, 100 54 M6 x 1.0 42 12 12(11.8) 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 30 10 to 50, 75, 100 60.5 M6 x 1.0 48.5 13 16(15.8) 52 8.5 M8 x 1.25 7 69 5 14 12 40 5.5 9 26 10 57 10 40 10 to 50, 75, 100 62 M8 x 1.25 50 13 16(15.8) 64 12 M8 x 1.25 8 86 7 14 12 50 6.6 11 26 14 71 10 Note) Figures in ( ) are the dimensions for applying a wrench.
(NA) (NA) Q + Stroke (mm) d Bore size (mm) Standard stroke (mm) A PA P Note) (N) (NA) PB PW Q E G GP H HG HN HP HT L F Slide Ball bushing 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 1/8 70 120 160 121 40 25, 50, 75, 100 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 1/8 90 140 190 159 CX2 PA dimension is the center sorted factor of the L dimension
(NA) (NA) Q + Stroke Data d Bore size (mm) Standard stroke (mm) A PA (N) (NA) PB PW Q E F G GP H HG HN HP HT L Slide Ball bushing 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 100 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 PA dimension is the center sorted factor of the L dimension.
OUT IN Theoretical Output Table Unit: lbs Bore size (in) Operating direction Operating pressure/PSI (MPa) 45 (0.3) 75 (0.5) 145 (1.0) 200 (1.4) IN 8.87 14.6 28.6 39.2 056 (9/16") OUT 11.1 18.2 35.7 48.9 IN 16.4 27.0 52.9 72.5 075 (3/4") OUT 19.9 32.7 64.1 87.8 IN 30.8 50.8 99.5 136 106 (1-1/16") OUT 39.7 65.3 128 175 IN 65.7 108 212 290 150 (1-1/2") OUT 79.5 131 256 351 IN 121 200 391 536
, 50 75, 100, 125, 150, 175, 200, 250, 300 300 Other intermediate strokes can be manufactured upon receipt of order.
MM NC 7.5Depth4.5 9Depth5.5 10.5Depth6.5 13.5Depth8.5 17Depth10.5 NS 43 45 44 54 53 Model MUB25 MUB32 MUB40 MUB50 MUB63 KA 10 12 14 18 18 N 14 15.5 16 21.5 21.5 ND M5 X 0.8 M6 X 1 M8 X 1.25 M10 X 1.5 NE 4.3 5.1 6.9 8.7 10.5 S 55 58 60 74 75 ZZ 69 72 75 92 96 M10 X 1.25 M8 X 1.25Depth13 M12 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M8 X 1.25Depth13 M10 X 1.5Depth15 M10 X 1.5Depth15 M12 X 1.75 2.4
Body Bottom Tapped [mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 50 to 74 24 50 44 65 M8 x 1.25 10 6 7 75 to 124 45 60.5 125 to 200 58 67 201 to 500 86 81 100 501 to 800 135 63 38 503 LEY Series AC Servo Motor Dust-tight/Water-jet-proof (IP65 Equivalent) * Select options Dimensions: Motor Top/Parallel Motor left side parallel type: LEY63L Motor right side parallel type: LEY63R S1
45 3 3 5.3 5.3 250.2 250.2 16 32 2-M3 x 0.5 through 6.5 counter bore depth 5 (Same on the opposite side) 3.4 through 3 3 45 45 5.5 M2.5 x 0.45 x 6L (Cap screw) M3 x 0.5 x 12.5L (Hexagon bolt) and M3 x 0.5 (Hexagon nut) 2-M3 x 0.5 through Steel ball Plug 2-M3 x 0.5 through 2.75 (11) (10+ST) 250.2 4 Part no.
, 100 30, 40, 50, 75, 100 40, 50, 75, 100 RQ MU DManufacture of Intermediate Stroke -X Description Part no.
