Speed Controller with

Body size 100 200 205 300 400 Metric size Inch size M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

VQ

SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Shock Absorbers and Rate Controls

5 x 1.5 t5 73.2 36 32 0.28 5t427fi( It_433?96(tR)0tMl.0[l 25.0 38 30 M27x3 t3.2 36 32 0.28 A dimensions in millimeters. Notes: 1. To be lsed wth non-button models on y. 2. Max mum sideoad angle is 30'. I 6ffi. Adjustable Hydraulic Series lmperial Accessories JAM NUT (JN) fttolog llo. P.rt trrbo/ ljlodel 0el) lA JI JH Wsighl [.rJ Jlllill0xl J?44?

VZS

VQ7 0.1 to 1.0 MPa EVS How to Order VFN VV5ZS3 1 08 01 5 AP D 51F Coil voltage of air release valve Series VZS3000 Manifold Note) How to take out the lead wire of air release valve is the same method as the other valve equipped on the same manifold.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

: External pilot port 9 D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port Lead wire length: L0, 600 mm L1, 1500 mm L2, 3000 mm C8: 1 (P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Formula

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

Hexagon width across flats (mm) Adjustable spanner nominal (mm) Male thread Suitable screw torque (Nm) M3 4.5 1/4 M5 10/32-UNF 1/6 turn after hand tightening 6. Do not apply excessive force or shock to the body or fittings with an impact tool.

Base Mounted How to Order Manifold VQC1000 Series Plug-in Unit

16 32 16 32 16 32 16 32 16 32 16 32 16 M12 DeviceNet 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) VFS M12 PROFIBUS DP VFR D-sub Note 4) M12 CC-Link VQ7 M12

ZQ

x 0.8) 66.9 Vacuum port (V port) Note 4) PE SMC (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 107 3.5 10 Note 1) The above dimensions are for ZQ11U-G2 L-DC.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

When ordering SI manifolds add suffix "X11" at end of P/N 7 Series VQ100 How To Order How to Order Valve VQ1 1 0 5 L M5 Subplate option Without subplate With M3 subplate With M5 subplate M3 M5 Series VQ Compact 3 port valve Manual override Type of valve actuation Normal close type Non-locking recessed type Latching type : Locking recessed type Locking tool type 1 B * Note) The manual override

Compact Vacuum Ejector Series ZQ

) Note 4) PE (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-J2 L-F.

Plug-in/Plug Lead: Single Unit

(Common EXH type) 32 16 3 R 1(P) 40.3 4(A) 2(B) 03: Rc 3/8 04: Rc 1/2 3(R') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type 2-6-34 Base Mounted Series VQ5000 Throttle valve spacer 179 (Plug-in type) 133 (Plug lead type) 32 16 VVQ5000-20A-1 (Plug-in type) VVQ5000-20A-5 (Plug lead type) 3 5 1(P) 4(A) 40.3 A throttle valve spacer is mounted on a manifold block to control cylinder speed

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Recommended speed controller Model Elbow type 10-AS2201F-01-06-X214 10-AS2201F-02-06-X214 10-AS2201F-02-06-X214 10-AS3201F-02-08-X214 10-AS3201F-02-08-X214 Model Straight type 10-AS2301F-01-06-X214 10-AS2301F-02-06-X214 10-AS2301F-02-06-X214 10-AS3301F-02-08-X214 10-AS3301F-02-08-X214 In-line type 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS3001F-08-X214 10-AS3001F-08-X214

10

M5 M5 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 Size 1 2 6 8 8 8 12.8 19 19 23 P 1 Resin body is not available. 2 Other Options, which can be combined, are A, B, D, E, Z. 3 Electrical entry direction 3 2 x M thread Depth D 90 Standard Note) Resin body is not available.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Part No. 40 50, 63 80 100 D H B C A A1 E1 L1 MM R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 +0.070 0 0.1 0.3 25.4 21 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 8 22 12 16 +0.070 0 0.1 0.3 74 M18 X 1.5 11 27 31.2 26 27 28 60 M18 X 1.5 15.5 20 12 16 +0.070 0 0.1 0.3 32 37.0 31 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 13 18 28 +0.084 0 0.1 0.3 39 16 41 47.3 105

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D C B E1 L1 MM H A A1 R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 12 16 +0.070 0 0.1 0.3 26 31.2 27 11 74 27 28 60 M18 X 1.5 15.5 20 M18 X 1.5 12 16 +0.070 0 0.1 0.3 31 37.0 32 13 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 18 28 +0.070 0 0.1 0.3 39 47.3 41 16 37 40 83 M26 X 1.5 24.5 28 M26 X 1.5 105 20 30

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

5 Port Solenoid Valve Series SQ1000/2000

N1: 1/8 N3: 5/32 N7: 1/4 Top ports are indicated by LN.