Filter Regulator

8, 1/4 1/8 40 87.6 71.8 21 M281 40 21 5 f37.5 57.5 f37.5 58.5 f37.5 58.5 AW30-D 1/4, 3/8 1/8 53 115.3 86.5 26.5 30 M381.5 55 26.5 3.5 f37.5 63 f37.5 64 f37.5 64 AW40-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 35.5 38.4 M421.5 80 35.5 0 f42.5 73 f42.5 73 f42.5 73 AW40-06-D 3/4 1/8 75 149.1 93 35.5 38.4 M421.5 80 35.5 0 42.5 73 42.5 73 42.5 73 AW60-D 3/4, 1 1/8 95 234.1 155 45 38.4 M621.5 30 45 0 42.5

Sensor Monitor

Display MPa kPa Pa Kgf/cm2 bar mbar psi inHg mmHg mmH2O Fine differential pressure 2 kPa 0.002 0.001 1 0.01 0.001 0.1 Vacuum 101 kPa -0.1 0.001 0.1 0.001 0.001 0.01 0.1 1 Compound 100 kPa F0.1 0.001 0.1 0.001 0.001 0.02 0.1 1 Low pressure 100 kPa 0.1 0.001 0.1 0.001 0.001 0.01 500 kPa 0.5 0.001 1 0.01 0.01 0.1 Positive pressure 1 MPa 1 0.001 1 0.01 0.01 0.1 2 MPa 2 0.001 1 0.01 0.01 0.2

2-Color Display Digital Flow Switch Series PFM

Port size Port size Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 13 11 13 39 17 17 17 15 17 43 G 1/4 G 1/4 21 21 941 Series PFM7/PFM5 Made to Order 3 Please contact SMC for detailed specifications, lead times and prices.

Auto Switch Guide

(Including bracket, screw) RS Q G Auto switch mounting screw M2.5 x 10 l (D-E7A/E8A) M2.5 x 12 l (D-M5/M5W/M5T) Applicable bore size (mm) 6 BP-1 10 BP-1 15 BP-1 RS H A Cylinder series CDJP-D 1. Insert the auto switch mounting nut into the auto switch mounting groove and then set the switch at the mounting position by sliding. 2.

Auto Switch Guide

(Including bracket, screw) CA2 Auto switch mounting screw M2.5 x 10 l (D-E7A/E8A) M2.5 x 12 l (D-M5/M5W/M5T) Applicable bore size (mm) 6 BP-1 10 BP-1 15 BP-1 CS1 Cylinder series CDJP-D 1. Insert the auto switch mounting nut into the auto switch mounting groove and then set the switch at the mounting position by sliding. 2.

Pilot Operated

/N.O. 1/8 to 1/2 N.C.

Mechanically Jointed Rodless Cylinder Series MY2

Refer to front matters 54 and 55 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Operating Environment Warning 1.

Rotary Table/Rack & Pinion Style Series MSQ

M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 Rc 1/8 M10 x 1.5 15 M6 x 1 M10 x 1 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 Rc 1/8 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46 15 10.5 19 52 52 52 96.5 17.5 35 22.5 32 22.5 43 61 49 98 65 14 23 55 55 55 103.5 10.5 19 58 58 58 103 17.5 40 25 36 25 46 63 50 101 68 14 23 61 61 61 111 The figures in

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DNA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 6 7 10 12 15 9 12.5

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DRB 7 8 12 12 17 NA Model PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 14.5 19 28.5 35.5

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

0 55 1 1 0 1 1 1 55 1 1 0 1 1 1 56 1 1 1 0 0 0 56 1 1 1 0 0 0 57 1 1 1 0 0 1 57 1 1 1 0 0 1 58 1 1 1 0 1 0 58 1 1 1 0 1 0 59 1 1 1 0 1 1 59 1 1 1 0 1 1 60 1 1 1 1 0 0 60 1 1 1 1 0 0 61 1 1 1 1 0 1 61 1 1 1 1 0 1 62 1 1 1 1 1 0 62 1 1 1 1 1 0 63 1 1 1 1 1 1 63 1 1 1 1 1 1 37 - 6.4 Parallel I/O Wiring Example When you connect a PLC, etc. to the CN5 parallel I/O connector, please use the I/O