or less 47 or less Metal seal VQC4300 Closed center VQC4000 7.0 6.4 0.34 1.9 0.42 1.9 50 or less 52 or less 3-position pressure center Rubber seal VQC4301 (A) 4 (B) 2 6.2 6.9 0.18 1.5 0.17 1.7 45 or less 47 or less Metal seal VQC4400 Exhaust center 280 7.0 7.3 0.38 1.9 0.38 2.0 50 or less 52 or less Rubber seal VQC4401 6.2 6.4 0.18 1.9 0.18 1.6 45 or less 47 or less Metal seal VQC4500 Pressure
50 63 75 90 115 16 20 25 25 30 35 45 60 12,5 12 15 16 20,5 20,5 20 20 130 145 155 170 190 205 245 280 7 9 9 9 12 14 16 18 10 12 12 16 16 20 25 30 65 75 80 90 110 140 164 204 15 18 18 23 23 28 30 35 142 160 170 190 210 230 275 315 45 52 60 70 90 110 130 170 26 28 32 40 50 60 70 90 26 28 32 40 50 60 69,5 89,5 9 12 12 16 16 20 25 30 32 36 45 50 63 75 90 115 10 11 12 13 15 18 15 20 3,2 3,2 3,2
or less 47 or less Closed center VQC4000 7.0 Rubber seal VQC4301 6.4 0.34 1.9 0.42 1.9 50 or less 52 or less 3-position pressure center (A) 4 (B) 2 6.2 Metal seal VQC4400 6.9 0.18 1.5 0.17 1.7 45 or less 47 or less 280 (0.62) Exhaust center 7.0 Rubber seal VQC4401 7.3 0.38 1.9 0.38 2.0 50 or less 52 or less 6.2 Metal seal VQC4500 6.4 0.18 1.9 0.18 1.6 45 or less 47 or less Pressure center
9 0.5 to 45 0.5 to 45 9 0.5 to 45 0.5 to 45 9 0.5 to 45 Particle filter filtration accuracy (Accessory) m 5 5 5 5 5 5 CH1 : Rc1 (Symbol FG1,Symbol NNPT1) Circulating fluid outlet, Circulating fluid return port14 CH2 : Rc1/2 (Symbol FG1/2,Symbol NNPT1/2) Tank drain port14 CH1 : Rc3/4 (Symbol FG3/4,Symbol NNPT3/4 CH2 : Rc1/2 (Symbol FG1/2,Symbol NNPT1/2 CH1 : Stainless steel, Copper (Brazing
Theoretical Output OUT IN [N] Bore size [mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 12 6 OUT 113 23 34 45 57 68 79 90 102 113 IN 85 17 25 34 42 51 59 68 76 85 16 8 OUT 201 40 60 80 101 121 141 161 181 201 IN 151 30 45 60 75 90 106 121 136 151 20 10 OUT 314 63 94 126 157 188 220 251 283 314 IN 236 47 71 94 118 141 165
15%, Deionized water Operating temperature range1 oC 5 to 35 Cooling capacity 50/60Hz 3 kW 9.0 / 10.5 Heating capacity4 kW 1.7 / 2.2 Temperature stability5 oC 0.5 Rated flow rate 50/60Hz (Outlet) 6 L/min 29 / 45 Pump capacity Maximum flow rate 50/60Hz L/min 55 / 68 Circulating fluid system Maximum lifting height m 50 Minimum operating flow rate 50/60Hz 7 L/min 29 / 45 Tank capacity L 18
30, 50 75, 100 30, 50, 75 100, 125, 150 50, 75 50, 100 50, 100 150 16 3 25 9 25 5 Miniature Rotary Table Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC) Rod type Slide table type Series LEPS Basic type Series LER High precision type Series LEPY Series LERH CAT.ES100-94 CAT.ES100-92 Series LER Series LEPY Series LEPS Max. speed (/s) Rotating torque (Nm) Size Size Max. work load (kg) Stroke
OUT IN Theoretical Output Table Unit:lbf Bore size (in) Operating direction Operating pressure/PSI (MPa) 45(0.3) 75(0.5) 145(1.0) 200(1.4) IN 8.87 14.6 28.6 39.2 056(9/16") OUT 11.1 18.2 35.7 48.9 IN 16.4 27.0 52.9 72.5 075(3/4") OUT 19.9 32.7 64.1 87.8 IN 30.8 50.8 99.5 136 106(1 1/16") OUT 39.7 65.3 128 175 IN 65.7 108 212 290 150(1 1/2") OUT 79.5 131 256 351 IN 121 200 391 536 200(2")
(mm) Stations Symbol 7 180 192 197 8 5 138 150 155 6 159 171 176 3 96 108 113 4 117 129 134 1 54 66 71 2 75 87 92 L1 33 45 50 L2 L3 900 Ejector System Series ZX Vacuum Module: ZA Circuit diagram ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ + + + + AMV AEP Vacuum port (V) M5 (or M6) HEP Related Equipment 10.7 V V 22.5 21 4.2 901 Vacuum Module: Vacuum Pump System Series ZX [Option] How
(PD port) Common EXH port Pitch = 21 M5 (or M6) Individual vacuum supply port (PV port) Common vacuum supply port (PV port) Common supply port for vacuum switch valve (PS port) Stations (mm) 8 7 180 192 197 6 159 171 176 5 138 150 155 4 117 129 134 3 96 108 113 2 75 87 92 1 54 66 71 Symbol L1 33 45 50 L2 L3 13-2-56 56 Vacuum Module: Vacuum Pump System Series ZX (In the case of individual
, 60, 75, 90 105, 120, 135 TURCK, P&F Aluminum body with reduced weight (40) Power Clamp Cylinder/CKZ2N Equivalent bore size [mm] Body material Port Arm opening angle Switch 50, 63, 80 Iron NPT, G 30, 45, 60, 75, 90 105, 120, 135 TURCK, P&F NAAMS Standards compliant Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use. 2017