Large Size Vacuum Module: Series ZR

ZR1-F-100 to 100 kPa 500 kPa 5 to 50C 30 m PVF Refer to page 949 and 952 regarding pressure switch for vacuum.

Compact Rotary Actuator Series CRQ2

mm apart from the center of rotation, where the load is applied. 100 Load Arm A Displacement CRB2 MSQXB10A MSQXB20A CRBU2 CRB1 MSU 300 CRJ 400 CRA1 Displacement (m) Displacement (m) CRQ2 MSQ 250 MSZ 350 CRQ2X MSQX MRQ 200 300 30 25 20 15 10 5 0 40 30 20 10 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 D100 100 100 80 60 40 20

3

80 100 Fluid temperature [oC] Fluid temperature [oC] PF3W711/511 PF3W721/521 1.2 1.6 Operating pressure/ Proof pressure [MPa] 1.4 1.0 Proof pressure [MPa] 1.2 Pressure [MPa] Pressure [MPa] 0.8 1 0.6 0.8 Operating pressure [MPa] 0.6 0.4 0.4 0.2 0.2 3-Color Display Digital Flow Monitor for Water 0 0 0 90 100 80 70 60 50 40 30 20 10 0 90 100 80 70 60 50 40 30 20 10 Fluid temperature [oC] Fluid

Vacuum Ejector Series ZM

, Standard Supply Pressure: S 0.45 MPa ZL ZM13S ZY Exhaust Characteristics Flow Characteristics ZF 90 180 90 80 160 80 ZP Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Suction flow rate l/min (ANR) Air consumption l/min (ANR) 70 140 70 SP 60 120 60 Air consumption ZCUK 50 100 50 40 40 80 AMJ 30 30 60 AMV 20 20 40 Suction flow rate 10 10 20 AEP 0 0 0 0 25 35 40 30 15 20 10 5

ITV

Count Pressure Characteristics Flow Characteristics Set pressure: 10 kPa 0 1 10 kPa 20 kPa Output deviation factor (% F.S.) 20 0.5 40 kPa Set pressure (kPa) 40 Out 60 kPa 60 0 Return 80 kPa 80 0.5 100 kPa 100 120 100 80 60 40 1 0 1 1.5 0.5 2 2.5 3 3.5 4 20 Flow rate (/min (ANR)) Supply pressure (kPa) 14-8-7 8 Series ITV0 Dimensions For Single Unit 4-6 2-6 PWR ERR PWR L-bracket (Option) ERR

MHL2

182 200 150 198 242 188 246 286 20 40 60 30 60 80 40 80 100 50 100 120 70 120 160 100 160 200 60 10 40 MHC 60 MHT 16 40 MHY 60 MHW 20 40 MRHQ 60 25 Misc. 40 30 D32 20 2030 40 P . 12-4-7 20 Note) The open and close time spans represent the value when the exterior of the workpiece is being held.

MHL2

0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.4MPa 200 200 300 300 0.4MPa 0.4MPa 0.3MPa 150 150 0.3MPa 0.3MPa 200 200 0.3MPa 100 100 0.2MPa 0.2MPa 0.2MPa 0.2MPa 100 100 50 50 0.1MPa 0.1MPa 0.1MPa 0.1MPa 50 100 150 200 50 100 150 200 0 0 40 80 120 160 200 40 80 120 160 200 0 0 Holding point R (mm) Holding point R (mm) Holding point R (mm) Holding point R (mm) 2.2-3 Wide Opening Air Gripper Series MHL2 Example

Series AK1000

40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Air-hydro Unit

40 27 115 100 62 3/4 180.5 124.9 135 CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 Pitch of mounting on the wall is CA and CL

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

85 90 95 100 105 110 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105 110 115 120 125 130 155 180 95 100 105 110 115 120 125 130 135 160 185 100 105 110 115 120 125 130 135 140 165 190 105 110 115 120 125 130 135 140 145 170 195 15D (M) 10D (M) 20D (M) 15D (M) 25D (M) 20D (M) 30D (M) 25D (M) 10 35D (M) 30D (M) 15.5 40D (M) 35D (M) 45D (M)

Compact Cylinder Series CQS

D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 C C' Cylinder model Mounting bolt size Mounting bolt size CQ2 CDQSKB12-5D -10D -15D -20D -25D -30D M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x

Compact Vacuum Unit

/ZB031 Exhaust Characteristics Flow-rate Characteristics (Supply pressure: 51 psi (0.35 MPa)) Suction flow SCFM (L/min (ANR)) Air consumption SCFM (L/min (ANR)) Suction flow SCFM (L/min (ANR)) Air consumption SCFM (L/min (ANR)) 14.5 14.5 0.35 (100) (100) (10) Vacuum pressure psi (kPa) Vacuum pressure psi (kPa) 11.6 Vacuum pressure 11.6 0.28 (80) (80) (8) 8.7 8.7 0.21 Air consumption (60)

REA/REB

Usable range 30 40 50 50 40 30 20 20 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 80 REA63 REA50 50 40 30 REA40 REA32 Load weight W (kg) 20 REA25 10 1 100 200 300 Maximum speed U mm/s 4 Series REA Model Selection 3 Max

Rotary Table/Rack & Pinion Style Series MSQ

m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N 274 Rotary Table/Rack & Pinion Style Series MSQ Table Displacement due to Moment Load (Reference values) 100 Arm The following graphs show the displacement at point A, which is 100 mm apart from the center of rotation, where

Air Slide Table Series MXQ

MXQ12-40 0.02 0.04 0.008 MXQ12-20 MXQ12-10 MXQ12-10 0.01 MXQ12-10 0.02 0.004 0 0 0 20 40 60 80 100 20 40 60 80 100 160 40 80 120 Load (N) Load (N) Load (N) 96 Air Slide Table Series MXQ The graphs below show the table displacement when the static moment load is applied to the table.

MGP

PS 24 27 GR-S-010(10g 14 30 1216 30 1216 30 2025 100 3263 100 15 17-2.

Refrigerated Air Dryers

IDF1E 0.75 Rc3/8 IDF2E 1.5 IDF3E 2.2 IDF4E 3.7 Rc1/2 IDF6E 5.5 Rc3/4 IDF8E 7.5 IDF11E 11 IDF15E1 15 Rc1 IDF22E 22 R1 IDF37E 37 R1 1/2 IDF55E 40C 0.7 MPa 55 R2 IDF75E 75 35C 0.7 MPa Model Rated inlet condition Applicable air compressor [kW] Port size IDF100F 100 R2 IDF125F 125 65 (2 1/2B) Flange IDF150F 150 80 (3B) Flange IDF190D 190 IDF240D 240 100 (4B) Flange IDFlE 40C 0.7 MPa IDF370D 35C

2–4

CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 110 135

JXCx-OMT0023

80 0 0 1 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 -500 2000 60 70 1000 1 Position 5 1000 2000 80 80 0 0 control 6 2000 1000 80 80 0 0 7 1000 1000 80 80 0 0 Position command creation USB I/F CN1 CN3 D I/O con trol Personal Servo-on Start Failure, etc. computer USB Note 1.