SL5200 60 80 100 Flow rate (slpm, N2) 0 40 80 120 160 200 240 280 320 Flow rate (slpm, N2) ) If connection size differs, flow characteristics also differ.
5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load
Max. 2s 2s 1s 1s Min. 0.5s 0.5s 0.2s 0.2s 0.1s 0.1s 0.05s 0.05s 0.02s 0.02s 0.01s 0.01s 6000 100 125 200 300 400 500 700 1000 1500 2000 30004000 10 100 125 200 300 400 500 600700 1000 1500 2000 3000 4000 600 5000 7000 Current (% for breaker capacity) Current (% for breaker capacity) For HRS100-A/W-20-B For HRS150-A/W-20-B HRS100-A/W-40, HRS150-A/W-40 4h 2h 1h 30min 20min 14min 10min 6min
encoder 25 100 AC servo motor (Inclemental encoder S2 S2 100 to 120VAC LECSA1 A1 100 to 120VAC LECSA1 A1 Right side R Right side R A1,A2 A1,A2 32 200 S3 32 200 S3 200 to 230VAC LECSA2 A2 200 to 230VAC LECSA2 A2 Both side D Both side D 40 400 S4 40 400 S4 100 to 120VAC 100 to 120VAC LECSB1 LECSB1 B1 B1 25 100 S6 25 100 S6 Motor option 32 200 S7 AC servo motor (Absolute encoder 32 200 S7 AC
200 mm/s mm/s <> 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 2) AWG20 (0.5mm USB JXC-W1-2 -USB DC24V M PWR JXC-W1 2) C PWR DC24V 2) () <> 1.5m () 2) AWG16 (1.25mm JXC-C1 1) 2)PLCDC24V 12.
116 150 VBA43A-04 (When silencer installed: 200) (When high-noise reduction silencer installed: 230) 404 40 Pressure gauge (Option) 43 OUT side gauge port 1/8 IN side gauge port 1/8 IN port 1/2 221 62 62.8 8 OUT port 1/2 Silencer (Option) 22 32 EXH port 1/2 96 4 x 12 130 3.2 116 150 (When silencer installed: 200) (When high-noise reduction silencer installed: 230) For detailed dimensions
5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 Load weight m0 (kg) MGF63 Load weight m0 (kg) Load
Magnetic flux density (B) 1 Flow Switch for Fluid Variations Rated flow range [L/min] Smallest settable increment Detection method Enclosure1 Display Applicable fluid Series 2 0 0.5 5 10 20 30 40 50 100 200 150 250 LFE 0.1 L/min 0.5 20 Water, Water-soluble coolant Electromagnetic IP65 3-color display 0.5 L/min 2.5 100 5 200 1 L/min PF3W 0.01 L/min 0.5 4 0.1 L/min 2 16 Water, Ethylene glycol
500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1 5 10 20 50 1 5 10 20 50 8 Series PF2A Dimensions: Remote Type Display Unit for Air (4-channel Flow Monitor) PF2A200, 201 40.1 (7.5) 40 6 2.5 L L/min 36.8 OUT1 CH FLOW SMC SET Sensor connector (option) Front protective cover + Panel mounting 53 9.4 (2) 47 42.4 46.4 Panel mounting adapter
10 50 100 150 200 250 15 600 500 400 300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.
20 (3/4B) 570 7 1000 20 150 64 400 267.4 230 510 1440 1775 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 500 20 150 54 445 318.5 240 560 935 1290 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 750 20 175 73 445 318.5 240 560 1195 1550 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 1000 20 200 92 445 318.5 240 560 1460 1815 100 150
40 VDW Air consumption 100 l/min (ANR) Air consumption 200 l/min (ANR) 30 30 Air consumption 100 l/min (ANR) Air consumption 50 l/min (ANR) VQ 20 SUP = 0.2 MPa 20 SUP = 0.2 MPa VX2 10 10 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 10 30 40 50 20 60 VX3
IZF21/31 IZF10/IZF10R Technical Data With automatic cleaning unit IZF21-m-mmSm IZF31-m-mmSm 64 (144) 20.5 (40) 64 (40) (104) 20.5 153 113.4 (195) (155) With adjustable louver IZF21-m-mmWm IZF31-m-mmWm (60) (144) 14 (40) 127 (60) (104) 14 (40) 89 127 89 (195) (155) With filter IZF21-m-mmmU IZF31-m-mmmU (144) (45) 134 5 (40) (45) (104) 5 (40) 95.5 126 87 (195) (155) 18 IZF21/31 Series Dimensions
Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N) 20 40
42.5 Size 40 2 1/4, 3/8, 1/2 145.2 35.5 38.4 72.6 40 35.5 50 40 55 9 18 7 50 65 Size 50 2 3/4, 1 186.2 43 93.1 30 45 70 50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.
l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than
, 250, 300 71.5 177 27 16 52 57 M14 x 1.5 5 14 136 24 100, 125, 150, 175, 200, 250, 300, 400, 500 85.5 200, 300, 500 193 32 20 64 71 M18 x 1.5 7 18 144 22.5 98.5 200, 300, 500 194 32 20 77 84 M18 x 1.5 7 18 145 21 P M N O T X Z L Q Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc(PT) 1/8 57.5 30 14 56 41 40 5.5 M6 x 1 Rc(PT) 1/8 64.5 30 14 62 49 50 6.6 M8 x 1.25 Rc(PT) 1/4 76.5 35 19 61.5
Tube bore size B, #2(#2+#3) 40 125, 150, 175, 200, 250, 300 55 14 14 3.8-9 Series CXT Auto Switch Specifications Refer to p.5.3-2 for details on auto switch.
Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to
Single vane type Standard: CRBU2W10, 15, 20, 30, 40-S Parts list Parallel keyway for size 40 No.