High Vacuum Angle Valve, XL Series

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

MG

@2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

SMC Electronic Switch Series Variations

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

1 4 std. 3 8 std. 3 4 1 std. 1 std. 1 2 2 std. 2 3 5 6 8 9 B With bracket 1 Male thread D Drain piping (Except AMC220) (1) (2) 2 Female thread Note 1) Female thread: Available only AMC220, 320, 520.

Series CQ2

x 4-31.5 depth of counter bore 26 29 29 2-Rc 1/2 (port size) Width across flats 36 40 40 4-19 through 52 52 162 204 4.5 3 Note 1) Flat washer 4 pcs. 2 x 4-M22 x 2.5 thread depth 38 36 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less. 162 102 + Stroke 17 + Stroke 17 2-M24 x 3 effective thead depth 33 136 + 2 (strokes) 204 Width across flats 55 Width across flats 55 M36 x

C95Series

te.IDI1ubIe de>~) MB-803 J MB805 1 MBEms Note 1) When ordenng trunnIon mounting braCket, order 2 pes. for 1 cylinder. Trunnion mounting bracket (mm) .

Bag Filter

Applicable model Note 1) Cover 1 FGFC/R Carbon steel 1 FGF1 Cover 1 Stainless steel 1 FGFS/L Stainless steel 1 FGF1 Case 2 Stainless steel 1 Case Note 2) 2 FGFC/R Carbon steel 1 FGF1A FGF-BT01 1 Basket 3 Stainless steel FGF3A-40 3 FGF1B FGF-BT02 1 Stainless steel BT-3S FGF5A-60 5 FGF1A EJ501S1 3 Basket Element 4 Polyester FGF3B-40 3 FGF1B EJ601S1 Stainless steel BT-4S FGF5B-60 5 FGF1

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

3 2 1 4 3 2 1 Load Load Load Load Main circuit Main circuit (Gray) CH2_OUT1 (Gray) CH2_OUT1 NC NC 4 3 2 1 4 3 2 1 Sensor Sensor (Red) CH3_OUT1 (Red) CH3_OUT1 NC NC (Green) CH4_OUT1 (Green) CH4_OUT1 4 3 2 1 4 3 2 1 NC NC DC () DC () (Blue) (Blue) 52 Series PF2D Description Remote Type/Display Unit PF2D300, 301 RESET button ( + button) If the UP and DOWN buttons are pressed simultaneously

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

200 36.4 2 20 18 15.5 12 5 13 8 27 5 26 Up to 150 30.4 2 N P X ZZ Bore size 30 26 22 20 10 10 10 10 14 10 8 6 11 9 9 8 94 83 77 75 16 13 12 11 5.5, 9.5 counterbore depth 6 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 37 1/8 55 135 33 1/8 45 117 29 1/8 44 111 27 1/8 38 104 26 21 18 15 32 24 22 18 6.6, 11 counterbore depth 7 9, 14 counterbore depth 9 11, 17.5 counterbore depth 12 38 32 46 41

Power Clamp Cylinder

VD0.05 PA0.02 PC0.05 GC +0.1 K 0 PB0.02 GA GB VF LA0.1 VA0.02 C VE L 2 x 2 x P H7 depth D 2 x V H7 depth I 4 x NN depth S N 2 x NPT 1/4 G 2 x 2 x MM depth J Hexagon socket head plug 2 x NPT 1/4 G E B RB (mm) Bore size (mm) 50 63 80 C D E GA GB GC I J K L LA LB MM N NA NB NC NN P B 95 48 12 13.7 134.3 138.5 93 10 12 55 376.4 149.5 78.4 M10 x 1.5 19 13 36.5 10.3 M8 x 1.25 10 112 54 12 16.6

Large Bore Compact Cylinder Series CQ2

x 4-31.5 depth of counter bore 26 29 29 2-Rc 1/2 (port size) Width across flats 36 40 40 4-19 through 52 52 162 204 4.5 3 Note 1) Flat washer 4 pcs. 2 x 4-M22 x 2.5 thread depth 38 36 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less. 162 102 + Stroke 17 + Stroke 17 2-M24 x 3 effective thead depth 33 136 + 2 (strokes) 204 Width across flats 55 Width across flats 55 M36 x

Exhaust Cleaner Series AMC

Exhaust Cleaner Series AMC How to Order Ensures clean plant air and reduces noise pollution; Over 35 dB (A) noise reduction Over 99.9% oil mist removal 5 1 0 AMC 06 Thread Body size Suffix std. 1 4 std. 3 8 std. 3 4 1 std. 1 std. 1 2 2 std. 2 3 5 6 8 9 B With bracket 1 Male thread D Drain piping (Except AMC220) (1) (2) 2 Female thread Note 1) Female thread: Available only AMC220, 320, 520

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

72 [79] 2 12 X 48 60 PE B PE A EB EA P 2 x 7 (Mounting hole) 2 x 2.3 (Electrical entry) 150 [154] 56 [60] 8 1/8 External pilot port [For 3/8, 1/2] 34 161.5 [165.5] 1/8" (PE port) DIN terminal Max. 10 28.5 G1/2 134 [143] 112 [121] 23 [25] 46 [55] 31 [41] 1 5 3 21 [25] 31 [39] 31 [39] 5 x 3/8", 1/2", 3/4" (Piping port) 56 [60] [ ] = 3/4 2 position double: VFR521 -E, VFR521 -D(Z) 0 1 0 1 3 position

LEC-OM02904

SSCNET 7. 4 SSCNET 8 10 8 (2) 35 1. 2. 3. 4. 36 2 SSCNET (70ms ) 1. SSCNET 2. SSCNET (3.9 ) 3. SSCNET 4. 5. SSCNET SSCNET 2.43.9 6. SSCNET 37 1. 1 TM MR Configulator2 2. No.PA02 No.PA02 2 3. EEP-ROM 12 10 4. 3D No.PD16PD17 8 11 8 (2) 45 1. 55 0 55 2.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

A surge protector is separately required to use any of these EMC filters. (2) Connection example Driver EMC filter Servo amplifier NFB MC L1 1 4 (Note 1) Power supply L2 2 5 L3 3 6 E L11 L21 (Note 2) Surge protector 1 (RAV-781BYZ-2) (OKAYA Electric Industries Co., Ltd.) 1 2 3 (Note 2) Surge protector 2 (RAV-781BXZ-4) (OKAYA Electric Industries Co., Ltd.) 1 2 3 Note 1.

High Purity Fluoropolymer

1 1 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8"

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

VM

(mm) M5 M5 4 4 Port size R Port size R 1 8 1 8 6 6 1 4 1 4 8 8 3 8 3 8 10 10 1 2 1 2 12 12 Flame Resistant Type (UL-94 Standard V-0 equivalent) 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): Male thread 2(A) 2(A) Port size R Applicable tubing O.D. (mm) 1 8 1 4 3 8 1 2 1(P) 4 6 8 10 12 1(P) Applicable tubing O.D.

SYJ300/500/700

VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 Cylinder series 16 BQ-1 20 BQ-1 25 BQ-1 32 BQ-2 40 BQ-2 50 BQ-2 63 BQ-2 80 BQ-2 100 BQ-2 125 BQ-2 140 BQ-2 160 BQ-2 CDQ2 (Except Z), CDQP2B CDQ2 (Large bore size: Except Z) CDQ2X, CDQ2Y CDLQ, CDQM RDQ RDLQ, RZQ RSDQ MK (Except Z), MK2 CE1 CXT MDU (Except Z) MDLU BQ-2 BQ-2 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 BQ-1 BQ-1 BQ