Battery-less

27 Slider Type/Belt Drive LEFB Series Battery-less Absolute (Step Motor 24 VDC) p. 12 Model Selection p. 13 How to Order p. 43 Specifications p. 45 Weight p. 45 Construction p. 46 Dimensions p. 47 Rod Type LEY Series Battery-less Absolute (Step Motor 24 VDC) p. 54 Model Selection p. 55 How to Order p. 61 Specifications p. 63 Weight p. 64 Construction p. 65 Dimensions p. 67

CHKD/CHKG

Rod end male threads (mm) (mm) Bore size (mm) Bore size (mm) a b c e f g h LW M P Q R X1 Y1 Z ZZ SS 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 44.5 43 1/8 16.5 6 10.5 15 7.5 58 73 12.5 15 M10 x 1.25 6 10 33 91 50.5 49 1/8 17 8 10.5 15 7.5 60 75 15.5 18 M12 x 1.25 6 12 36 96 64.5 63 1/4 19.5 10 11 16 8 67 83 22 25 M16 x 1.5 7 14 44 111 71 1/4 20.5 10 20 10 75 95 72.5 13 27 30 M20 x

ZP

(54) 64 (56) 67 (54) 65 (57) 68 (55) 64 (56) 67 (54) 66 (58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

S YB effective depth YC YA 2 View High precision type MSQA DJ DH DI L H NF FE HA (UV) NE (mm) DH DI DJ DK DL FE HA NE NF UV Size 10 20 30 50 45 46 20H8 5 15H8 10 18.5 11 18 52.5 60 61 28H8 9 17H8 15.5 26 17 25.5 63 65 67 32H8 9 22H8 16.5 27 18 26.5 67 DL DK (Through) 75 77 35H8 10 26H8 17.5 30 18.5 29.5 76 (mm) AA A BA BB BC BD CA CB D DD DE DF DG EA EB EC ED EE EF FA FB FC FD GA GB GC GD

Free Mount Cylinder Series CU

(g) Stroke (mm) CQS Model 60 40 30 25 20 15 10 5 50 70 80 90 100 CQ2 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D RQ 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D CQM 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D MU 132 (165) 145 (182) 158 (195) 171 (208) 184 (221)

Applicable Auto Switch Model

color 2 color 2 color 2 color 2 color 5.3-9 5.3-11 5.3-10 5.3-25 5.3-12 5.3-13 5.3-18 5.3-14 5.3-15 5.3-16 5.3-26 5.3-17 5.3-27 5.3-19/5.3-20 5.3-21/5.3-22 5.3-24 5.3-23 5.3-29 5.3-31 5.3-55 5.3-49/5.3-50 5.3-42 5.3-30 5.3-56 5.3-51 5.3-59 5.3-43 5.3-32 5.3-33 5.3-34 5.3-36 5.3-52/5.3-53 5.3-57 5.3-35 5.3-60 5.3-44/5.3-45 5.3-37 5.3-58 5.3-46 5.3-54/5.3-65 5.3-61 5.3-38 5.3-39 5.3-66 5.3-67

Series PF2W Digital Flow Switch For Water

Note2) Fixed units: Instantaneous flow rate: L/min Accumulated flow: L Nil N Lead wire with M12 connector (3 m) Without lead wire Port size Applicable model Flow rate (L/min) Symbol 100 4 16 40 03 04 06 10 3/8 1/2 3/4 1 PF2W704, PF2W720 PF2W720, PF2W740 PF2W740, PF2W711 PF2W711 Output specifications 27 67 NPN open collector 2 outputs PNP open collector 2 outputs Specifications PF2W720

1.1

300 250 (448) b 292 c a i h Example figure: HRG001-W With casters (-A) (Option) HRG005 595 550 h g 1150 f e 67 536 540 426 328 d c b a Example figure: HRG005-W 22 Series HRG Thermo-cooler Piping Connection and Installation Dimensions HRG010/015 991 HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products 595 1300 j i h g f e 83 918 507 440 dc a b 500 Example figure: HRG010-W (mm)

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Port size Applicable model Flow rate (l/min) Nil N M12 3 m lead wire with connector Without lead wire Symbol 100 40 4 16 03 04 06 10 3/8 1/2 3/4 1 PF2W704, PF2W720 PF2W720, PF2W740 PF2W740, PF2W711 PF2W711 Output specification 27 67 NPN open collector 2 outputs PNP open collector 2 outputs Specifications PF2W720 PF2W704

