AC Servo Motor Driver

50 20 Vibration suppression control vibration frequency setting 50 60 50 Vibration suppression control resonance frequency setting 50 60 50 8 15 8.

Series IDG

0.7MPa 20 20 30 30 40 40 50 50 600 0 200 400 800 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet

ITV

Set point 20 0.5 30 Set pressure (kPa) 40 0 50 60 0.5 70 80 90 1.0 50 100 150 100 80 60 40 20 VAC. side pressure (Supply pressure) (kPa) Flow rate (L/min(ANR)) 845 Series ITV209 Dimensions Note) Do not attempt to rotate the cable connector, as it does not turn.

CG5-S

10 M10 x 1.25 24 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 35.5 1/8 to 300 40 10 M14 x 1.5 24 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 44 1/8 to 500 50 14 M18 x 1.5 40 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 55 1/4 to 600 63 14 M18 x 1.5 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 69 1/4 to 600 80 22 M22 x 1.5 60 40 37 32 50 75 25 28 20

HRX-OM-Z002

. 9-1 9.1.2 HRLE090-A-20. 9-2 9.1.3 HRLE050-W-20. 9-3 9.1.4 HRLE090-W-20. 9-4 9.1.5 HRLE090-A-40. 9-5 9.1.6 HRLE090-W-40. 9-6 9.2 REFRIGERANT AND GWP VALUE . 9-7 9.3 DIMENSIONS . 9-8 9.3.1 HRLE050-A-20. 9-8 9.3.2 HRLE050-W-20. 9-9 9.3.3 HRLE090-A-20/40. 9-10 9.3.4 HRLE090-W-20/40. 9-11 9.4 FLOW DIAGRAM . 9-12 9.4.1 HRLE050-A-20-*,HRLE090-A-20/40. 9-12 9.4.2 HRLE050-W-20-*,HRLE090-W-20/40.

Digital Flow Switches

, 551 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 q w e r w t w e Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Parts

ISO Standard Hydraulic Cylinder

11 57 248 30 18 53 33 1/2 191 67 +0.052 0 63 50 29 25 to 800 90 64.3 M27 x 2 80 12 M12 x 1.25 20 13 36 36 30 32 32 136 39 13 55 265 30 17 68 33 1/2 200 71 80 60 34 25 to 800 115 82.7 M33 x 2 93 15 M16 x 1.5 28 9 45 45 41 39 41 159 46 17 66 308 40 20 76 40 3/4 229 77 168 +0.062 0 100 72 50 130 96.9 M42 x 2 101 15 M16 x 1.5 25 to 1000 36 10 56 56 50 54 52 47 19 67 363 50 20 91 40 3/4 257 82

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

A B C D E EE F G H J K Applicable size Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 JSXM20 Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 JSXM30 Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 JSXM40 45 JSX10, 20, 30 Series Table of UL-compliant Products * Refer to the table below for UL-compliant products.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Cylinder Speed Chart Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm 20 25 32 40 40 50 63 80 100 125 140 160 Average speed (mm/s) System 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation A 800 700 600 500 400 300

CQM

Mounting Bolt for CQM/Without Auto Switch Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt CQMB12-5 -10 -15 -20 -25 -30 CQMB16-5 -10 -15 -20 -25 -30 CQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB32-5 -10 -15 -20 -25

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Mounting same side MG D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 MGP 15+45( n2 ) (n=2, 4, 6) 2 60+45(n2) 60 15 10 MGQ 15+50( n2 ) (n=2, 4, 6) MGG 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 MGC 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL MGF 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 MGZ D-B59W 75 20 D-A3A D-G39A D-K39A D-A44A CY 10 100

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.

Compressed Air Cleaning Filter Series

Q 26 R 4.5 S 1.6 AMG150C AMG250C AMG350C AMG450C AMG550C 10 99 63 20 63 10 1/8, 1/4 158 14 113 76 20 76 10 190 66 24 8 6 6 12 6 10 40 66 80 28 5 2 1/4, 3/8 172 18 145 90 20 90 10 222 80 28 8 7 7 14 7 12 50 80 95 34 5 2.3 3/8, 1/2 204 20 166 106 20 106 10 246 90 31 10 9 9 18 9 15 55 88 111 50 9 3.2 1/2, 3/4 225 24 200 122 20 122 15 278 100 33 10 9 9 18 9 15 65 102 126 60 10 3.2 3/4, 1 259

CV/MVGQ

(n 2) 2 n = 4, 8, 12, 16 90 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 (n 4) 2 n = 4, 8, 12, 16, 110 + 50 (n 4) 2 Different sides n 75 + 50 (n2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n2) n = 2, 4, 6, 8 Same side 1 90 100 110 20 90 100 110 75 90 100 110 10 Different sides 2 Same side n = 2, 4, 6, 8 20 + 50 (n 2) 2 n = 4, 8, 12, 16 90 + 50 (n

Refrigerated Thermo-chiller

-L 1.2 1.1 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0 0.9 70 50 [Outlet port: 60 Hz] 0.8 60 [Outlet port: 60 Hz] 0.7 40 50 [Outlet port: 50 Hz] 0.6 [Outlet port: 50 Hz] 40 30 0.5 0.4 30 20 0.3 20 0.2 10 [Return port] 10 [Return port] 0.1 0 0 0 0 10 20 30 40 Lifting height (m) Pressure (MPa) 0 10 20 30 40 Lifting height (m) Pressure (MPa) Circulating fluid flow (l/min) Circulating fluid flow

CG1

TB C-12 type for pivot TT TR Td TE TF TH C-14 type for pivot (29.3) (33.1) (40.4) (49.2) (60.4) (74.6) 28-01 3.2 3.2 4.5 4.5 6 8 11 12 13 15 17 21 24 26 36 50 36 43 50 58 70 82 73 90 8 10 12 14 16 18 18 22 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 11 13.5 25 30 35 40 50 60 55 65 CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 20 25 32 40 50 63 80 100

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Mounting same side MGC D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 15+45( n2 ) (n=2, 4, 6) MGF 2 60+45(n2) 60 15 10 CY1 15+50( n2 ) (n=2, 4, 6) MY1 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 75 20 D-B59W D-A3A D-G39A D-K39A D-A44A 10 100+100(n2) 35+30

HRX-OM-M090

HRS 10 A 012 Cooling capacity Option 012 1100W/1300W (50/60Hz) Null None 1500W/1700W(50/60Hz)(1) 018 1700W/1900W (50/60Hz)(2) B Earth leakage breaker 024 2100W/2400W (50/60Hz)(3) G High temperature type(4) 1 Power supply-10(100V Type) 2 Power supply-20(200V Type) 3 Power supplyOnly -20(200V Type)can be chosen.

C76

(mm) Item h 1 to 50 77 88 AM C e f K KK Stroke Bore 51 to 100 101 to 150 102 113 151 to 200 115 126 201 to 300 140 151 301 to 400 165 176 401 to 500 190 201 32 40 90 101 12 14 35 46 30 35 10 12 M10 x 1.5 M12 x 1.75 20 24 Item I Wh Bore Stroke 1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125 1 to 50 57 64 51 to