MXU

For details, refer to page 8-30-31. 8-3-11

HRX-OM-S004

C, use a 15% aqueous solution of ethylene glycol. Tap water may be frozen in the thermo-chiller which may damage the product. 3.5 Circulating Fluid Supply HRS Series 3-32 HRX-OM-S004 Chapter 3 Transport and Setting Up 15% aqueous solution of ethylene glycol When a 15% aqueous solution of ethylene glycol is used, prepare the ethylene glycol aqueous solution separately.

Short Stroke Electric Actuator Series LX

G 28 58 5H9 +0.030 0 depth 5 (5.5) 10 D-M4 x 0.7 (for work piece mounting) 10.5 12 2-M3 thread depth 5 (3.5) 6 4-8 50 18.5 10 20 17.5 22 25 35 (5) 62 72 12 (6) 8 (15) 1 0.2 31 5H9 +0.030 0 depth 5 Photo micro sensor wire (300mm) 10 13 1.5 [5.5] 6 25 (4) 30.5 10 (39.5) E Motor wire (300mm) Stroke + 135 The dimension inside [ ] shows the location at which the home position switch operates

PFxx-OMO0004CN

B AC (83) C A B -16No.PF-OMO0004CN-E 0.450.55 Nm ,, (ZS-33-M) (ZS-33-MS) M34 (84) M3 M3 -17No.PF-OMO0004CN-E M3(2) 0.350.45 Nm (84) M3 DIN DINDIN DIN0.350.45 Nm () DIN DIN F02(G/14)DIN DIN -18No.PF-OMO0004CN-E IN8cm 2F.S.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

7.4 28 [35] M3 x 0.5 (A port) (Light/surge voltage suppressor) 28 [35] + 22.1 48.6 [50.8] 13.5 12.6 15 M3 x 0.5 (P, R port) 2 (Bracket) 15 11 10 P R 22.1 6.7 7 9.2 L plug connector (L): 10-SYJ32M-L-M3 M plug connector (M): 10-SYJ32M-M-M3 M8 connector (WO): 10-SYJ32M-WO-M3 58.5 [60.7] Approx. 300 (Lead wire length) 28 [35] 12.6 32.5 M8 x 1 15 39.1 [46.1] Approx. 300 (Lead wire length) 48.7

Applicable Auto Switch Model

17 17 17 17 17 17 13 13 13 14 14 15 Note) Average value at normal temperature including hysteresis.

VQ4000

KG 72309-0114-70-15, etc.

LEC-OM02904

0.5 LECSS-S7 LE-S70.5 25 15 0.5 LECSS-S8 LE-S80.9 35 15 0.7 1.

LEC-OM07605CN

0 250 350 40 0 300 0 50 150 250 350 350 (1,2 [%]) (1,2 [%]) b a 1. ()30r/min100% 2. 300%350%LE-T10.1 10 3 10. 10.2 (1) 10.1 10.1 1 (1) (2) [W] 2] [m [kVA] LECSS2-T5 LE-T50.3 25 15 0.5 LE-T60.3 25 15 0.5 LECSS2-T7 LE-T70.5 25 15 0.5 LECSS2-T8 LE-T80.9 35 15 0.7 LECSS2-T9 LE-T91.3 50 15 1.0 1. . 2

VP300/500/700

7.4 9.0 7.5/7.7 8.8/9.3 12 14 14/14 15/16 Cv 0.86 0.88 0.80/0.86 1.0/1.0 2.0 2.4 1.9/2.1 2.3/2.4 3.1 3.8 3.5/3.5 3.8/4.0 C [dm3/(sbar)] 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 Cv 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 C [dm3/(sbar)] 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13 16 14/14 15/15 Cv 0.93 1.1 0.89/0.89 1.0/

15

moment (6 to 15) [Graph 11] Allowable moment (20 to 40) 20 200 CY1S40-Z 10 100 Moment M1, M3 [Nm] Moment M1, M3 [Nm] CY1S15-Z CY1S32-Z CY1S25-Z CY1S10-Z CY1S20-Z CY1S6-Z 1 10 0.5 5 200 300 100 400 100 400 300 200 Piston speed [mm/s] Piston speed [mm/s] M2 M2 [Graph 12] Allowable moment (6 to 15) [Graph 13] Allowable moment (20 to 40) 20 200 CY1S40-Z 10 100 CY1S15-Z CY1S32-Z Moment M2 [Nm

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA1 MSUA1-S, SE Scale: 70% C 8-M3 x 0.5 depth 5 51 31 38 23.5 B 25 4-M4 x 0.7 depth 4 22.5 4.5 +0.025 0 2.5H9 A Long groove depth 4 (positioning pin hole) 35h9 0 0.062 22.5 +0.025 0 +0.043 0 3-3H9 depth 3 ( A , B , C ) 17 H9 27 2.5 2 2-4.5 through 3-R1.5 12.5 37 8 6.5 10.3 6.5 36h9 0 0.062 31 4.2 2 31.5 2 27 16 9 5 Angle adjustment bolt 4.5 2-4.5 through 3-R1.5

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

15 20 20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.

Compact

400 400 m Motorless 200 100 200 200 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 5 10 15 20 0 0 5 10 15 20 LAT Work load [kg] Work load [kg] Work load [kg] Work load [kg] LZ 1000 1000 1000 1000 800 800 800 800 LC3F2 Wall mounting m L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 L5 Y 400 400 400 400 200 200 200 200 0 0 2 4 6 8 10 0 0 5 10 15 20 0 0 5 10 15 20 0 0 2 4 6 8 10 Work load [kg] Work load

Multi-channel Digital Sensor Monitor ( compatible)

60 59 58 57 56 55 54 53 52 51 50 49 48 Item CH2: Measurement value Bit offset 47 46 45 44 43 43 41 40 39 38 37 36 35 34 33 32 Item CH3: Measurement value Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item CH4: Measurement value Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 OUT2 OUT1 OUT2 OUT1 OUT2 OUT1 OUT2 OUT1 CH1 Diagnosis Diagnosis Diagnosis Diagnosis Diagnosis Item Reservation

ZP3

M3 x 0.5 8.5 Model Vacuum inlet direction q Pad dia.

Ionizer

End bracket/IZS31-BE When mounted outside in (33) Position Detection Switch Flow Sensor Pressure Control Pressure Sensor 31 31 22 4.5 2 x 5.4 22 4.5 32 20 Ionizer 27 2 100 Hexagon socket head cap screw M4 x 6 (Accessory) 6 Ionizer full length (L) Angle adjustable (90) (31) 12 2 Angle adjustment range is 45.

C76

Different sides Same side Different Same side sides 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 15 50 50 + 45(n 2) D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 45 (n = 2, 4...) ( n 2) 2 10 15 65 65 + 50(n 2) 15 + 45 (n = 2, 4...) ( n 2) 2 10 15 60 60 + 45(n 2) Construction C76RA B32 to 40 2B 2D !6 i y !4 u q r e !1 t !5 !3 !0 !2 o !

C76

Same side Different sides Different Same side sides 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 50 15 50 + 45(n 2) D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 45 (n = 2, 4...) ( n 2) 2 10 65 15 65 + 50(n 2) 15 + 45 (n = 2, 4...) ( n 2) 2 10 60 15 60 + 45(n 2) Construction C76RA B32 to 40 2B 2D !6 i y !4 u q r e !1 t !5 !3 !0 !2 o !

0.4

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 420 SV SYJ SZ VF VP4 VQ 1/2 VQ 1/2 VQ 4/5 VQC 1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 421 Construction