15

60 M3 x 12 1.5 M4 x 12 1.5 14 4.5 NY M4 x 0.7 7 70 50 4.6 13 60 M3 x 12 1.5 M4 x 12 1.5 11 4.5 NW M5 x 0.8 8.5 70 50 4.6 13 60 M4 x 12 2.5 M4 x 12 1.5 9 4.5 NU M5 x 0.8 8.5 70 50 4.6 13 60 M3 x 12 1.5 M4 x 12 1.5 11 4.5 NT M5 x 0.8 8.5 70 50 4.6 17 60 M3 x 12 1.5 M4 x 12 1.5 12 8.5 NM2 M4 x 0.7 8 50 38.2 11.5 60 M3 x 12 1.5 M4 x 12 2.7 10 12 32 NZ M5 x 0.8 9 70 50 4.6 11 60 M4 x 12 3.6

Large Size Vacuum Module: Series ZR

For nozzle size 18, 20 + with function plate ZR1-SR3-93-A(a set of four threads) For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate ZR1-SR3-37-A(a set of six threads) ZR1-SR3-41-A(a set of six threads) 10 ZR1-SR3-42-A(a set of six threads) For nozzle size 18, 20 + with function plate ZR1-SR3-46-A(a set of six threads) When the ejector is compatible

REA/REB

Load Center Offset in Operating Direction (Lo) 25 144 9 + Lo 32 275 11 + Lo 40 520 13 + Lo Bore size (mm) RB Allowable load weight WA (kg) J DBore size (mm) Allowable load weight WA (kg) 5.6 Lo + 2.8 13.34 Lo + 2.9 10 -X 15 Lo: Distance from center of slide block to loads center of gravity (cm) 2043.2 Lo + 6 20 46.15 Lo + 3.55 Data 25 80 Lo + 4 32 188.1 Lo + 5.7 40 10-2-41 41 Series REAL

REA/REB

Load Center Offset in Operating Direction (Lo) 25 144 9 + Lo 32 275 11 + Lo 40 520 13 + Lo Bore size (mm) RB Allowable load weight WA (kg) J DBore size (mm) Allowable load weight WA (kg) 5.6 Lo + 2.8 13.34 Lo + 2.9 10 -X 15 Lo: Distance from center of slide block to loads center of gravity (cm) 2043.2 Lo + 6 20 46.15 Lo + 3.55 Data 25 80 Lo + 4 32 188.1 Lo + 5.7 40 10-2-41 41 Series REAL

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 12 16 20 25 42 29 6 8 5 26 11 7.5 58 M4 13 13 18 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 13 8 18 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Note 13) For an actuator with lock, add the power consumption for the lock.

TABLE OF CONTENTS

T orque 4 : 4.4 LB . in 1 .39 (9.9) RECEPTACLE WITH .37 (9.4) SPACING 1.02 (25.9) .13 (3.3) DIA.

MXS

MXU With end lock(16) MXS16-llR With buffer(16) MXS16-llF 2-M6 X 1 thread 10 deep MXS Operating port 2-M5 X 0.8 J 13 MXQ 12 18 48 MXF MXW 20 41 3 MXP 30 0.5 37.5 * Dimensions not indicated are the same as the basic sytle.

51

(mm) Rod Flange Symbol F GB B A AL B1 C D FT FX FD ZZ E GA H H2 H1 I J MM KA NA P S Bore size (mm) 20 25 32 40 50 63 80 100 12 15 15 20.5 26 26 32.5 32.5 14.5 17.5 17.5 23.5 29 29 35.5 35.5 8 10 12 14 18 18 22 26 12 14 18 25 30 32 40 50 5 6 6 8 11 11 13 16 79 85 87 93 121 121 151 152 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 2 2 2 2 2 2 3 3 28 32 38 46 58

Compact Cylinder

Mass Unit: g Auto Switch Internal Circuit D-M9NA(V) D-M9NA(V) 8 D-M9PA(V) 8 D-M9BA(V) 7 Auto switch model 0.5 DC (+) Brown 14 14 13 1 Lead wire length (m) Switch main circuit Switch main circuit Switch main circuit OUT Black 41 41 38 3 68 68 63 5 Dimensions Unit: mm DC () Blue D-M9A M2.5 x 4 l D-M9PA(V) Slotted set screw Indicator light DC (+) Brown SMC 4 OUT Black 2.8 2.7 24 0.2 3 3.2 DC

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 10 10 19.5 22.8 12.8 10 D2 H 8 15.2 18 26 21.5 26.3 12 Connection threads (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 17 20.9 12 46 58 25 31.4 L1 22 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

LVQ

T) View Z (mm) Dimensions A B C D M N T U V Model LVQ20-S-2 LVQ30-S-2 LVQ40-S-2 LVQ50-S-2 LVQ60-S-2 25.5 46 31.5 58 7 15 35.3 10.6 7 23.5 47 29.5 59 7 15 36.9 16.5 10 23.5 47 29.5 59 7 20 37.9 22 35 70 41 82 7 20 64 25 17 35 70 41 82 7 20 66 32 17-5-69 8 Series LVQ Dimensions With flow rate adjustment & by-pass High back pressure spec. with flow rate adjustment & by-pass N.C. valve M N

AW

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)

Air Cylinder NCA1 Series

1/2 1 1/2 3 1/2 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 3 13/16 BORE E EE(NPT) F G J K ND NT TN ADD STROKE LB P SN 8 8 1/2 3/4 3/4 2 1 1/2 9/16 1 1/8 3/4-10 4 1/2 5 7/8 3 1/4 3 1/4 10 10 5/8 1 3/4 2 1/4 2 11/16 1 1/2 1-8 5 1/2

NCA1

1/2 1 1/2 3 1/2 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 3 13/16 BORE E EE(NPT) F G J K ND NT TN ADD STROKE LB P SN 8 8 1/2 3/4 3/4 2 1 1/2 9/16 1 1/8 3/4-10 4 1/2 5 7/8 3 1/4 3 1/4 10 10 5/8 1 3/4 2 1/4 2 11/16 1 1/2 1-8 5 1/2

Rotary Clamp Cylinders

D-A7/A80 D-A7H/A80H D-A73C/A80C D-A79W 12 12 12 11 10 12 13 13 13 14 14 16 5 5 5 D-P4DWL 16 Series MK/MK2 Auto Switch Mounting Bracket/Part No.

2/3 Port Valve

Refer to p.4.1-12, 4.1-13 for specifications and model.

Magnetically Coupled Rodless Cylinder

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

51 61 71 96 121 146 171 KA 126 183 211 239 NA 4 4 4 4 4 8 8 8 8 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5 ZZ 132 132 132 142 160 193 250 278 306 13-/22-MXQ2010 13-/22-MXQ2020 13-/22-MXQ2030 13-/22-MXQ2040 13-/22-MXQ2050 13-/22-MXQ2075 13-/22-MXQ20-100 13-/22-MXQ20-125 13-/22-MXQ20-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20-50