Compact Cylinder

) 25 (Head end lock) 32 (35) 5.5 (14) 36 (39) 9.5 (18) 25 (Rod end lock) 32 32 40 40 50 50 63 63 8 35 12 41 10 40.5 12.5 44.5 37.5 3 43 3.5 45.5 5 44.5 6.5 12 39 16 45 14 44.5 16.5 48.5 41.5 7 47 7.5 49.5 9 48.5 10.5 38.5 4 44 4.5 46.5 6 45.5 7.5 9.5 36.5 13.5 42.5 11.5 42 14 46 39 4.5 44.5 5 47 6.5 46 8 6.5 33.5 10.5 39.5 8.5 39 11 43 36 1.5 41.5 2 44 3.5 43 5 9 38 7 37.5 9.5 41.5 40

NCQ2/CQ2

) 25 (Head end lock) 32 (35) 5.5 (14) 36 (39) 9.5 (18) 25 (Rod end lock) 32 32 40 40 50 50 63 63 8 35 12 41 10 40.5 12.5 44.5 37.5 3 43 3.5 45.5 5 44.5 6.5 12 39 16 45 14 44.5 16.5 48.5 41.5 7 47 7.5 49.5 9 48.5 10.5 38.5 4 44 4.5 46.5 6 45.5 7.5 9.5 36.5 13.5 42.5 11.5 42 14 46 39 4.5 44.5 5 47 6.5 46 8 6.5 33.5 10.5 39.5 8.5 39 11 43 36 1.5 41.5 2 44 3.5 43 5 9 38 7 37.5 9.5 41.5 40

JIS Standard Hydraulic Cylinder

36.5 43.5 41.5 78 88 CH2F 41.5 36.5 41.5 36.5 41.5 76 86 50 CH2H 42 36 42 36 42.5 40 77 87 CH2E 47 43 48.5 43 50.5 47.5 85 95 CH2F 46.5 43 46.5 43 48.5 83 93 63 CH2H 47 43 48.5 43 50.5 47.5 85 95 CH2E 57 55.5 58.5 55.5 59 55.5 93.5 103.5 CH2F 80 56.5 55.5 56.5 55.5 57.5 92 102 CH2H 57.5 55.5 59 55.5 59.5 56 94 104 CH2E 66.5 67 66.5 67 69.5 65 104 114 CH2F 100 65.5 67 65.5 67 68 102.5

HRX-OM-X084

(This product will continue operation.) (12) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.

HRX-OM-X071

) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.

Series VQ Base Mounted Metal Seal/Rubber Seal

VVQ10001C AXT661 A Lead wire length 6 43 Lead wire length (mm) Manifold 300 600 1000 1500 2000 2500 3000 20 25 30 300mm 600mm 1000mm 2000mm 3000mm 1 VV5Q11 Connector 4 wire 2 wire 43 44 6 10 15 6 10 20 30 Without connector With connector/4 wire 1 2 With connector/2 wire Blank plate with a connector for individually outputing electricity to drive a single valve or equipment that are not

Air Pilot Operated

OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

PSxx-OMV0008CN

-L2 0x0013 (19) 0 R ID ISE70G-02-L2 0x0014 (20) 0 R Pressure sensor 8 0x0015 (21) 0 R No.

Air Pilot Operated Series NVSA

OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Option Body material Nil N Body only With silencer 1 2 ADC12 (aluminum) SCS14 (stainless steel) For AIR EXH: AN200-02 Connection port size 1/4 (8A) 3/8 (10A) Diaphragm material 02 03 1 PTFE (fluororesin) Symbol Type of operation Thread type FLUID OUT AIR SUP Nil T F N Rc NPTF G NPT Automatically operated type with built-in pulsation attenuator 2 AIR EXH FLUID IN Built-in pulsation attenuator

Tie-rod Type Hydraulic Cylinder

40 48.5 43 50 43 85 95 80 50 50 55.5 50 56 51 57 51 59 93.5 104 100 59 59 63 59 63.5 58.5 65 58.5 70 104 114 The auto switches listed below cannot be mounted on 63.

CQ2

Refer to p.0-39 to 0-43 for common precautions when auto switch is used.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Foot, Flange/Body mounting bolt, Double clevis/Clevis pin, Type C snap ring for axis, Body mounting bolt 7-6-43 44 Series CQ2 Theoretical Output (N) Minimum Operating Pressure (MPa) Made to Order Specifications (For details, refer to page 7-10-1.)

VCL

Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size B D E F H K L M N A C Model Note) Q V R Q R Q R S Q R S U 22 23 45 44 43 58 40.5 46.5 99 43 66 83 13.5 28 31 56.5 12.5 28 14 12.8 M4 4.5 64 1/8 VCL21 22 23 46 44 44 58 41.5 46.5 99 44 66 86 18 36 31 58.5 12.5 28 18 12.8 M4 6 67.5 1/4 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 99 22 40 36.5 11 15 32 20 19

VCW

Series VC 2 3 4 Class 2 Class 3 Class 4 OUT port size VDW Port size 1/8 (6A) Symbol 01 02 Stations Uside D side 1/4 (8A) Material VQ Stations 1 2 3 4 5 n 02 2 stations All IN ports are 3/8.

Refrigerated Thermo-chiller

Time Time 43% reduction 0 70 Space Saving Installation area: Max.29% reduction (SMC comparison) By emitting the heat from the rear side, ventilation slits on the side are unnecessary offering reduced installation space.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A A1 MM U1 L1 RR1 A1 L1 E1 MM RR1 U1 0.4 0.2 + 0.2 + 0 0.2 0.4 0.2 0.4 10 12 16 20 +0.002 0 5 6.4 8 10 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.002 0 5 6.5 8 10 #8-32UNC 10 12 16 20 12 16 20 25 10 12 16 20 14.6 16.6 21 25.6 RCS-01 RCS-015 RCS-02 RCS-025 RCD-01 RCD-015 RCD-02 RCD-025 21.5 32 34 41 6 6 6 8 16 25 25 30 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6.3 12 10.3 18 7 14 11.5 14

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 16 4 32 6 18 6 35 8 20.5 8 39 10 Series SY3000 SY5000 SY7000 Part No. 22 10 43 12 SY3000-52-2A 24 12 45.5 14 SY5000-52-2A SY3000/5000 DIN rail dimensions and weight SY7000-52-2A VZ1000-11-1Blocking disk indication stickers Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note 2) Weight kg (lb) Note 3) Model Effective area mm (Cv factor) Series Number of solenoids Standard: 1W Energy saving and AC 0.59 (1.30) 0.58 (1.28 ) 0.62 (1.37) 0.60 (1.32) 0.65 (1.43) 0.58 (1.28) 0.65 (1.43) 0.58 (1.28) 0.65 (1.43) 0.58 (1.28) 1.17 (2.58) 1.10 (2.42) 0 5 72.0 (4.0) Single VQ51 0 38 or less Metal seal 35 or less 2 position 3 position Plug-in unit 0 5 79.2 (4.4) VQ51 1 43

Refrigerated Air Dryers

Dimensions [mm] Model A B C D IDF4E, 6E, 8E, 11E 32 230 67 179 IDF15E1 43 258 77 158 IDU3E, 4E, 6E 32 230 67 179 IDU8E, 11E 42 230 77 136 IDU15E1 43 258 77 158 32 IDF/IDU Series W IDF100F to 150F, 190D, 240D Option symbol Water-cooled type It can be used in a high temperature environment without decreasing air flow capacity.