HRX-OM-R016

in fig.9-4-1.

42

) 96.2 71.7 96.2 71.7 58.2 VFR 1/8" External pilot port 44 106 9 9 91 44 106 49.7 58.2 Station number 1/8" External pilot port 49.7 9 9 U side entry (LU) VQ7 D side U side D side n n U side 8 8 Manual override 7 7 A B A B A B A B A B A A A B A B A B A B A B A A B B B A A A A A A A 6 6 5 5 215 P = 25 44 L1 L2 L1 L2 4 4 B B Indicator light 3 3 2 2 P = 25 1 1 27 38 50.5 27 38 50.5 44 Stations

Air Fittings Fitting Series For Special Environment

8 / 3 S 6 3 7 0 Y R K 1 1 / 6 1 ) 6 4 . 7 1 ( 6 1 . 1 ) 5 . 9 2 ( 9 7 . 1 ) 5 . 5 4 ( 7 3 6 1 . 1 ) 5 . 9 2 ( 3 0 . 2 ) 5 . 1 5 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 4 / 1 S 5 3 1 1 Y R K 2 3 1 1 / 6 1 ) 6 4 . 7 1 ( 9 8 . 0 ) 7 . 2 2 ( 7 6 . 0 ) 7 1 ( 0 1 . 1 ) 8 2 ( 8 / 3 S 6 3 1 1 Y R K 4 2 . 1 ) 5 . 1 3 ( 9 0 . 2 ) 3 5 ( 1 4 8 / 3 2 / 1 S 7 3 1 1 Y R K 0 4 . 1 ) 5 . 5 3 ( 9 1 . 2 ) 5 . 5 5

Rotary Actuator/Vane Type

9 i @0 !9 !6 q w !4 !2 w !4 o !0 !7 !1 q !5 !1 Double shaft type Single shaft type Single shaft type Component Parts Double shaft type DNo. Description Material Note No.

C76

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 q w e r t y u i o !

C76

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 q w e r t y u i o !

HRX-OM-Y098

method Air-cooled refrigeration Refrigerant R410A(HFC) Quantity of refrigerant kg 1.4 2.2 3.0 Control method PID control Ambient temperature C 2 to 45 Circulating fluid1 CH1 : Clear water,DI water (pure water)9 / CH2 : Clear water,DI water (pure water) Set temperature range C CH1 : 5 to 35 / CH2 : 10 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature

VQ5000

5 6 7 8 9 1 1 2 3 4 5 6 7 8 9 Double Double Double Double Double Double Double SI unit SI unit Single Single Single Single Single Single Single Single Single Single Single SI unit output no.

HRS100/150

k 11 Run/stop signal input Contact input signal 1 4.7 k 3 1 k Internal circuit 10 Alarm status signal output Contact output signal 3 2 9 Remote status signal output Contact output signal 2 1 8 Operation status signal output Contact output signal 1 0 * The pin numbers and output signals can be set by user.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc 1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 11-9-21 22 Series MSQ Dimensions: Size 70, 100, 200 Basic

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

kPa 10 to 105 kPa 0.001 0.1 0.001 0.001 0.01 PSE564 PSE574 0 to 500 kPa 50 to 525 kPa 0.001 1 0.01 0.01 0.1 PSE530 PSE540 PSE560 PSE570 0 to 1 MPa 0.105 to 1.05 MPa 0.001 1 0.01 0.01 0.1 PSE575 0 to 2 MPa 0.105 to 2.1 MPa 0.001 1 0.01 0.01 0.2 PSE576 0 to 5 MPa 0.25 to 5.25 MPa 0.01 0.1 0.1 1 PSE577 0 to 10 MPa 0.5 to 10.5 MPa 0.01 0.1 0.1 1 0 to 1.6 MPa 0.105 to 1.68 MPa 0.001 1 0.01

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 2 setsValve part no. (Stations 7 to 8) 1 setBlanking plate part no. (Station 9) Note) For CE compliant models, DC-type only.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 2 setsValve part no. (Stations 7 to 8) 1 setBlanking plate part no. (Station 9) Note) For CE compliant models, DC-type only.

V

8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering

Clean Regulator/Fluororesin Type

For details, refer to Best Pneumatics No. 9. SRF 1 07 11 0 S S 1 With nut Body size 1 3 5 Fitting type Pilot port thread type Made to Order (Refer to page 887 for details.)

LFE-OMY0008

OUT2 OUT1 1. 1. 1. 1.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

0.40 1/2: 0.49 5 3 VCW3 0.5 0.23 14.4 (0.80) 3.0 7 0.2 0.13 24.8 (1.38) 10 0.1 37.8 (2.10) 3 3.0 1.2 6.3 (0.35) 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4: 0.58 3/8: 0.55 1/2: 0.62 3/4: 0.78 1.3 0.73 10.8 (0.60) 5 0.7 0.47 15.3 (0.85) 3.0 4 VCW4 7 0.3 0.22 24.8 (1.38) 10 0.12 37.8 (2.10) Note 1) Refer to model selection on page 9 regarding port size and orifice size combinations.

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

1 @1 !8 !5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

SFOD-OMT0009CN

Step1 30mm 1 69 No.SFOD-OMT0009CN-B () (1)No.1(IN0ON) (2)DRIVEON No.1 (3)No.1 ON (OUT0ON) (2)(6)(10)(14)(18)(22) DRIVE (4)INPOFF (1)(9)(17) IN0 (5)BUSYON (1)(9)(17) IN1 PLC (6)DRIVEOFF (19)(11)(3) OUT0 (7)INPON (19)(11)(3) OUT1 (8)BUSYOFF (23)(20)(15)(12)(7)(4) INP No.1 (24)(21)(16)(13)(8)(5) (9)No.2(IN0OFF IN1ON) BUSY (10)DRIVEON No.2 (11)No.2 ON (OUT0OFF OUT1ON) (12