1

Blue OUT() Connection example when used as a sinking type Current is the same value. 4 to 20 [mA] Current I Brown OUT(+) Lead wire resistance r Current Sensor Equipment 12 to 24 [VDC] GND GND Connection of the current output 5 to 40 [mA] The current flow is the same regardless of the distance.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

Type 2-wire 3-wire Solid state auto switch Auto switch model D-M9B(V) D-M9N(V) Load voltage 24 VDC (10 to 28 VDC) 28 VDC or less 5 to 40 mA 40 mA or less Load current range Indicator light Applicable load Yes Yes 24 VDC relay, PLC 24 VDC relay, PLC When ordering the air gripper with the D-M9 type auto switch, the auto switch mounting bracket is supplied with the product.

VM

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Voltage 2 2 4 4 15 10 250 VAC 1.5 1.5 3 3 15 10 8 VDC 1.5 2.5 3 5 15 15 14 VDC 1.5 2.5 3 5 15 10 30 VDC 1.5 2.5 3 5 6 5 125 VDC 0.3 0.05 0.3 0.05 0.5 0.05 250 VDC 0.2 0.03 0.2 0.03 0.25 125 VAC 15 15 15 15 6 0.5 0.25

B COIL 24 VDC

Clean Air Module

: Analog output 1 to 5 V Allowable load resistance 100 k or more P5: Analog output 4 to 20 mA Allowable load resistance 300 or less (12 VDC), 600 or less (24 VDC) P2: Analog output 1 to 5 V Allowable load resistance 100 k or more P6: Analog output 4 to 20 mA Allowable load resistance 300 or less (12 VDC), 600 or less (24 VDC) 339 LLB Series Refer to the operation manual for how to set

VXZ

PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes

Coolant Valve

6.1 9.3 7.9 13.2 14.3 20.0 14.3 20.0 22.5 29.3 25.7 34.3 35.4 53.6 35.7 57.1 42.4 60.6 63.1 86.5 7 0.3 0.2 11 15 11 15 14 20 16 25 22 32 22 32 28 40 28 40 33 50 33 50 45 65 56 80 3 8 0.7 0.5 1 2 3 4 0.8 1.0 1.2 1.4 1 1 4 1 2.2 2.4 5.0 5.2 32 1 2 1 3.6 3.8 Symbol 6.8 7.0 40 Valve type Operation N.C.

VCL

(Type B) VCW 20 1 G Lead wire length Series 300 mm 600 mm 1000 mm 1500 mm 3000 mm Nil L1 L2 L3 L4 20 30 40 Class 2 Class 3 Class 4 Clip Voltage Electrical entry 1 2 3 4 5 6 36 Flat head screwdriver 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC G D DL DO C T TL Grommet DIN terminal DIN terminal with light DIN terminal (without connector) Conduit Conduit terminal Courtesy of Steven

ZSE F/ISE

to 24 VDC Load 6.8 k 12 VDC to 24 VDC (Black) OUT 1 ZSE ISE (Black) OUT 1 (White) OUT 2 (White) OUT 2 PSE (Blue) DC () (Blue) DC () Z I SE3 PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSE F/ISE --62(L)-(M) 50 60 50 60 ZSE F/ISE --70(L

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

VK300-37-2-01 VK300-37-2-02 VK300-37-2-07 VK300-37-4-51 VK300-37-4-06 VK300-37-3-05 VK300-37-3-53 A1 A2 A3 LW06 LW2 LD4 LD8 100 VAC 200 VAC 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC 4-13-3 4 For details about the applicable products conforming to international standards, visit us at www.smcworld.com. 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 How to Order Valves Electrical entry

VDW30/40-XF

OUT (2) 1 Coil insulation Body material and coil insulation type Symbol Body material Seal material (1) IN Nil A B PPS NBR FKM EPDM Class B Voltage 5 6 24 VDC 12 VDC Symbol Size Series Port connection type G Grommet Coil type P7 P10 C4 C6 C8 C10 30 40 P7 quick fastener P10 quick fastener One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 Power-saving

VNB

A: Non-locking extended type 4 Valve size 1 to 4 6A 8A 10A 1 8 1 4 3 8 5 6 24 VDC 12 VDC 1 7 B: Locking slotted type 7 240 VAC 50/60 Hz 9 Other 11 15 11 10A 3 8 Option 2 15A 1 2 15 14 3 20 16 Nil: Non-locking push type 20A 3 4 Valve size 5 to 7 25 4 25A 1 22 11 4 32A 5 32 Electrical entry/ With light/surge voltage suppressor 1 B 22 32 28 40 6 28 40 1 4 32F Flange 11 2 40A GS Grommet

VNC

12 VDC 240 VAC 50/60 Hz Other VC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil S Z None With surge voltage suppressor With light/surge voltage suppressor With indicator light Option VDW L Light/Surge voltage suppressor Nil Z VQ Except 12 VDC, 240 VAC, other voltages.

VXR21/22/23

Frequency (Hz) 50 20 11 60 17 7 Model Power source AC VXR21 50 40 18 60 35 12 DC AC VXR22 50 50 21 60 45 17 DC AC VXR23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C) Ambient temperature (C) Temperature conditions Power source Water (Standard) Oil (Standard) High temperature water (2) (D) High temperature oil (2) (D) 80 80 AC DC AC/DC 60 40 1 60 40 40 60 Maximum

3 Port Solenoid Valve Rubber Seal Series SY100 1

For manifold type 30, 31 VP Standard type (Cv: 0.008) SY1 3 5 L 1 M3 : Body ported VG VP Standard type (Cv: 0.008) 5 1 SY1 4 M : Base mounted S070 3 port VQ Port size Rated voltage For DC Nil: Without sub-plate M3: With sub-plate VKF 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC VQZ VZ Sub-plate style For manifold type S41 For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC VS (With gasket and screws)

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

12 VDC Voltage other than above (50 VDC or less) Nil Rc G NPTF Nil 3 1 station . . . 10 stations 1 . . .

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm. 3 port solenoid valve, direct operated

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm. 3 port solenoid

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

D-A93 D-M9B D-M9N Load voltage 24 VDC 28 VDC or less 24 VDC (10 to 28 VDC) Load current range Indicator light 5 to 40mA (24 VDC) 40mA or less 5 to 40mA Relay, PLC IC circuit, Relay, PLC 24 VDC Relay, PLC PLC: Programmable Logic Controller Refer to page 889 for the applicable auto switch list.