REA/REB

range Usable range 5 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series

CY1

5 !4 !7 w #3 !6 e #1 @9 #0 i !0 !3 !1 !

PSxx-OMV0003CN

NPT1/4 F02 G1/4 2 A A B B :ISO1179-1 IO-Link/1+2 NPNorPNP 1 M12 5m M12 5m L2 S L 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-31-B 5 m M12 ZS-31-C 5 m -8No.PS-OMV0003CN-G M12 4 24 OUT1 IO-Link OUT2 UP DOWN SET () ()() (() UP ON/OFF DOWN ON/OFF SET IO-Link OUT1 (SIO ) -9No.PS-OMV0003CN-G IO-Link IO-Link 1 Operate () Start up Preoperate IO-Link 2 IO-Link 1 SIO

7ND9071en

Fail Action Fail to Close, Fail to Open 5 Valve Travel 85.2 % 5 Positioner Information 5 Dead Angle (a0) 0.0 % [0..99%] 6 Temperature 24.7 C 6 Units 6 Performance Level A(1)-Aggressive, b(1)-fast, C(1)-Optimum, d(1)-Stable, E-Max. stability, (1) = Capac.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

S U Z ZZ -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 23 f8 to 800 18 13 10 16 10 16 12 8 41 5 30 5 M8 x 1.25 13 26 19 15 M22 x 1.5 1/8 13.5 81 14 136 149.5 15.5 25 25 f8 to 800 22 17 10 16 12 16 12 8 46 6 32 5.5 M10 x 1.25 13 28 19 15 M24 x 1.5 1/8 14.5 81 15 142 156.5 19.5 32 31 f8 to 800 24 22 12 16 16 19 12 8 53 8 40 7.5 M14 x 1.5 13 36 19 15 M30 x 1.5 1/8 18.5 87 20 160

Vacuum Module Series ZX

(VJA314) ZX1-VJA3 4 1 2 Z L 4 2 5 ZX1-VJ3 1 ZX1-VJ114K1, J1 AMV Manual override Type of actuation ZX1-VJ3 4 1 2 2 K3, J2 AEP N.C. (Normally closed) N.O.

LJ1H

1 !9 !5 !5 i q A A !2 @1 @0 !4 u Section AA Parts list Material Note No. Description No.

Mini Free Mount Cylinder

Note 3) Adjust the mounting position after confirming the auto switch operation. 2 3 5 1 1 2 3.5 3 5 1 1 2 4 5 7 7 6.5 6 5.5 5 7 7 6.5 6 Auto Switch Mounting Operating Range Watchmakers screwdriver (mm) Auto switch model Applicable bore size 6 2 2 3 8 2.5 2.5 3.5 10 12 16 20 2.5 2.5 3.5 D-F8 3 2 4 4 3 4 4 3 5 D-M9 D-M9W Auto switch mounting screw This is a guideline including hysteresis,

XL

-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi) XLA Normally closed XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200

Process Valve Series VNA

NBR seal) 5 to 60C Note 1)/5 to 99C Note 1) (FKM seal) VNH A VNH B 1 3 1 3 Pressure Temperature Lubrication 5 to 50C Note 1) 0.25 to 0.7 MPa Pilot air Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

CNG

Brake spring Taper ring Ball retainer Brake shoe holder Air pressure supply Air pressure exhaust Brake shoe Release piston Steel ball Locked state Unlocked state 9-5-10 11 Series CNG Cylinder with Lock Double Acting, Single Rod Construction #7 e$4!2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!

Compact Cylinder with Air Cushion and Lock Series RLQ

T3 Cylinder with Bypass Piping Component Parts T1 81.4 93.3 99.8 T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Description No. 1 2 3 4 Qty. 1 1 1 1 Part no.

Compact Cylinder with Air Cushion

14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 11 for details on rod end nut and accessories.

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

Modular Type Air Filters Series AF

Modular Type Air Filters Series AF Air Filter Series AF Filtration (m) Model Options Port size AF10 M5 x 0.8 AF20 1/8, 1/4 AF30 1/4, 3/8 Bracket AF40 1/4, 3/8, 1/2 5 Float type auto drain AF40-06 3/4 AF50 3/4, 1 AF60 1 Page 328 through to 336 Mist Separator Series AFM AFM20 1/8, 1/4 AFM30 1/4, 3/8 Bracket 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Page 338 through to 344 Micro

RLQ

T3 Cylinder with Bypass Piping Component Parts T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 T1 81.4 93.3 99.8 No. 1 2 3 4 Description Qty. 1 1 1 1 Part no.

Filter Regulator

8, 1/4 1/8 40 87.6 71.8 21 M281 40 21 5 f37.5 57.5 f37.5 58.5 f37.5 58.5 AW30-D 1/4, 3/8 1/8 53 115.3 86.5 26.5 30 M381.5 55 26.5 3.5 f37.5 63 f37.5 64 f37.5 64 AW40-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 35.5 38.4 M421.5 80 35.5 0 f42.5 73 f42.5 73 f42.5 73 AW40-06-D 3/4 1/8 75 149.1 93 35.5 38.4 M421.5 80 35.5 0 42.5 73 42.5 73 42.5 73 AW60-D 3/4, 1 1/8 95 234.1 155 45 38.4 M621.5 30 45 0 42.5

Compact

2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Yes Grommet 24 V 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 2-wire 12 V M9BAV*1 M9BA*1 *1 Water resistant type auto switches are mountable on the above models, but SMC cannot guarantee water resistance.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Bellows seal, Manual operation: XMH, XYH Features 1 Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal Series XMA, XYA How to Order XMA XYA M9N 16 A A M9N 25 Angle type In-line type 1 2 3 4 5 6 7 2. Flange type 1.

RQ

For detailed specifications, refer to page 7-9-1.