HRX-OM-W002

5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6 Reset menu . 5-54 5.5.7 Information Monitor Menu. 5-58 5.5.8 Alarm History menu . 5-62 Chapter 6 Option . 6-1 6.1 Option DMElectric conductivity control function

Rotary Actuator/Vane Type

Single shaft/Port location: Side ported 31 2 x 3.5 through 2 x M3 x 0.5 through 25 Chamfer (Rotation range is stated on page 70.) 25 31 41 A port B port 17 9h9 0 0.036 4g70.004 0.016 Double shaft/Port location: Side ported 0.5 2 x 3.5 through 9 31 14 1 3 Body (B) 10.6 7 16.5 46 9.5 21 53 Body (A) 2 x M3 x 0.5 5 8 1 B port A port 0.5 9h9 0 0.036 4g70.004 0.016 29 Size: 10

Fieldbus System

P. 1 P. 3 P. 9 P. 11 How to Order Specifications Parts Description Dimensions Digital Unit Unit to input or output digital (switch) signals P. 1 P. 5 P. 10 P. 12 How to Order Specifications Parts Description Dimensions Series SY (IP67) Manifold solenoid valves Analog Unit P. 17 Unit to input or output analog (voltage/current) signals P. 2 P. 7 P. 10 P. 12 How to Order Specifications

VK3000

3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 VFN L2 Body ported (Top ported) Type 21 Manifold Grommet: G DIN terminal: D VV5K3-21Station (P port) (P port) n1 = Number of VK3000 n2 = Number of VK300 L Dimension n: Stations n L 1 38 27 2 57 46 3

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 L2 1428 VK3000 Series Specific Product Precautions Be sure to read this before handling the products.

Sine Cylinder Series REC

26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Sine Cylinder Series REC

26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

3

MM M 4.5 (2 locations) M4 x 0.7 (4 locations) (Special cap bolt) FX FZ Arm 5.5 FV (mm) Rod Flange M MM Model Rod state 10 mm Clamp stroke 20 mm 30 mm 10 mm Clamp stroke 20 mm 30 mm Head Flange DModel (mm) Retracted Extended Retracted Extended 23 40.5 26 43.5 33 60.5 36 63.5 17 34.5 17 34.5 43 80.5 46 83.5 27 54.5 27 54.5 37 74.5 37 74.5 MKF12-Z FV FX FZ 25 30 45 45 55 55 MKG12-Z MKG16-Z -

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Exhaust port type 1 Common exhaust 17 17 stations Manifold Specifications Common exhaust Manifold type B mount 17 stations Note) Max. number of stations Applicable solenoid valve VO325-00(-Q) Port location/Port size Port direction P Exhaust port type P R A A R Base Base Base Common Side Side/Bottom Side 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , Option Blanking plate (With gasket, screw) DXT083-21A

7

17 20 20 15 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

IDG

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Hexagon width across flats 14 Hexagon width across flats 17 IDG3, 5 IDG3H, 5H With fitting for purge air discharge (Option: P) 73 40 Dew point indicator (Option: S) (98) 38 30 Purge air 12 2.3 6 17 22 IN OUT 11 Bracket (Accessory: B) 140 Purge air for dehumidification 118

HRX-OM-X037

(Recommended tightening torque178 to 185Nm) Gasket (1) CH1 particle filter Fig. 3-17 CH1 side Installation of particle filter HRL Series 3.3 Installation 3-33 HRX-OM-X037 Chapter 3 Transport and Setting Up 3. Attach the CH1 filter bracket.

Please contact us for the latest version.sales@ocaire.com, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .61600 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .13200 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .19800 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .22220 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .25080 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .35200 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .33000 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .36300 lb