Series HAW Water Cooled Aftercooler 1

270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2 1 1 2 1 1 1 1 2 2 3 1 1 1 4 14-15-8

4-channel Flow Monitor ( compatible)

OFF 1: ON Out of CH2 display range (When HHH and LLL are displayed). 10 CH3: Diagnostics 0: OFF 1: ON Out of CH3 display range (When HHH and LLL are displayed). 11 CH4: Diagnostics 0: OFF 1: ON Out of CH4 display range (When HHH and LLL are displayed). 12 Reservation 13 Fixed output 0: Normal output 1: Fixed output 14 Error 0: Normal 1: Abnormal 15 System error 0: Normal 1: Abnormal 16 to

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

W V S RF P NB N MO 32 40 50 63 80 100 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 151 165 180 180 226 226 100 110 118 118 150 150 143 152 168 168 208 208 24 24 24 24 40 40 6.5 9 10.5 12 14 15 4 4 5 9 11.5 17 92 97 106 106 132 132 11 11 11 11 21 21 1/8 1/4 1/4 3/8 3/8 1/2 35 40 43.5 43.5 56 56 27 27 31.5 31.5 38 38 19 19 19 19 23 23 1.7-34 End Lock Series MBB With Mounting

Compact Cylinder with Air Cushion and Lock Series RLQ

T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

VQ7-6/7-8

Compatible cable Cord outside diameter: 6.8 to 10 ZNR 1 (4) DC: Single COM 3 (1) SOL.B SOL.A ZNR ZNR 1 (4) 2 (2) DC: Double 3(1) ~ + SOL.A ~ ZNR 1(4) 100VAC: Single COM ~ ~ 3(1) + + SOL.A SOL.B ~ ~ ZNR ZNR 1(4) 2(2) Holding screw 100VAC: Double 3(1) Ground nut ~ + Housing SOL.A Washer ~ ZNR Grommet (rubber) 1(4) 200VAC or more: Double COM + ~ ~ 3(1) + Terminal block SOL.A SOL.B ~ ~

rep-modular-e

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1

Modular Pressure Control Equipment F.R.L. Replacement Procedure

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1

End Lock Cylinder Series CBG1

81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40

LFE-OMY0008

OUT2 OUT1 1. 1. 1. 1.

Compact manifold regulator ARM5 Series

Centralized Supply (IN) Piping Position AR425 to 935 Piping position 1 Bottom 2 Symbol Top ARX IN AMR Appearance ARM ARM 33 IN ARP 2. IN Fitting Type 15 IR-A Inch size Metric size Straight IN side IN side Symbol Symbol IR Elbow Elbow Straight 1/4 5/16 5/16 1/4 6 8 8 6 IRV 51 52 63 64 01 02 13 14 VEX SRH 3.

High Vacuum Angle Valve

None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *

Rotary Actuator/Vane Type

[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 8 1 to 14 1 to 8 15 4 to 18 1.5 to 9 1.5 to 18 1.5 to 9 20 4.5 to 20 1.5 to 10 1.5 to 20 1.5 to 10 30 5 to 22 2 to 13 2 to 22 2 to 13 40 18 to 30 4.5 to 15 18 to 30 4.5 to 15 Size CRB2 CRBU2 X Y X Y 10 3 to 10 (19) 1 to 12 (3) 1 to 3 (12) 1 to 19 (10) 15 4 to 11.5 1.5 to 15.5 1.5 to 6.5 1.5 to 20.5 20 4.5 to 13 1.5 to 17 1.5 to 7.5 1.5 to

•

bAs B6.type B (n ~ 2.4 _ l) 0.5 50.5 :"'Hs 43.5 15 +50( 0" ) 75 +55(n2) 15 75 ~ ' B6lype I><>S'KSlype 3.5 3.5 A 2 ( n ~ 2 . 4.~--' ) 10 26.5 25 26.5 D-G5 K5 type G 35+30(n-2) 35 100 100+ loo(n2) i D-A31ype 1><>3 ' K3 type 50.5 ~Hs 38 43.5 1.5 1.5 A 0 DA3 type 24.5 24.5 23 B 35+3O (n2) 5O+5O(n 2) 35 55 D-A4 type D-G3K3 type !

Air Cylinder CP Series Cylinder Positioner Assembly

60 l66l 8.03 t2a4) 4,66 '220) 1.57 4.02 h02) t.o7 (78) 0.98 (25) 2.05 (52) t.55 i14l 0.43 121) ).43 t l l I 1.89 (44) M22xL5 1.46 ) 7 9 (20t 457 1 1 1 5 1 1 . 1 0 (2Al r.21 :;dd5r 3 1 . 5 : 3 : l 2.36 (60) 2.gJ 171) 9.25 t235) I0.04 t255) 2.56 (65) 0.49 1 2 5 ) 1 . 1 5 t80l 9.61 1244\ (264) 1.57 4.57 ( 1 1 6 ) 3.62 (92) 1 . 1 8 (30) 2.05 (52) ).55 (14) 0 4 3 t21) 1.43 l l 1 ) 2.25 (54) M26xl

Possible to transfer a workpiece at low-speed.

M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 Rc 1/8 M10 x 1.5 15 M6 x 1 M10 x 1 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 Rc 1/8 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 10 Stainless steel High Vacuum Angle/In-line Valve Manual Valve/Bellows Seal Series XMH, XYH How to Order XMH XYH 16 25 Angle type In-line type 1 2 3 2.

VXP21/22/23

40 (67) TI/ TIL Conduit terminal: T PA 92 2 PAX PB (2.3) 98 104 (7.5) (5.5) 25 52 55 (33) 36 G 1/2 (27) 30 (27) 30 11 14 IN OUT Bracket 50 (52) (67) 24 26 (28) 2-Rc 1/4, 3/8, 1/2 22 28 40 59 2 : Port size Rc 1/2 17-3-49 8 The VX series will be revised shortly.

NARM Series

8 1 8 .13 (57) NARM1000 (79 X n) + 25 Individual IN 1 8 1 8 Common IN (188 X n) + 43 1 4 1 8 .3 (136) NARM2000 Individual IN (187 X n) + 45 1 8 1 8 Space Saving How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.

Environment

3 4 5 0 15 10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 27 27 31.5 31.5 38 38 13 14 15.5 16.5 19 19 1/8 1/4 1/4 3/8 3/8 1/2 16 16 16 16 16 16 84 84 94 94 114 114 4 4 5 5 5 5 4 4 5 9 11.5 17 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5