Pulse Valve

470 910 1850 Direct piping type 290 500 1230 55-JSXFA Pilot port Port size: 3/4, 1 1 No condensation Replacement Parts Model Replacement part number Main valve assembly (Main valve + O-ring) Sub-valve assembly (Sub-valve + O-ring) Silencer 55-JSXFA(E, F)-06m-B-m JSXF-06B-KT 55-JSXFA(E, F)-06m-B-mA JSXF-06B-A-KT 55-JSXFA(E, F)-10m-B-m JSXF-10B-KT 55-JSXFA(E, F)-10m-B-mA JSXF-10B-A-KT

Escapements Series MIW/MIS

15 (Effective depth 7) 17 (Effective depth 8.5) 17h9 -0.043 0 15 -0.1 0 41 41 40 5H9 0 +0.030 M6 x 1 37 6.8 10 17 10 28 21h9 -0.052 0 55 6H9 0 +0.030 19.5-0.1 0 50 47 M8 x 1.25 51 8.6 12 34 22 12.5 1428 Escapements Series MIW/MIS Finger options Tapped on upper and lower faces Tapped on all faces Attachment mounting thread 4 x FD through Attachment mounting thread 2 x FD through FF FE FF

Series CQ2

Width across flats 55 M36 x 1.5 21 47 50 64 200 30 30 2-Rc 1/2 (port size) 2 x 4-31.5 depth of counter bore 26 40 62 62 4-19 through 182 226 3 5.5 Flat washer 4 pcs. Note 1) 36 2 x 4-M22 x 2.5 thread depth 38 109 + Stroke 17 M24 x 3 effective thread depth 33 126 + Stroke 182 226 Width across flats 55 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less.

PFxx-OMA1007

No error 15 Error 1: Any one of bits 11 to 14 is "1". 0: Bit 11 to 14 of the Bit offset are "0". -82No.PF-OMA1007-B Byte 26 Details Bit Description Details Value 0 Air Management Hub internal error 1 L+ short circuit or P24 short circuit 0: No short circuit 1: Short circuited 1 Air Management Hub internal error 1 Port communication status 0: Device not connected 1: Operate or Pre-operate

0.55

Pg9 6 to 8 1/4 2 x 1/8 (External pilot port) Pilot EXH 2 x 8.5 (Mounting hole) EXH 221 230 PE PA 137 144 128 118 85 78 OUT IN EXH 55 55 25 4 1 1 / (EXH port) 36 36 82.6 4 1 2 x / , 1, 1 / 4 3 (IN, OUT port) When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned at left, when looking at the EXH port in the front face.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

A 4 B 2 14 Stations 4 P=10.5 17.7 D side 2n-M5 8 8 44 30.5 67 (Single, rubber) 69.5 (Single, metal) A 4 14.5 B 2 95 (Double) 103.5 (3 Position) 300 (Lead wire length) 14 6.5 Cover diameter 1.6 Cross section 0.34mm2 M5 57.5 31 26 13 55 X 13.6 R1 R2 5 3 1 P R1 R2 5 3 1 P (29) 20 6 8.5 PE port 4-Rc(PT)1/8 R1, R2(EXH) port 15 16.5 16.5 15.5 15.5 33 57 (30.5) 7 2-Rc(PT)1/8 P(SUP) port 2-M5 X

Air Slide Table Series MXW

MXW-A1612 5 28.5 MXW16 10 3 8 M6 x 1 MXW-A1612-X11 15 38.5 MXW-A2012 5 34.5 MXW20 13 4 10 M8 x 1.25 MXW-A2012-X11 15 44.5 MXW-A2512 5 40 1 mm 1 mm Stroke MXW25 17 5 14 M10 x 1.5 MXW-A2512-X11 15 50 D-X Individual -X 153 Series MXW Option Specifications Precautions Shock Absorber Adjustment Specifications RB0805 -X552 RB0806 -X552 RB1007 -X552 RB1412 -X552 RB2015 -X552 Shock absorber model

MXW

MXW-A1212-X11 33.5 15 MXW-A1612 28.5 5 MXW16 10 M6 x 1 3 8 MXW-A1612-X11 15 38.5 MXW-A2012 5 34.5 MXW20 13 M8 x 1.25 4 10 15 MXW-A2012-X11 44.5 5 MXW-A2512 40 1 mm 1 mm Stroke MXW25 17 M10 x 1.5 5 14 15 MXW-A2512-X11 50 8-7-8 9 Long Stroke Slide Table Series MXW Precautions Shock Absorber Adjustment Specifications Caution RB0805 -X552 RB0806 -X552 RB1007 -X552 RB1412 -X552 RB2015 -X552 Shock