Piping: Base Mounted Common SUP Individual EXH, Stations: 9 Stations, A B Port Size: ø4 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 2 Stations, A B Port Size: ø4 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 4 Stations, A B Port Size: ø4 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 5 Stations, A B Port Size: ø4 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 6 Stations, A B Port Size: ø4 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 12 Stations, A B Port Size: ø4 One-touch Fitting

Electric Actuator Miniature Rod Type Miniature Slide table Type

/See 7.3 Caution(12) on p.43 and Caution(14) on p.44 g < Trigger LV> The condition at which INP output signal is turned on. Set it at the value equivalent to the pushing force or less. /See 7.3 Caution(12) on p.43 The INP output signal is given when the target force (Trigger LV) is achieved.

High Power Cylinder Series RHC

10.5 12 8.5 20 24 20.5 14.5 19.5 16 17.5 14 14.5 18.5 15 9 14 10.5 12 8.5 20 24 20.5 14.5 19.5 16 17.5 14 14.5 18.5 15 9 14 10.5 12 8.5 22 26 22.5 16.5 21.5 18 19.5 16 19.5 23.5 20 14 19 15.5 17 13.5 27 31 27.5 21.5 26.5 23 24.5 21 17.5 21.5 18 12 17 13.5 15 11.5 27.5 31.5 28 22 27 23.5 25 21.5 17.5 21.5 18 12 17 13.5 15 11.5 27.5 31.5 28 22 27 23.5 25 21.5 13.5 15 16.5 13 27.5 29 30.5

OMR0032

. 14 (7) Test operation . 14 3.

Integrated Controller

Select the graphs for horizontal of the EQFS40H on page 14. 3. Lx = 350 mm, Ly = 250 mm, Lz = 1000 mm 4.

Basic Type/Direct Mount Type

B Counter bore depth C T T HP Y 0 -0.1 Note 1) L 2 x P (Piping port) 4 x J x E TC 4 x 3.2 X F WP WP D GW QW 4 x LD PW WS GP 4 x 6.5 CY3R6 2 x 4 x MM Thread depth M Switch rail W K HS Z + Stroke Q + Stroke G G HR CR CY3R25 to 63 Note 1) 50, 63: L 0 0.2 CY3R10 to 20 (mm) A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36

OMU0023

Step Request data Response data Operation details 01 10 0600 000A Alarm history command to clear alarm 14 0 0 0 0 1 01 10 0600 000A history sent. (0 to 10 entries) 0 0 0 0 0 0 01 10 060A 000A Alarm history command to clear alarm 14 0 0 0 2 01 10 060A 000A history sent. (11 to 20 entries) 0 0 0 0 0 0 0 67 - Caution Ensure the alarm history is cleared only after taking corrective action in

Guide Cylinder/Compact Type Series MGC

190 129 350 to 500 14 207 146 350 to 600 14 210 146 350 to 800 15 236 191 Note 1) Dimensions marked with are not required for without rear plate.

HRX-OM-M090

Berakoetxea, Director & General Manager, SMC European Zone, SMC Espaa, S.A,.Zuazobidea 14, 01015 Vitoria, Spain Importer/Distributor in EU and EFTA: Country Company Telephone Address Austria SMC Pneumatik GmbH (Austria) (43) 2262-62280-0 Girakstrasse 8, AT-2100 Korneuburg Belgium SMC Pneumatics N.V.

HRX-OM-S004

Flow switch Blue(DC COM) Brown(DC 24V) Brown (DC 24V) Terminal No. 14 6 Terminal No. Flow switch 5 Terminal No. Blue(DC COM) 11 Terminal No. Black (Output1) 3 Terminal No. Black(Output1) Fig. 3-12 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue(DC COM) Brown (DC 24V) Brown(DC 24V) 14 Terminal No. Blue(DC COM) 6 Terminal No.

0.55

Made to Order (Refer to page 14 for details.)

MG

12 M10 x 1.5 22 M10 x 1.5 8.6 14 44 9 20 1/4 16 9 12 21.5 64 47 14 40 11 148 M8 32 32 46 77 16.5 M10 x 1.5 22 M10 x 1.5 8.6 14 49 9 20 1/4 16 14 12 28 78 55 16.5 50 13.5 162 M10 39 39 58 WA R S T U VA VB WB Bore size (mm) X XA XB XC XL YY YL Z Over 25 st to 100 st Over 300 st Over 100 st to 200 st 200 Over 200 st to 300 st 33 Over 25 st to 100 st 83 Over 100 st to 200 st 121 Over 200 st

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

9 9 11 11 13.5 9 9 10.5 10.5 12.5 12.5 13 62 62 81 81 111 111 136 42 42 53 53 73 73 90 32 32 43 43 64 64 78 39 43 49 59 71 82 106 +0.058 0 +0.058 0 129 151 185 208 237 263 298 10 10 14 14 22 22 25 33 33 45 45 65 65 75 MB-B03 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Escapements Series MIW/MIS

14 1.4 2.2 M4 x 0.7 2.8 M5 x 0.8 2.5 6 8 7 14 6 8 24 18 1.8 D-X 2.7 M8 x 1 12 4 12 10.5 34 26 2.2 9 22.5 10 Individual -X 2.7 M8 x 1 12 4 15 11 40 36 2.8 9 26 14 M12 x 1.25 17 6 20 13 49 41 3.4 12.4 33 27 1429 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the auto switch in the switch mounting groove on the escapement from the direction as below figure.

VDW

Refer to front matters 42 and 43 for Safety Instructions, and pages 17 to 19 for 2 Port Solenoid Valves for Fluid Control Precautions.