Brake mechanism added

18 15 0.1 0.3 +0.3 +0.1 0.032 0.059 16 +0.070 0 15 86 105 59 130 11.5 101 107 40 16 23 23 352 49 110 148 263 25 25 18 0.1 0.3 +0.3 +0.1 0.032 0.059 20 +0.084 0 18 102 130 76 160 13.5 119 126 48 20 28 28 403 61 140 192 297 31.5 31.5 25 0.1 0.3 +0.3 +0.1 0.040 0.073 +0.084 0 25 18 116 150 92 180 13.5 133 140 58 25 23.5 36 430 64 162 214 309 0.1 0.3 +0.3 +0.1 0.040 0.073 35.5 35.5 25 Mounting

ZQ-OM01401

(23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25 31 29 24 46 0.35 44 39 31 60 0.45 54 48 38 74 0.05 11 11 9 16 0.15 24 22 18

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

for further information on rod end nuts and accessories. 58 13 17 up to 600 20 17 52 12 11 27 47.3 61 M8 X 1.25 M18 X 1.5 159 40 90 17 11 30 25 70 7 19 0 32 35 18 58 17 up to 600 20 17 64 10 11 27 54.8 M18 X 1.5 170 40 15.5 68.5 M10 X 1.25 98 17 14 31 25 7 19 0 85 32 35 18 71 21 up to 750 21 25 78 14 13 32 65.8 M22 X 1.5 204 102 52 116 18.5 80.5 M12 X 1.75 21 17 37 40 11 23 0 37 40 22 72

ML1

Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.

Intrinsically Safe Valve

(For details, refer to page 18.) The solenoid must be connected to a safety barrier located in a non-hazardous area.

Compact Hydraulic Cylinder Series CH
KGB

MA B D-F9BAL A 32 to 100 Proper auto switch mounting positions (mm) D-Z7, D-Z8, D-Y5 D-Y6, D-Y7 D-Y7V, D-Y7WV D-Y7BAL B Bore size (mm) D-Z7 D-Z8 D-Y5 D-Y7 D-Y7W B 18 21.5 26.5 31 39 46.5 A 13.5 19 19 21.5 24.5 34.5 32 40 50 63 80 100 B A D-Y6 D-Y7V D-Y7WV Auto switch mounting heights (mm) Bore size (mm) D-Y7BAL SMC MA SMC 32 40 50 63 80 100 33 37.5 43.5 52 62.5 75 Approx.

Rotary Actuator

[mm] 63 15 105 59 130 101 Size H U UU 50 39 114 150 63 45 136 177 80 55 165 215 100 60 190 250 Size H N U UU 50 30 15 105 125 63 33 17 124 146 80 43 20 153 178 100 44 25 174 204 80 18 130 76 160 119 100 18 150 92 180 133 DThe dimensions of shaft key and four chamfers are the same as the basic type.

RSH

MK/MK2 RSQ/RSG RSH A CE1 Auto switch mounting position Auto switch model D-Z7l D-Z80 D-Y59 D-Y7P D-Y69l D-Y7PV D-Y7lW D-Y7BAL D-Y7lWV CE2 ML2B Bore size (mm) A B A B A B A B 20 18 8 18 9.5 18 2 18 4 ML1C 32 13.5 10 13.5 12 13.5 4.5 13.5 6.5 50 21.5 12 21.5 14 21.5 6.5 21.5 8.5 REA 63 16.5 31 16.5 33 16.5 25.5 16.5 27.5 80 26 33 26 35 26 27 26 29 REC RHC How to Install an Auto Switch MTS To

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

SMC SMC B A 5 1 P 3 R1 R2 SX Manual override Cover diameter 1.6 Cross section 0.34mm2 66 56 5 VK (58) VZ VF 56.5 54.5 26.5 VFR 13.5 11.5 A, B port VP7 20.5 2-PE port 18 18 13.5 SMC 9 (Rc(PT)1/4) (Rc(PT)1/4) 9 2-Rc(PT)1/4, 3/8 R1, R2 port M5 X 0.8 (Not applicable to standard.)

Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Process Pump

PAF3000/5000 Series Description PAF3000 series PAF5000 series PAF3413 PAF3410 PAF5410 PAF5413 Diaphragm kit KT-PAF3-31 KT-PAF5-31 Check valve kit KT-PAF3-36 KT-PAF5-36 The maintenance procedure is to be distributed individually. Please contact your SMC sales representative for details. Note) One of Nil, F or N is entered as thread symbol.

High Vacuum Angle Valve

(Refer to page 18.) * Standard lead wire length is 0.5 m. Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

ZSE30A(F)/ISE30A

0 0.4 31 x n pcs. + 3.5 x (n pcs. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less 24 or more Multiple (2 pcs. or more) vertical mounting 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 40 ZSE30A(F)/ISE30A Series 2-Color Display High-Precision Digital Pressure Switch The F in ( ) shows the function code number.

70pvpump

TI/ TIL PA Maintenance Parts List PAX PA3000/Automatically Operated Type PA5000/Automatically Operated Type PAX1000 PB KT-PA3-31 Diaphragm kit (PTFE) KT-PA5-31 KT-PAX1-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA3-32 Diaphragm kit (NBR) KT-PA5-32 KT-PAX1-36 Diaphragm kit (NBR) Check valve kit KT-PA3-36 Check valve kit KT-PA5-36 KT-PAX1-37 Check valve kit Switching valve parts kit KT-PA3

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 R 12 15 18 23 27.5 34.5 6.5 7.5 8 10 10 13 13 M3 x 0.5 M6 x 1 M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4

F

/2 (N)AS4200-04 M3 M3x0.5 M5 M5x0.8 01 18 02 14 03 38 04 12 Courtesy of Steven Engineering, Inc. !

LEF-OM006xx

LEF-OM00601 / / / LEF Series LECSeries /LEC6 . 2 1/. 4 . 4 . 5 . 7 2 . 9 LEF / . 9 LEF/ . 12 . 14 . 15 3 . 17 . 17 . 18 . 21 . 27 4 . 30 5 . 31 51 . 31 52 . 32 53 . 32 54 . 33 55 . 34 56 . 34 6. 35 61 . 35 62 . 35 63 . 36 64 . 36 65 . 38 . 39 LEF Series/ (ISO/IEC) (JIS)1)2) *1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

MRHQ

port 3-R2 3 29 15 16 10 22 8 31 18 51.5 6 40 78 Angle adjustment bolt 2-5.5 through 2-9.5 depth of counter bore 3 3-R2 11 2 10 +0.03 0 3-4H9 long groove depth 4 (one each on three sides) 0 -0.062 47h9 M5 x 0.8 Port A M5 x 0.8 Port B 4-M5 x 0.8 depth 8 8 22 8 12 25 11 6 6 29 Side A Side B 41 12-11-14 15 Rotary Gripper Series MRHQ MRHQ20 A MHZ B 48 59 MHF 78 MHL MHR 38.5 4-M6 x 1 depth 10

Rotary Table

24 Rotating range examples 25 Piping 25 Air supply 26 Setting of rotation time 26 Moment of inertia 27 Calculation formulae for moment of inertia 28 Kinetic energy 29 Auto switch 29 Internal structure and operation principle 29 Mounting of auto switch 30 Auto switch proper mounting position at rotation end 31 Maintenance and Inspection 31 Regular check 31 Interval of inspection 32 Troubleshooting

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