voltage suppressor) 3 Size 3 3 4.5 4 6 3 3/8 D DIN terminal (With surge voltage suppressor) Fitting type Face seal fitting/Compression

Title not found

i 1 6 30 46 1 0 21 50 168 0 70 I 12 90 50 1 0 58 238 52 1 . 2 66 31 % 44.5 1 3 23 60 182 0 86 105 59 130 58 52 1 1 . 2 66 37 % 55 1 5 70 208 0 '102 1 8 130 160 71 297 65 't2.5 80 1 4 40 12 1 5 25 80 226 0 1 1 6 13.5 t 8 150 92 1 8 0 72 3 1 6 65 14.0 8 1 ra Single Glevis Type/CLAC with Bod Boot M14x r.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 M26X1.5 Dill|o||$io[$ $enies CIA Double Glevis TyPe/CLAD

Air Cylinder CLA Series Fine Lock Model

i 1 6 30 46 1 0 21 50 168 0 70 I 12 90 50 1 0 58 238 52 1 . 2 66 31 % 44.5 1 3 23 60 182 0 86 105 59 130 58 52 1 1 . 2 66 37 % 55 1 5 70 208 0 '102 1 8 130 160 71 297 65 't2.5 80 1 4 40 12 1 5 25 80 226 0 1 1 6 13.5 t 8 150 92 1 8 0 72 3 1 6 65 14.0 8 1 ra Single Glevis Type/CLAC with Bod Boot M14x r.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 M26X1.5 Dill|o||$io[$ $enies CIA Double Glevis TyPe/CLAD

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Auto Switch Proper Mounting Position (mm) Auto switch model D-M9 D-M9W D-A9 A A B B Bore size 6 10 16 (4.5) 5.5 (4.5) 5.5 (0.5) 1.5 (0.5) 1.5 (5) 6 (5) 6 (1) 2 (1) 2 (5.5) 6.5 (5.5) 6.5 (1.5) 2.5 (1.5) 2.5 The values in ( ) are measured from the end of the auto switch mounting bracket.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Caution Disassembly/Replacement A special tool is required when reassembling the cylinder after disassembled. Contact SMC when replacing component parts.

XSA Series

pressure Pa(abs) 110-6 Leakage Pam3/s Internal 1.310-9 Note4) External 1.310-11 Piping method Face seal fitting and compression fitting / (Rc, NPT) Threaded ports Port size Inch Face seal fitting Compression fitting 1/4 3/8 1/4 3/8 Rc, NPT 1/8 1/4 3/8 Rated voltage Note 5) 100/110/200/220/230/240/24/48VAC 12/24VDC Ambient and fluid temperature oC 5to60 Power consumption [W] Note 6) DC polar

SQ1000/2000

(K) (Y) 5 6 5 6 5 6 u 4 For single VQ110LJ2-1 Negative COM: VQ110NJ2-1 5 For double (latching) SQ1C41 SQ1B41 SQ1A41 4 2 4 2 4 2 For double (double solenoid) on A side (K) (Y) 5 6 6 VQ110 (N)J3(B)-1 For 3P, dual 3 port on A side N.C. N.C. N.O. N.O. 1 5 3 1 5 3 N.O.

ZP

Dimensions: Pad Unit ZP3-015U;[Weight: 0.1 g] ZP3-02U;[Weight: 0.1 g] ZP3-035U;[Weight: 0.1 g] Flat 3 3 2 3 2 2 1.5 1.5 1.5 0.5 1 1 0.5 1 0.5 3 3 3 0.8 0.8 0.8 0.3 0.3 0.3 2 1.5 3.5 2 4 2.5 ZP3-04UM;[Weight: 0.3 g] ZP3-06UM;[Weight: 0.3 g] ZP3-08UM;[Weight: 0.3 g] Flat with groove 7 7 7 5 5 5 3 3 3 2 1.5 2 1.5 2 1.5 6 6 6 1.2 2 2 0.8 0.8 0.5 4 8 6 6.5 8.5 4.5 1 Pad Unit Series ZP3 Dimensions

LEC-OM071xx

1 6 Utility Functions (Fn) 6.

