MLU

D-F7BAL, D-F7NTL D-F79F Bore size 25 Auto switch model D-A7 D-A80 D-A73C D-A80C D-P5DWL 32 40 50 CNS Number of auto switches D-F7V D-J79C D-F7WV D-F7BAVL D-A7, A80 D-A7H, A80H D-A73C, A80C 13 13 13 13 CLS Different side(s) 20 Same side 75 D-A79W 13 13 14 14 2 pcs. 1 pc. 5 5 10 5 15 10 15 15 D-F7, J79 D-F7V, J79C D-F7W, F7WV D-J79W, F7NTL D-F7BAL, F7BAVL D-F79F CLQ 20 Only size 40 and 50

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

D-X 20Bore size (mm) Cylinder fixing bolt Tightening torque Data Bore size (mm) Hexagon socket head set screw Tightening torque 10 15 25 0.55 to 0.72Nm M3 10 15 25 2.6 to 3.5Nm M3 0.37 to 0.45 Nm M5 M5 0.54 to 0.64 Nm Enlarged view of stepped part Surface D 3. Be careful about the tightening torque of the hexagon socket head screws.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

D-X 20Bore size (mm) Cylinder fixing bolt Tightening torque Data Bore size (mm) Hexagon socket head set screw Tightening torque 10 15 25 0.55 to 0.72Nm M3 10 15 25 2.6 to 3.5Nm M3 0.37 to 0.45 Nm M5 M5 0.54 to 0.64 Nm Enlarged view of stepped part Surface D 3. Be careful about the tightening torque of the hexagon socket head screws.

Modular Type Lubricators Series AL

14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30

VQ5000

Note 3) When specifying more than one option, enter symbols in alphabetical order. 15 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Terminal Block Box Kit) T 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 PE R1 5 R2 3 P 1 SMC 6-3/4 Ports P (SUP), R (EXH) 2-G3/4 Conduit port 144.5 143 112.5 83.5 179 46.8 59.2 106 9 9 U side 55.5 M5 ground screw 19 34.5 34 n 12 X 2n-3

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

300 (Lead wire length) Pg7 80.6 [82.8] 90.6 70.8 [73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48 48 12 12 12 12 20 20 20 20 54.5 54.5 54.5 54.5 57.6 Refer to the page 68 for dimensions with connector cable. 38 Series SYJ700 Manifold Specifications Manifold Specifications Type 20 Type 21 Type 40 Type 41 Type 42 For internal pilot Model Type 21R Type 41R Type 42R For external pilot Single

3

With arm Port side M With Arm Rotary direction: R During unclamping (Extension end) Rotary direction: L During unclamping (Extension end) Model (mm) N N O P U V AD 18 18 22 22 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 67 67 88 88 45 45 65 65 20 20 22 22 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 15 to 25 15 to 25 30 to 40 30 to 40 10 mm Clamp stroke M Rod state Model O P 10 50 mm 85.5 150.5 93 158 103

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Made to Order 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Page 34 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note 3) When specifying more than one option, enter symbols in alphabetical order. 15 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Terminal Block Box Kit) T 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 PE R1 5 R2 3 P 1 SMC 6-3/4 Ports P (SUP), R (EXH) 2-G3/4 Conduit port 144.5 143 112.5 83.5 179 46.8 59.2 106 9 9 U side 55.5 M5 ground screw 19 34.5 34 n 12 X 2n-3

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

N 50 N 60 N 20 N 30 N 60 N 80 N 15 N Shaft load Allowable thrust load 2 15 N 30 N 40 N 10 N Allowable moment 0.3 N m 0.7 N m 0.9 N m 2.9 N m Bearing Bearing Port location Side ported or Top ported Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Side ported M5 x 0.8

Round Type Hydraulic Cylinder

12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 19 44 24 21 (mm) Foot bracket plate thickness is dimension LT + 1 mm.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

8.5 M5 x 0.8 1214

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

50 63 80 100 Bore size (mm) JIS Symbol Minimum operating pressure 0.01 0.02 Standard Stroke Bore size (mm) 32, 40 50, 63, 80, 100 Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kit Theoretical Output OUT IN Unit: N Bore size (mm) Contents Kit n no.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

50 63 80 100 Bore size (mm) JIS Symbol Minimum operating pressure 0.01 0.02 Standard Stroke Bore size (mm) 32, 40 50, 63, 80, 100 Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kit Theoretical Output OUT IN Unit: N Bore size (mm) Contents Kit n no.

180

Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 25 Gripping force (N) External grip Gripping force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed

Plate Cylinder with Lock Series MLU

Size 25 32 40 50 l 18.2 22.2 26.2 32.2 Size 25 32 40 50 Part no.

ITV

L-bracket 2.3 30 36 52 40 22 Straight type 3 m Cable connector TM-4DSX3HG4 50 Right angle type 3 m 4 x 5.5 8 x 4.5 4 x 7 22 TM-4DLX3HG4 50 36 40 84 40 36 22 40 5 36 7 4 x 5.5 8 x 4.5 22 14 20 60 70 12 1.6 14-8-15 16 Series ITV1000/2000/3000 Working Principle When the input signal rises, the air supply solenoid valve q turns ON, and the exhaust solenoid valve w turns OFF.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

0 1 Grommet (G): VQZ2 2 (R)wGwC4, C6, M5 300 (Lead wire length) 122 54.5 17.3 6 6 R2.5 3.4 B 4 11 15 SMC SMC 2 A Cover diameter 1.6 Cross section 0.34mm2 24 22.7 Mounting holes 66.5 2-C4, C6, M5 Manual override C4: One-touch fittings for 4 C6: One-touch fittings for 6 M3 X 0.5 External pilot port (Only external pilot style(R)) M5: M5 thread (C4, C6) (54.5) 16.6 25 10 30 (M5) 2.5 20 33.2