VQ5000

18 ( ) ( + ) Gray None 5 stations 10 23 11 SOL.A 6 ( ) ( + ) Pink None 24 12 SOL.B 19 ( ) ( + ) Orange Black 6 stations 25 Stations are counted starting from the first station on the D side. 13 SOL.A 7 ( ) ( + ) Blue None SOL.B 20 ( ) ( + ) Red White 7 stations SOL.A 8 ( ) ( + ) Purple White SOL.B 21 ( ) ( + ) Brown White 8 stations SOL.A 9 ( ) ( + ) Gray Black Connector terminal

Speed Controller with Indicator

7 w Meter-in type Meter-out type Component Parts No.

Air Cylinder Series MB

7 !

IZx-OMT0049

) Note 21) Note 21) Stop Note 12) It takes 3 seconds to operate after the power is on.

Modular F.R.L. Unit

7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21 21 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 0 3.5 3.5 3 3.3 3.3 Note) For AR20 only, the position of the pressure gauge is above the piping center. 40 Regulator AR20 to 60 Made to Order Specifications Made to Order

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

Environment

0 #3 #4 #3 #2 #1 @7 !6 o !7 !8 y t q w e r i u @2 #6 #5 When rod end male thread selected Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

Electric Actuator / Low profile slider type

Remove the work-piece and restart the return to the intended origin position. 7) Wrong input [0] is input as the positioning force. Check the step data. /See 3.3.Step data setting method on page 21 8) The step data position is not changed correctly after the return to origin direction is changed. Check the step data .

HRX-OM-X071

Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm contents, causes, and troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check

RHC

51 6 7 16 14.5 10 32 18 8 20 Up to 700 19.5 6 49.5 56.5 70 44 27 53 9 7 16 18 12 36 22 8 25 Up to 700 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 32 Up to 1000 21 8 51.5 56 84 60 36 66 9 9 21 20.5 16 53 24 11 40 Up to 1000 WH ZZ P 1/4 S NN ND NF NE K NC JD NB JC NA I N H MM Bore size (mm) 252 192 M22 x 1.5 15.0 13 33.5 5 5.5 30.5 30 43 26 26 22 44 M8 x 1.25 20 1/4 5.8 to 8.8 257 193

0.5

NT B1 21 Model Model 21 For IZF21 31 For IZF31 21 For IZF21 31 For IZF31 : 4 retaining bolts are included.

CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !

PSxx-OMT0001CN

0.4MPapsi 0.4MPapsi 5 10 N 1 2 3 4 5 6 1 2 NPN2 PNP2 P 6 10 3 4 0.2MPapsi 0.2MPapsi 10 7 4 5 6 M SI 5 8 10 1 7 L 7 L N S 6 7 8 R 6 7 8 2 T 9 B -9No.PS-OMT0001CN-E 2 1F 2GH 3ISO1179-1 4 5kPa 61 7 8M12 9 10 11 12ISO16030 -10No.PS-OMT0001CN-E 2 / (2 2 2 1 ) ((3x8)3 ) ISA-16 ISA-14 2 ISA-16-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 ZS-31-B ZS-31-C 4 6

VZ5000

/2 (P A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1 2.3 2.1 2.1 0.57 0.37 0.45 0.55 0.36 0.50 0.35 0.32 0.38 0.36 0.32 0.37 2.2 1.4 1.7 2.1 1.4 1.8 1/8 1/

MK

7 6 7 17 Mounting Bracket Part No.

Compact Cylinder with Lock Series CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

Series 10-, 21- AW-B Filter Regulator

-06-B 10-/21-AW60K-B 142.1 174.1 176.1 261.1 93.9 122.1 154.1 156.1 241.1 91.4 Dimensions B B B B Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20K-B 10-/21-AW30K-B 10-/21-AW40K-B 10-/21-AW40K-06-B 10-/21-AW60K-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

to 7 Refer to the page 68 for dimensions with connector cable.

Electric Actuator

Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.