ZQ-OM01401

--1 ZQA-Q25LO--VQ100 (ZQ ) Assy(DC24V ) VQZ1000V-85-1A 97mm 41 - No.ZQ-OM01401-B 13. (1),(2) (3),(4) (4),(5) (6) (14) (7) (8) (9) (6),(10) (11) (12) (13) (3),(4), (5),(6),(14) (15) (7) (8) (16) 42 - No.ZQ-OM01401-B No. (1) (2) (3) ON 10 (%) (4) (5) Assy (6) (7) (8) 0.72[V] (9) Ass'y (10) 43 - No.ZQ-OM01401-B No. (11) (12) (13) (14) Ass'y (15) ON/OFF (16) (ZQ-ZSV-A

Guide Cylinder Series MGG

88 125mm or more 175 80 37 46 57 100 13 31 12 350 to 500 21 14 Rc 1/8 M6 x 1 depth 13 90 150mm or more 201 82 37 52 65 114 16 38 12 350 to 600 21 14 Rc 1/8 M8 x 1.25 depth 16 101 200mm or more 238 92 44 62 84 138 20 47 12 350 to 800 15 25 Rc 1/4 M10 x 1.5 depth 21 116 250mm or more 285 104 55 75 94 164 25 58 14 26 350 to 1000 16 17 Guide Cylinder Series MGG Basic type/MGGB 63 to 100 4-F

240

4 x M4 x 0.7 Depth 6 2 x M5 x 0.8 Cylinder port MXW 23 6 5 MXJ 21.5 18 46 47 MXP 23 5 20 6.5 20 6.5 MXY MTS 5 NS 35 + Stroke 46.5 + Stroke 11 20 4 x M4 x 0.7 Depth 7.5 7.5 11.5 13 12.5 12 5 + Stroke 4 x M4 x 0.7 Depth 6 13 Note 1) Refer to Specific Product Precautions for mounting of the Compact Slide and a workpiece.

HRX-OM-W002

9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT . 9-14 9.6.3 HRR012/018/024/030-A/W-20-T . 9-15 9.6.4 HRR012/018/024/030-A/W-20-MT . 9-15 9.6.5 HRR012/018/024/030-A/W-20-T1 . 9-16 9.7 Required facility water flow (for water-cooled

Series VCL

44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5

HRX-OM-X037

Setting range and default settings are shown in Table 5.4-13 Pump operation mode setting. (1) (2) (3) (4) (5) Pump operation mode setting Table 5.4-13 Pump operation mode setting No.

Dedicated Controller

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

VEX1

Caution Caution When the VEX3420 air operated power valve is delivered from our factory, the M5 threaded pilot ports P1 and P2 in the cover are open and the Rc1/8 pilot port in the subplate is plugged. Before connecting pipes to P1 and P2 ports in the subplate, remove the 1/8 plug from the subplate and put M5 plugs into P1 and P2 ports in the cover.

VCA

50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 S 51 54 57 57 Q 27 30 32 32 R 40 48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models

CXT

9 23 55 53 28 M8 X 1.25 10 86 6.9 9.5 16 MM (N) M (NA) NN PA* PB PW Q QW RB RW S T U W X Y Z Bore size (mm) 12 M4 X 0.7 M8 X 1.0 6 8 27 30 60 80 85 26 RB0806 17.5 96 13 1 77 22 7.5 5 16 M5 X 0.8 M8 X 1.0 8 8 27 45 70 95 90 40 RB0806 15 103 13 2 92 22 7.5 5 20 M6 X 1 M10 X 1.0 10 10 29 60 100 120 105 46 RB1007 26 122 17 2 117 29.5 9 5.5 25 M6 X 1 M14 X 1.5 10 12 50 60 100 130 105 50 RB1411

AN

valve Measurement distance: 1m R(PT) R(PT) M3 M5 1 8 1 8 Port size Fluid Noise reduction dB(A) 16 21 13 18 Compressed air Max. operating press Ambient and fluid temperature 1.0MPa 5 to 50C Effective area (mm2) Weight (g) Dimensions (mm) 20 35 1 5 9.5 20 1 3.3 22.5 38 9 17 11 A B 13 6 8 Note) NPT thread for AN101 and AN110 is alsoavailable.

HRX-OM-Y098

Setting range and default settings are shown in Table 5.4-13 Pump operation mode setting. (1) (2) (3) (4) (5) Pump operation mode setting Table 5.4-13 Pump operation mode setting No. Indication Item Setting range Explanation (4) The pump operation is controlled to maintain the set pressure when control mode (operation mode) is set to [ ].

0.4

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 75 64 53 97 130 152 31 42 86 108 119 141 100 87.5 75 125 150 175 50 62.5 125 112.5 137.5 162.5 98

VCA

50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 Q 27 30 32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers under the manifold

One-touch Fittings

KQ2 Series Model Applicable tubing Connection thread Part number 3.2 M3 x 0.5 KQ2H23-M3G1 3.2 M5 x 0.8 KQ2H23-M51 4 M3 x 0.5 KQ2H04-M3G1 4 M5 x 0.8 KQ2H04-M51 4 M6 x 1.0 KQ2H04-M61 6 M5 x 0.8 KQ2H06-M51 6 M6 x 1.0 KQ2H06-M61 6 R1/8 KQ2H06-01S1 1/8 10-32UNF KQ2H01-321 5/32 10-32UNF KQ2H03-321 3/16 10-32UNF KQ2H05-321 5/32 NPT1/16 KQ2H03-33S1 1/8 M5 x 0.8 KQ2H01-M51 3/16 M5 x 0.8 KQ2H05-M51

0.4

screw R R B B B B B B B B X X P P 7.7 18.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (Female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc 1/8 Connection/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 20 to 32 Pad dia.

Title not found

(800) 526-7661 M5 x 0.8 Series Fibre Gasket Supplied 1/4 Hex Typ 35/64 35/64 29/64 29/64 .085 29/64 83 M5-B2 1/2 M5-B1 M5-B2 M5-B3 M5-B4 15/32 1/2 11 32 11 32 11 32 9/32 13/64 9/32 13/64 13/64 3 5/16 Hex Typ 84 M5-LB4 M5-LB1 M5-LB2 M5-LB3 M5-LB2 1/2 1 15/16 11/16 11/16 11/16 3 3 1/4 Hex Typ 5/16 Hex Typ 85 M5-T1 M5-T2 M5-T3 M5-T4 M5-T2 1/2 See complete selection of adapters on pages

EXxx-OMU0020CN

No.EX-OMU0020CN PROFINET SI EX245-SPN1 / Series EX245-DX1 / Series EX245-DY1 / Series EX245-EA2-1 EX245-EA2-2 / Series . 4 . 5 1. . 10 1.1. . 10 1.2. . 11 2. . 12 3. . 13 3.1. . 13 3.2. . 15 4. . 18 4.1. . 18 4.2. . 20 4.3. SIEMENS PLC . 23 5. . 35 5.1. . 35 5.2. PROFINET . 39 5.3. . 43 6. SI EX245-SPN1 . 44 6.1. . 44 6.2. . 45 6.3. . 46 6.4.