Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Output Black lead wire 100 MSD013P1E MSM012P1A 200/230 MR-C10A1 100/115 Mitsubishi Electric Corporation HC-PQ13 100 MR-C10A 200/230 Blue lead wire SGDE-01BP 100 SGME-01BF12 100/115 Yaskawa Electric Corporation SGDE-01AP SGME-01AF12 200/230 H S For motor mounting dimensions, refer to the dimensions for series LJ1 20 on page 143 as a reference for mounting and design.

5 Port Solenoid Valve Series VQZ1000/2000/3000

100 0 Perpendicular, upward actuation Horizontal actuation VQZ VQZ1151-01 SQ VFS 800 700 600 500 400 300 200 100 0 VFR VQZ2151-02 VQ7 900 800 700 600 500 400 300 200 100 0 VQZ3151-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

(x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 40 4 30 3 20 2 10 1 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D 20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating time (s/90) Operating time (s/90) 12-10-7 7 180 Angular Style Air Gripper Cam

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

(x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 40 4 30 3 20 2 10 1 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D 20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating time (s/90) Operating time (s/90) 12-10-7 7 180 Angular Style Air Gripper Cam

MHY2/MHW2

5 Moment of inertia (X10-4 kgm2) Moment of inertia (X10-4 kgm2) 40 4 MHY2 30 3 MHW2 20 2 MRHQ 10 1 Auto switch 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D 20 200 Moment of inertia (X10-4 kgm2) Moment of inertia (X10-4 kgm2) 15 150 10 100 5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating time (s/90) Operating time (s/90) 2.8

LEF-OM002xx

The INP output signal is turned on from 100[mm] 0.5[mm]=99.5[mm] Table Position[mm] c Area2[mm] j Area1[mm] j b Speed[mm/s] 100 0 AREA Output signal ON OFF INP Output conodition INP Output signal ON In pos[mm] k OFF 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] 27 - Example of step data input (2) Positioning operation Relative a b c d e f g h i j k Step data No.

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 7-9-48

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

MRQ Auto Switch Internal Circuit DD-90 20OUT () Weight OUT () Brown Contact protection box CD-P11 CD-P12 Reed switch (g) OUT ( ) D-90 D-97 Auto switch model OUT ( ) Blue Black line 5 5 0.5 Lead wire length (m) 23 23 3 D-97 37 37 5 Contact protection box CD-P12 Choke coil OUT (+) Brown Dimensions OUT (+) Reed switch Zener diode Zener diode D-90 OUT () OUT () Blue Black line Resistor LED

HRX-OM-X010

[-100 to 100 deg C:-10 to 10V] [-100 to 100 deg C:-10 to 10V] 24 ANALOG COM 13 Output EMO signal EMO signal 13 25 Output EMO CIRCUIT 25 *1: The recovery signal can be input only when the circulating fluid automatic collection function (optional) is used, and it does not serve as the DIO REMOTE signal. *2 :Valid if Analog Communication (optional) is provided. *3 :Valid if DI Control Kit (optional

Digital Flow Switch

The response time indicates when the set value is 90% in relation to the step input.

PFxx-OMY0005

(Displays 0 when the value is below 80 L/min) 180 to 2100 L/min 90 to 1050 L/min (Displays 0 when the value is below 180 L/min) 9.0 0 to 9%F.S. (Displays 0 when the value is below 90 L/min) 200 to 2100 L/min 100 to 1050 L/min (Displays 0 when the value is below 200 L/min) 10.0 0 to 10%F.S.

Modular F.R.L. Unit

90 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 G 27 40 54 54 66 66 E 47 47 R 35 60 80 110 110 110 110 F 30 41 50 50 70 70 P 28 57 73 73 D 25 40 53 70 70 90 95 C 26 36 38 40 38 41 45 A B 77 115 142 176 176 250 268 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142 176 176 250

Electric Actuator with Integrated Guide

point distance mm LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% 1000 Load 50% 10 Amount of deflection m Amount of deflection m 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 100 1000 Load point distance mm Load point distance mm w w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

MGP

175, 200 M14 X 2.0 141 91 111.5 19 18 240 M14 10.5 12.5 20 32.5 WA WB Bore (mm) Standard stroke (mm) Q R S T U VA VB X YY YL Z 100 to 175st 50,75st 200st 100 to 175st 50,75st 200st 100 124 52 64 52 72 128 148 200 220 54 47 92 85 128 121 174 210 75 90 140 166 M12 X 1.75 M14 X 2.0 24 28 28 11 198 236 156 188 180 210 80 100 50, 75, 100, 125, 150, 175, 200 MGPL(Ball Bushing Bearing)/Dimensions

180

of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 MHY MHY 40 4 30 MHW MHW 3 20 -X 2 10 1 MRHQ 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 MA Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D D20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating time (s/90) Operating time (s/90) 703

180° Angular Style Air Gripper Series MHY2/MHW2

inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 40 MHC 4 30 3 MHT 20 2 MHY 10 1 MHW 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 Operating time (s/90) Operating time (s/90) -X MHY2-25D MHW2-40D 20 200 MRHQ Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 MA 10 100 D5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating time (s/90) Operating time (s/90) 661 180

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

220 230 AH 4 x AB AT E1 TR AO SA + Stroke AO Rod flange (F) 4 x FB [mm] Bore size [mm] R TF FB E2 UF W MF 32 32 64 7 50 79 16 10 40 36 72 9 55 90 20 10 50 45 90 9 70 110 25 12 63 50 100 9 80 120 25 12 80 63 126 12 100 153 30 16 100 75 150 14 120 178 35 16 R E2 W MF UF TF Head flange (G) [mm] Bore size [mm] MF ZF 32 10 130 40 10 145 50 12 155 63 12 170 80 16 190 100 16 205 ZF + Stroke MF Single

VEX1

1 2 B SGP B 1 2 E AS420 AN400 90 elbow F G AS500 AN500 AN600 SGP B 90 elbow 90 elbow 90 elbow VEX350 3 4 SGP1B SGP1B AS600 VEX30 Port VEX31 VEX32 External pilot External pilot H AS600 AN600 I VEX370 External pilot Pilot exhaust Pilot exhaust SGP1 B 90 elbow 90 elbow 90 elbow 1 4 SGP1 B SGP2B AS700 AS800 AS900 AN700 AN800 AN900 P1 Plug 1 2 J VEX390 K P2 Nylon tube No.