Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(up to 24 solenoids possible) D side 20 20 20 stations 20 stations Connector entry direction PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) 1: Perpendicular connector 2: Lateral connector Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations Double wiring specification Double wiring specification ... ... ... ... 09 10 04 05 9 stations 4 stations 10 stations

VKF300

F Bracket VK300-43-1A 20 stations 20 Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Common SUP, Individual EXH Type 21/for body ported type (Port A top ported) How to Order Applicable solenoid valves VKF333--M5 VKF333--01 VV3KF3-21 05 Port A: Rc(PT) 1/8, M5 x 0.8 Valve stations Applicable blanking plate assembly VK300-42-1A 01 1 station 20 20 stations Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Base

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(800) 258-9200-www.stevenengineering.com Applicable blanking plate assembly VK300-42-1A VV3KF3-21 05 VT 2(A) port: Rc 1/8, M5 x 0.8 Valve stations VP 01 1 station VG 20 20 stations VP 1(P) port: Rc 1/8 3(R) port: Rc 1/8 S070 Base mounted Common SUP/Common EXH VQ Type 40: Base mounted (A port bottom ported) How to Order Applicable solenoid valve VKF334VKF VV3KF3-40 05 01 Applicable blanking

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Piping: Base Mounted Common SUP Common EXH, Flat Cable, Stations: 5 Stations, A, B Port: M5X0.8 NPTF

Piping: Base Mounted Common SUP Individual EXH, Flat Cable, Stations: 5 Stations, A, B Port: ø4 One-touch Fitting

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: N7N (1/4" One-touch Fitting NPT)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: 01 (Rc1/8)

Piping: 43 (Base Mounted Common SUP Individual EXH), Stations: 5 Stations, A B Port Size: N3T (5/32" One-touch Fitting)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: M5 (M5X0.8)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: 01N (NPT 1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: 01T (NPTF1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: C6 (ø6 One-touch Fitting)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: N7 (1/4" One-touch Fitting)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: N7T (1/4" One-touch Fitting)

Piping: 43 (Base Mounted Common SUP Individual EXH), Stations: 5 Stations, A B Port Size: C4 (ø4 One-touch Fitting)