MY1

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x

XL

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

03 KPGY12-04 KPQY04-M5 KPQY04-01 KPQY04-02 KPQY06-M5 KPQY06-01 KPQY06-02 KPQY08-01 KPQY08-02 KPQY10-02 KPQY10-03 KPQY12-03 KPQY12-04 M5 x 0.8 1/8 1/4 M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 31.5 35.5 39.5 34 39 43 43.5 47.5 52.5 54 57 59.5 8 10 14 8 10 14 12 14 15.3 21.1 25.5 15.8 22.3 26.7 23.5 27.9 29.4 30.8 32 36.2 6 13 19 7 14 20 14 22 29 39 41 68 D1 M 4 17 4 4 19.7 10.4 KQB2 M L1

A

M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C3: One-touch fitting ass'y for 3 2n-C3, C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5

High Vacuum Angle Valve, XL Series

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61

Integrated Controller

Size Order no. 27 16 LE-D-2-7 25 LE-D-19-3 32 LE-D-19-4 Replacement Parts/Grease Pack Applied portion Order no.

VK3000

VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station

15

Bore size (mm) Contents 6 Set of the nos. 4, 5, 13, 19, 24, 39 CY1S6-Z-PS 10 Set of the nos. 4, 13, 19, 20, 24, 39 CY1S10-Z-PS 15 CY1S15-Z-PS 20 CY1S20-Z-PS Set of the nos. 4, 5, 6, 13, 19, 20, 24, 39 25 CY1S25-Z-PS CY3B CY3R 32 CY1S32-Z-PS 40 CY1S40-Z-PS CY1S CY1S Note 1) Seal kit includes 4, 5, 13, 19, 24, 39 for 6. 4, 13, 19, 20, 24, 39 for 10. 4, 5, 6, 13, 19, 20, 24, 39 are for 15 to

ARM10/11

19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 14-4-37 20 Series ARM11A/B End Block Pressure Gauge ARM11E L Indication unit Part no.

ARM10/11

19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 14-4-37 20 Series ARM11A/B End Block Pressure Gauge ARM11E L Indication unit Part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Note 4) When specifying more than one option, indicate them alphabetically. 2.10-32 VQZ100/200/300 Base Mounted Specification Piping specification (1) Manifold base weight (g) Applicable Applicable Piping Series Base model valve Port size station 1(P), 3(R) 2(A) C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) Side Top VV3QZ15-lll VQZ1l5 VQZ100 2 to 20 2 stations:83 Additional station:19

Plug-in Unit

A (+) () 19 COM (+) () 19 Station 10 SOL. B (+) () 20 COM (+) () 20 SOL. A (+) () 21 Negative COM. spec. Positive COM. spec. Station 11 SOL. B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special Wiring Specifications (Option) COM () (+) 26 Positive COM. spec. Negative COM. spec. COM.

RQ

Example) Bolt M5 x 50l 4 pcs.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

(mm) Female rod end (mm) With air cushion ZZ Bore size H Bore size S A1 GA RA ZZ WH WB WA MM Rubber Air 8 8 12 13 18 18 21 25 87 (96) 102 (114) 102 (114) 13 14 14 15 16 16 19 22 22 26 26 8 9 9 15 (17) 16 (18) 17 (18) 26 30 30 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.5 M10 x 1.5 M14 x 1.5 M16 x 1.5 139 (148) 162 (174) 162 (174) 1.5 3 3 40 50 63 92 (100) 93 (101) 95 (103) 95 (104) 108 (

ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C A 54 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 14 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 25 25 6-M5 x 0.8 thread depth 10 (A, B, C common view) 50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B,

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

X 0.8 thread depth 10 P.C.D43 (Mounting thread) 80 120 15.5 120 C A 54 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 14 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 25 25 6-M5 X 0.8 thread depth 10 (A, B, C common view) 50 3-5 +0.02 0 depth 10 16h9 0 0.043 (A, B, C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 -0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed:19 2-M5 X