Vacuum Pad

Dimensions: Pad Unit ZP3-015U;[Weight: 0.1 g] ZP3-02U;[Weight: 0.1 g] ZP3-035U;[Weight: 0.1 g] Flat 3 3 2 3 2 2 1.5 1.5 1.5 0.5 1 1 0.5 1 0.5 3 3 3 0.8 0.8 0.8 0.3 0.3 0.3 2 1.5 3.5 2 4 2.5 ZP3-04UM;[Weight: 0.3 g] ZP3-06UM;[Weight: 0.3 g] ZP3-08UM;[Weight: 0.3 g] Flat with groove 7 7 7 5 5 5 3 3 3 2 1.5 2 1.5 2 1.5 6 6 6 1.2 2 2 0.8 0.8 0.5 4 8 6 6.5 8.5 4.5 1 Pad Unit Series ZP3 Dimensions

Vacuum Pad

Dimensions: Pad Unit ZP3-015U;[Weight: 0.1 g] ZP3-02U;[Weight: 0.1 g] ZP3-035U;[Weight: 0.1 g] Flat 3 3 2 3 2 2 1.5 1.5 1.5 0.5 1 1 0.5 1 0.5 3 3 3 0.8 0.8 0.8 0.3 0.3 0.3 2 1.5 3.5 2 4 2.5 ZP3-04UM;[Weight: 0.3 g] ZP3-06UM;[Weight: 0.3 g] ZP3-08UM;[Weight: 0.3 g] Flat with groove 7 7 7 5 5 5 3 3 3 2 1.5 2 1.5 2 1.5 6 6 6 1.2 2 2 0.8 0.8 0.5 4 8 6 6.5 8.5 4.5 1 Pad Unit Series ZP3 Dimensions

Vacuum Pad

Dimensions: Pad Unit ZP3-015U;[Weight: 0.1 g] ZP3-02U;[Weight: 0.1 g] ZP3-035U;[Weight: 0.1 g] Flat 3 3 2 3 2 2 1.5 1.5 1.5 0.5 1 1 0.5 1 0.5 3 3 3 0.8 0.8 0.8 0.3 0.3 0.3 2 1.5 3.5 2 4 2.5 ZP3-04UM;[Weight: 0.3 g] ZP3-06UM;[Weight: 0.3 g] ZP3-08UM;[Weight: 0.3 g] Flat with groove 7 7 7 5 5 5 3 3 3 2 1.5 2 1.5 2 1.5 6 6 6 1.2 2 2 0.8 0.8 0.5 4 8 6 6.5 8.5 4.5 1 Pad Unit Series ZP3 Dimensions

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

8 1/4 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size A, B port 1/8 Flow characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 2.2 1.4 1.7 2.1 1.4 1.8 2.1 2.0 1.5 1.9

KS/KX

68 76 94 88 14 4 10.4 10.4 8 17 1 4 15.2 18 18.5 6 26.1 18.0 3 8 Connection thread 1 4 52 18.5 23.5 21 10 3 8 1 2 3 8 1 2 22 7 36.3 29.5 53 54 55 24 20.9 26 22 12 8 46.1 46.1 105 Applicable tubing Reference dimensions after R thread installation.

LVQ

Size Symbol 2 2 2 3 3 4 4 5 5 6 6 A B C A B A B A B A B 2 2 3 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" LVC LVA LVH LVD With reducer Basic size LVQ Note 1) Select a fitting the same

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

60 93.6 94.4 97.3 + + + + 1/4 (P, R port) Output no. 1/8 (A, B port) Built-in One-touch fitting (Station n) (Station 1) (Light/surge voltage suppressor) One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" 8, 5/16" 58.5 0 1 7 6 32.3 PWR 26.5 8 9 15 14 COM 17.9 27.1 Connector lock pin Take out when wiring the connector assembly. 4 5 6 7 8 9 10 11 12 13 14 15 Station Station 3 Station

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Fieldbus System

.: 6, 1/4" : 8, 5/16" : 10, 3/8" : 12 (Station 1) (Station n) 11.5 2 8 82.7 P 1 B 2 P 1 B 2 B 2 B 2 B 2 (56.6) 56.6 13.2 (For DIN rail mounting) 3/5 E 3/5 E 35.2 31.6 4 A 4 A 4 A 4 A 4 A 11.1 14.2 8.7 25 20.5 (Pitch) P = 19 (21.7) (10) (14.3) One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.: 12, 1/2" Note 1) These figures show the SS5Y7-10S6Q22-05D-C10.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

6 02 ( ) 1 4 02 ( ) 03 ( ) 04 ( ) 02 ( ) 03 ( ) 04 ( ) Port no.