Vacuum Module Series ZX ZX1 1 10 F Filter unit Ejector unit Nil Q CE marked Ejector unit nozzle dia.
Lowering the center of gravity when using an external guide Pitch Dimensions (Without Magnet) (mm) Bore size E 4 6 8 10 12 16 20 10 Note 1) 13 Note 1) 13 Note 1) E 13.5 Note 1) 17 21 25 Note 1) Body width dimensions have plus tolerances, so E dimensions should also be designed for plus tolerances. (4 to 10 only) Note 2) Refer to page 18 for built-in magnet.
8 50.5 14 8 85 10 (12) 18 5.5 6 4 8 5 M4 x 0.7 Up to 200 201 to 350 20 to 200 201 to 350 31 22 19.5 17 45 103 1/8 57 16.5 10 96 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 400 20 to 300 301 to 400 38 22 19.5 17 45 104 1/8 57 20 12 97 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 450 20 to 300 301 to 450 47 30 27 19 52 112 1/8 65.5 26 16 104 10 (13) 26 7 11 7 12 8 M6 x 1 Up to 300
common 10 m or less Note 5) 33 OP Z phase pulse detector (Open collector) 1 P15R Plate SD 10 m or less 2 m or less Note 4) CN1 Emergency stop EMG 42 Servo ON SON 15 Note 4) CN6 RES 19 Reset 3 MO1 PC 17 Proportion control Analog monitor 1 10 VDC 1 LG TL 18 External torque limit selection 10 VDC Analog monitor 2 2 MO2 LSP 43 Forward rotation stroke end LSN 44 Reverse rotation stroke end 2
HRX-OM-T002 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety Instructions for Use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.
HRX-OM-S004 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety Instructions for Use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.
(Non-locking push type) Pilot port 12(P1), 10(P2) Port size: refer to table below Main port 1 (Back side port 2) Port size: refer to table below Main port 1, 2 Pilot port 12(P1), 10(P2) A K B L C D E F H J Note) Model 1 8 1 4 1 4 VNC5-32A VNC6-40A VNC7-50A 1 4 1 2 1 1 2 229.5 (215.5) 247 (233) 270 (256) 105 120 140 197 214.5 237.5 77 96 113 55 63 74 53 60 74 26.5 30 37 120.5 137 160 20 24
speed mm/s Allowable load weight (Graph (2)) Horizontal (With and without switch) 10 Load weight m (kg) 1 63 50 40 32 m 0.1 10 100 Eccentric distance + Stroke L (mm) l S l: Eccentric distance (mm) S: Stroke (mm) L Cushion Needle Adjustment Warning 1.
(same side) (n 4) 2 (n 4) 2 25 + 55 135 + 55 125 + 55 BT-12 BT-12 BT-16 F5W/J59W/ F5BAL/F5F n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 pcs.(different side, same side), 1 pc. D-F5W, J59W D-F5BAL D-F59F D-F5NTL 155 35 145 D-A3/A4/G39/K39 BS1-125 BS1-140 BS1-160 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 35 + 55 145 + 55 "n" pcs.
to 150) Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 14 45 80 160 200 5 1.3 x 10-10{1 x 10-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Operating time s 0.05 0.1 0.21 0.24 0.26 0.28 KF (NW), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF
-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.
Dimensions 10.5 10.5 178 (3.6) 1 C H C H R S 16.7 OUT IN AX/ 140A 28.3 0 45 4.1 53.5 5.1 (3.7) 55 1 1F 16 D 4 0 2 3 5 6 7 8 9 A B C E F 10 11 12 13 14 15 17 18 19 1A 1B 1C 1D 1E + + + + + + + + + + + + + + + + 4.5 5 5 Refer to page 50 in CAT.E02-20 for the junction cable part number.
4-M8 x 1.25 thread depth 10 20 8H10 depth 10 Encoder signal line Bending radius 80 Motor power line Bending radius 80 8H10 depth 8 35 85 210 78.5 78.5 Stroke + 229 (table movement range) 107 10 95 Work piece mounting reference plane 55 Body mounting reference plane 52.5 Stroke + 386 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 The body mounting reference plane and work piece
(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95
Extension locking Retraction locking 100 100 63 63 50 50 40 Load mass kg Load mass kg 40 10 10 32 32 0.5 MPa 0.4 MPa 0.5 MPa 0.4 MPa 1 1 100 500 100 500 Maximum speed mm/s Maximum speed mm/s Allowable load mass (Graph (2)) Horizontal (With and without switch) 10 Load mass m (kg) 1 63 50 40 32 m 0.1 10 100 Eccentric distance + Stroke L (mm) l S l: Eccentric distance (mm) S: Stroke (mm) L Cushion
10 P_2(n_2)1/10 P1HP1L(n1Hn1L)1/4 P2HP2L(n2Hn2L)1/4 -1/7 OFF -42No.PS-OMV0003CN-G OFF or or (3) QXZ((/)(*)) () () A~Z <3 > () OFF -43No.PS-OMV0003CN-G [F11] <> UPDOWN[F11] SET UP DOWN 1000 100 SET [F11] [MPa]/[kPa]/[kgf/cm 2]/[bar]/[psi] ([kgf/cm 2]/[bar]/[psi]) 27[F 0] -44No.PS-OMV0003CN-G [F14] Zero-cut 0 1.0F.S.0.010.0F.S. <> UP DOWN [F14] SET Zero-cut Zero-cut UP
CKZ-50A013 CKZ-50A014 CKZ-50A015 NAAMS code ACA221M ACA222M ACA223M 55.0 85.0 115.0 50 mm Offset-Machined 50 mm Offset-Machined A A B B C C 6H6 through +0.008 0 8F7 through +0.028 +0.013 D D E E F F 200.03 200.03 10 G G 10 300.025 300.025 300.025 300.025 9 through 11 through H H I I J J 250.05 250.05 45 45 M6 x 1.0 M6x 1.0 750.05 750.05 R25 R25 6.5 6.5 10 10 1 1 1 1 R25 R25 18 18 19 19 19
Bore size [mm] Stroke C D Mounting bolt part no. 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L Material: Chromium molybdenum steel Surface treatment: Zinc chromated 12 5.6 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L 16 4.6 5 40 CQ-M3 x 40 L 10 45 CQ-M3 x
auto switch: 10 to 70C (with no freezing) With auto switch: 10 to 60C (with no freezing) Non-lube JIS class 2 +1.0 0 mm 50 to 500 mm/s 1/8 1/4 Note) The minimum operating pressure of the cylinder is 0.1 MPa when the cylinder and lock are connected to separate ports.
Part name specification type AW20-D AW30-D AW40-D AW40-06-D AW60-D (1) Bracket assembly AR43P-270AS Note 1) AW23P-270AS AR33P-270AS AR54P-270AS Note 4) (2) Set nut AR23P-260S AR33P-260S AR43P-260S G36-10-01 G46-10-01 Rc G36-10-N01 G46-10-N01 Note 2) Pressure gauge NPT (Round type) G36-P10-N01-X30 G46-P10-N01-X30 Z : Both in MPa and psi (3) G36-10-01 G46-10-01 G G36-10-01-L G46-10-01-L Rc