Up to 750 30 116 1/4 55 189 114 89 170 25 37.5 96 40 41 22 30 20 20 Bore size (mm) T V VA W ZZ L S RR U GE GF J K MM N P Q H Z 32 M10 x 1.25 6 154 13 6.5 18.3 23 47 224 234.5 34 10.5 1/8 6.5 13 37 27 M6 x 1.0 88.5 40 M14 x 1.5 6 161 13 8 19.5 23 51 235 246 39.5 11 1/4 9 16.5 41.5 27 M6 x 1.0 96.5 50 M18 x 1.5 7 183 17 9 22.4 30 58 271 286 47 15 1/4 10.5 20 47.5 31.5 M8 x 1.25 111.2 63 M18
XLGV 17 Series XLG, XLGV High Vacuum Angle Valve Specifications Model XLG(V)-50 XLG(V)-63 XLG(V)-80 XLG(V)-16 XLG(V)-25 XLG(V)-40 Valve type Double acting (dual operation), pressurize to open/close Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLG Operating temperature C 5 to 50C (41 to 122F) XLGV Atmospheric
O After a few seconds at 10-6Torr 41
COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.
4 6 5.1 63 Up to 1000 32 16 20 77 G 3/8 38.6 M16 x 1.5 121 5 8 16 56.5 M8 x 1.25 17 4 9 6.3 80 Up to 1000 40 17 25 99 G 3/8 38.4 M20 x 1.5 128 10 16 72 M10 x 1.5 22 4 11.5 6 100 Up to 1000 40 17 25 118 G 1/2 42.9 M20 x 1.5 138 10 18 89 M10 x 1.5 22 4 17 10 125 Up to 1000 54 20 32 144 G 1/2 58 M27 x 2 160 13 19 110 M12 x 1.75 27 6 17 15 *1 Minimum stroke for trunnion mounting: 1 mm
150 to 700 20 FX 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 REC 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to1000 26 20, 25, 32 40 36 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to1000 32 RHC NA S Z ZZ NN P H1 H2 I K MM N Bore size Stroke range 1 8 30 20 M20 X 1.5 146 37 200 150 to700 M8 X 1.25 5 8 33.5 5 20 MTS 1 8 34.5 M26 X 1.5 25 146 41 204 150 to700 M10 X 1.25 6 8 37.5 5.5
COM3 15 LA Encoder A-phase pulse (differential line driver) Y004 CR 5 16 LAR (Note 15) COM2 17 LB Encoder B-phase pulse (differential line driver) 18 LBR X INP 10 19 LZ Encoder Z -phase pulse (Note 17) (differential line driver) 20 LZR X X RD 11 21 14 LG SD Control common OP LG Plate (Note 17) 14 SD Plate (Note 7) (Note 3, 5) Forced stop CN1 EM1 8 Servo-on SON 4 Reset (Note 10, 11) RES 3
Transmission Bytes Transmission Cycle Applicable Communications Cycle 17-byte 32-byte Connectable Max.
COM. 41 Red Red COM.
+ + 20 + + + + + 20 stations S F G P R P R A, B port size R port 1/8 R port 1/8 N NPT A B B A M5 M5 x 0.8 A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 T NPTF A, B port M5 x 0.8, C4 C4 One-touch fitting for 4 N3 One-touch fitting for 5/32" Type 41 (5 Port/Base mounted) Applicable solenoid valve SYJ340SYJ343How to Order SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid coil is on
+ + 20 + + + + + 20 stations S F G P R P R A, B port size R port 1/8 R port 1/8 N NPT A B B A M5 M5 x 0.8 A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 T NPTF A, B port M5 x 0.8, C4 C4 One-touch fitting for 4 N3 One-touch fitting for 5/32" Type 41 (5 Port/Base mounted) Applicable solenoid valve SYJ340SYJ343How to Order SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid coil is on
After confirming that the operation is in the stop status, click the "OK" button to display the setting screen for the DO forced output. a 7 17 7.
CNP1CNP2CNP3 . 3-11 3.4 . 3-13 3.5 (). 3-15 3.5.1 . 3-15 3.5.2 . 3-16 3.5.3 . 3-17 3.5.4 . 3-17 3.6 . 3-18 3.6.1 (SS1) . 3-18 3.6.2 . 3-19 3.6.3 . 3-20 3.6.4 EM2 . 3-20 3.7 . 3-21 3.7.1 . 3-21 3.7.2 . 3-22 3.8 . 3-23 3.8.1 . 3-23 3.8.2 . 3-24 3.8.3 . 3-26 1- 3.9 SSCNET . 3-27 3.10 . 3-29 3.10.1 . 3-29 3.10.2 . 3-30 3.11 . 3-34 4 41 4-18 4.1 . 42 4.1.1 . 42 4.1.2 .
17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30 AF40 4 Series AF20~40 Filter Standard (Manual Drain) S F 4 T BRACKET MOUNTING THREAD W M R C G J Q P K N 2 A Bowl Detail U (AF20) H L E IN OUT D Bracket (Optional) Note: Sight glass not applicable to AF20.
Mist C auto-drain Auto-drains listed on page 17 are attached.
38 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 4 4 4 17 10.4 19.7 D1 10 A L2 8 D2 H Connection threads 6 10 10 18.5 12.8 21.8 (R) 10 (R) 8 26 2 x Applicable tubing 18 15.2 20.5 25.3 12 M L1 M L1 10 41 18.5 29 23 28.4 17 17 12 58 20.9 46 24 30.4 D1 22 D2 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.
Fittings & Tubing Air Cylinders Rotary Actuators 14.5 13.3 13.5 54.1 43.3 35 5.8 19 19 2 x 3.2 M5 x 0.8 (External pilot port) 17 17 (For mounting) 3 A B 22 SMC A B B A PE X EB EA P Manual override 41 2.8 A side: Orange B side: Green (Light/surge voltage suppressor) M5 x 0.8 (Pilot EXH port)
14 17 8 Buffer assembly part no.
14 17 8 Buffer assembly part no.