Modular F.R.L. Units

500 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-A AFD40-A P1=0.5 MPa P1=0.3 MPa 0.04 0.04 P1=0.7 MPa P1=0.3 MPa P1=0.7 MPa P1=0.5 MPa 0.03 0.03 Pressure drop [MPa] Pressure drop [MPa] 0.02 0.02 P1=0.5 MPa P1=0.5 MPa P1=0.3 MPa P1=0.3 MPa P1=0.7 MPa 0.01 0.01 P1=0.7 MPa 0 0 0 0 100 200 300 500 400 600 200 800 1000 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 57

4-channel Flow Monitor ( compatible)

(page 72) Y S16 0x012C 3 R/W (300) P1H (Upper limit of the OUT1 window comparator) Setting of OUT1 upper limit of window comparator. (page 72) 0x04C4 (1220) 0x04C5 (1221) 0x04C6 (1222) 0x04C7 (1223) Y S16 0x0258 4 R/W (600) WH1 (Setting of OUT1 window comparator hysteresis) Setting of OUT1 window comparator hysteresis.

Compact Guide Cylinder

Theoretical Output OUT IN [N] Bore size [mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 12 6 OUT 113 23 34 45 57 68 79 90 102 113 IN 85 17 25 34 42 51 59 68 76 85 16 8 OUT 201 40 60 80 101 121 141 161 181 201 IN 151 30 45 60 75 90 106 121 136 151 20 10 OUT 314 63 94 126 157 188 220 251 283 314 IN 236 47 71 94 118 141 165

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

70 30 40 50 60 30 60 70 50 40 20 Point of application L (mm) Point of application L (mm) RS H A RZQ MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 MI W S 200 320 0.7 MPa 500 CEP1 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300

MQQ

Series Variations Series MQQ Compact low friction cylinders designed for low pressure, low speed, uniform speed or low friction applications Stroke (mm) Operating pressure range (MPa) 10 20 Actuation speed (mm/s) Series Bore size (mm) 30 40 50 60 75 100 10 16 20 25 28 MQQT Standard type 0.3 to 300 0.005 to 0.5 0.5 to 500 MQQL Lateral load resisting type (built-in ball bushing) 0.005 to 0.7

3 Port Air Operated Valve Series SYJA300 1

Free 300/50 VPA342: VP300-27-1A VPA542: VP500-27-1A VPA742: VP700-27-1A Bracket (With screw) Option N.C. N.O. Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

or less 180 or less 0.8 1.4 100 90 20 14 13.2 Response time (1) (ms) VFN Max. operating frequency (c.p.m.) (2) DC AC DC AC 1.6 2.4 300 360 50 60 24 Weight (kg) 50 Hz Apparent power (VA) Inrush 60 Hz AC 50 Hz Holding 60 Hz Power consumption (W) DC Note 1) Based on JIS B 8375-1981.

Multistage Ejector (N)ZL Series

pressure switch Vacuum pressure gauge Exhaust port With valve Vacuum adapter ZSE4E ZSE4B ZSE4 Series With supply valve/ release valve With supply valve Built-in silencer Port exhaust 100 (3.5) 63 (2.2) (N)ZL112 200 (7.0) 126 (4.4) (N)ZL212 2 Multistage Ejector Series (N)ZL Selection ZL112 ZL212 Exhaust characteristics Exhaust characteristics 100 90 100 90 Vacuum pressure Vacuum pressure 300

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

+ 55 n: Stations (max. 16 stations) L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 191.5 231 262.5 273 16 L1 L2 (L3 ) (L4 ) 26.5 66 87.5 98 37.5 77 100 110.5 48.5 88 112.5 123 59.5 99 125 135.5 70.5 110 137.5 148 81.5 121 150 160.5 92.5 132 162.5 173 103.5 143 162.5 173 114.5 154 175 185.5 125.5 165 187.5 198 136.5 176 200 210.5 147.5 187 212.5 223 158.5 198 225 235.5 169.5 209 237.5 248 180.5 220

AC Servo Motor Driver (MECHATROLINK-II type)

Line Receiver Circuit Example DRIVE PC or PLC ... etc Applicable line receiver: SN75ALS175 or the equivalent 220 to 470 16 - 2.4 Wiring for Safety cable (1) Connection Example for input signals The input signals must be redundant. DRIVER For safety function signal connections, the input signal is the 0 V common and the output signal is the source output.