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

66.5 67 69.5 104 114 CH2F 65.5 67 65.5 67 68 102.5 112.5 100 CH2H 67.5 67 67.5 67 71 105.5 115.5 Proper auto switch mounting position Auto switch model D-A5/A6 D-A3/A44 D-G39/K39 D-A59W D-F59F D-B59W D-G5/K59 D-G5W/K59W D-G5BAL/G5NTL D-F5/J5 D-F5W/J59W D-F5BAL D-B5/B64 D-G59F D-F5NTL Bore size (mm) A A A A A A A A 32 15 19 21.5 25.5 26.5 17 15.5 18.5 Note) 40 16 20 22.5 26.5 27.5 18 16.5

Stopper Cylinder Adjustable Mounting Height Type Series RSG

QV A 4-9 through 38 + Stroke 105 + 2 Strokes 67 + Stroke Approx. B Integrated One-touch fitting type QB Piping tube O.D. QA Stroke mm Note 1) Body dimensions when not equipped with auto switches are the same as in the drawings above. Note 2) In the case of single action, a One-touch fitting is on the rod side only.

Digital Flow Switch Series PFA For Air Series PFW For Water

Port size Size Applicable model Flow rate (l/min) Nil Output specification Applicable model Symbol 10 50 100 200 500 PFA710, 750 PFA711, 721, 751 PFA711, 721, 751 NPN open collector 2 outputs 27 1/8 1/4 3/8 1/2 01 02 03 04 PFA710, 750 NPN open collector 1 output + Analog output (1 to 5V) 28 PFA711, 721 PFA751 PFA710, 750 PFA711, 721, 751 PFA711, 721, 751 PNP open collector 2 outputs 67

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Connection threads R/NPT M L E W H A Model E L A LQ3H1A-M LQ3H2A-M LQ3H2B-M LQ3H3A-M LQ3H3B-M LQ3H3C-M LQ3H3D-M LQ3H4A-M LQ3H4B-M LQ3H4C-M LQ3H4D-M LQ3H5A-M LQ3H5B-M LQ3H5C-M LQ3H6A-M LQ3H6B-M LQ3H6C-M LQ3H7A-M LQ3H7B-M LQ3H7C-M 1/8" 28.5 38.5 36.5 48 46 45.5 51 56 55.5 54 57.6 67 65.5 64 76 74.5 73.5 96.5 95.5 93.3 10 11 33.5 32.5 10 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/2" 1/4" 3/8" 1/2" 3/4"

Fluoropolymer Piping Equipment

E E H J K L1 L1 L2 L2 M Min. port size t W1 W2 LQ3P1A 1/8" 10 9 11 6 14.5 23.5 22.5 58 56 14 2 8 16 17 LQ3P2A 1/4" 17 16 16 7 20.5 28 27 69 67 20 4 8 21 24 LQ3P3A 3/8" 22.5 19.5 21 7 24.5 39 36 89 83 25 6.4 8 26 28 LQ3P4A 1/2" 24.5 22.5 24 9 30.5 44.5 42.5 100 96 29 9.5 8 32 36 LQ3P5A 3/4" 26.5 24 32 9 36.5 50.5 48 117 112 37 16 13 41 43 LQ3P6A 1" 30 26 41 10 48.5 60 56 136 127.5 49 22 13

CLA

-600 20-600 :J2 35 86 11 5 '/, Y. 64 20 40 10 95 17 27 59 13 12 MaX 1 25 7 30 80 20 40 10 102 17 26 67 18 15 Ml0Xl .2S 25 52 14 11 3 21 30 72 23 17 M1 2X 175 30 52 14 124 21 31 76 25 19 M12X1.75 7 40 99 80 1 750 20750 37 40 102 129 'I.

JIS Standard Hydraulic Cylinder

66.5 67 69.5 65 104 114 CH2F 100 65.5 67 65.5 67 68 102.5 112.5 CH2H 67.5 67 67.5 67 71 66.5 105.5 115.5 Note 1) Auto switch models D-A9, A9V cannot be mounted on cylinders with bore sizes CHD2E32 to 100, CHD2H32 to 100, and CHD2F32.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

67 66 82 218 218 86 106 82.5 75.5 14 264 95 16 264 95 Other dimensions are the same as basic type.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) Model LA LB LC LD LE LF LH LT 200 (233) 224 (257) 235 (273.5) 274 (318) 333 (399) CVRA1L50 62 108 4.5 9 44 41 263 (301.5) 316 (360) 375 (441) CVRA1L63 76 127 5 11 55 48 CVRA1L80 92 154 6 13 67 58 CVRA1L100 112 189.5 6 13 87 73.5 ( ) are the dimensions for rotation of 180 and 190.

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CDVRA1L50 108 4.5 62 9 44 41 CDVRA1L63 127 5 76 11 55 48 CDVRA1L80 154 6 92 13 67 58 CDVRA1L100 189.5 6 112 13 87 73.5 11-7-23 24 Rotary Actuator: Angle Adjustable Type Rack & Pinion Style Series CRA1U Size: 50, 63, 80, 100 Angle adjusting mechanism is provided as standard.