AC Servo Motor Driver (MECHATROLINK-III type)

Line Receiver Circuit Example DRIVE PC or PLC ... etc Applicable line receiver: SN75ALS175 or the equivalent 220 to 470 16 - 2.4 Wiring for Safety cable (1) Connection Example for input signals The input signals must be redundant. DRIVER For safety function signal connections, the input signal is the 0 V common and the output signal is the source output.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Flow Switch Flow Rate Variations Rated flow range [L/min] Series Detection method Applicable fluid 1 2 3 3 2 1 0.5 0 0.5 PFMV 0 0.5 0 1 Thermal type (MEMS) 0 3 Dry air N2 0.5 0.5 1 1 3 3 Rated flow range [L/min] Series Smallest settable increment Detection method Applicable fluid Compatibility with the PFG300 digital flow monitor 0.01 0.02 0.05 1 2 0.1 0.3 0.5 5 10 20 25 50 100 150 200 300

Compact

Auto Switch Proper Mounting Position Auto Switch Mounting Height Operating Range Auto Switch Mounting Groove Position Auto Switch Mounting 25 12 OUT 491 98 147 196 245 295 344 IN 378 76 113 151 189 227 264 Weight [g] Bore size [mm] Standard stroke [mm] 5 10 15 20 25 30 35 40 45 50 12 105 114 124 132 142 152 16 126 136 146 156 166 175 20 195 211 225 239 255 270 285 300 314 329 25 284 304

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Clip type Quick change coils Clip design makes coil replacement easy (2 port) Improved corrosion resistance Special material introduced Threaded assembly Simplifies maintenance Brass/Stainless steel manifolds added to series (2 port) High flow rate: Cv factor 0.03 to 0.44 (2 port) Universal porting VDW200/300 (3 port) Bottom mounting threads Mounting bracket also available Series of compact

Cylinder (Tube) Inner Diameter(φ): 300, Stroke(mm): 220, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: Presence, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.05 to 0.97, Port thread type: G, Auto Switches:

•

I"P.1/4, .. . , ASP530F-N03-11 S 3/S' ~ 25.9 1 51Jtr 11 / 16" 28.6 ~6~5 ~ 61 ;a.: ~:B-.9 :2D.S 220 tU6' /36,3 . 34:7 .26~ 21.7 . . ~ A efertlllCe dll'l'lerlSlons 1 01 NPT Ihmads aller installalion 3 Speed Controller 5 . ASP w"" P;lo' Ch.,k V,'v. efles Construction Parts list .QesCr;plian ' ''' fi1t~lal , . . .

Compact Hydraulic Cylinder

9810 2803 OUT 5026 7539 10052 12565 15078 17591 5026 80 25 IN 4535 6802 9070 11337 13605 15872 4535 OUT 7853 11779 15706 19632 23559 27485 7853 100 30 IN 7147 10720 14294 17867 21441 25014 7147 Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Weight Unit: g Male thread additional weight 5 Cylinder stroke (mm) Bore size (mm) 10 15 20 25 30 35 40 45 50 75 100 20 32 40 50 180 200 220

NCA1

18 221-230 19 None 5.00 Side-Tapped, Head or Cap Flange, Tie-Rod, Center or Side Lug 231-240 20 241-250 21 251-260 22 261-270 23 271-280 24 281-290 25 291-300 26 301-310 27 Pivoted and Rigidly Guided Head Trunnion 1.00 Stop Tubes are used for reducing piston and bearing loads on to prevent buckling and jack-knifing of horizontally installed long push stroke cylinders when the piston rod

IDUS/IDFS

1 Air Dryer Stainless Steel Heat Exchanger Type Series IDUS/IDFS (220/240VAC 50Hz) The models IDF1E to 11E and IDU3E to 6E have been revised. For details, refer to catalog no. ES30-8A. Similar updating for other IDF/IDU models is scheduled to follow shortly.

Compact Cylinder with Air Cushion

If operated beyond the limiting ranges, excessive impact will occur and this may cause damage to equipment. 100 Lateral load F (N) 80 10 63 50 40 32 25 Operating pressure 0.5MPa Operating pressure 0.4MPa Graph 1 20 1 10 100 300 1000 Stroke + Eccentric distance (mm) Cushion Needle Adjustment 100 Caution 100 Load weight kg 80 1.