PFxx-OMY0005

(Displays 0 when the value is below 90 L/min) 200 to 2100 L/min 100 to 1050 L/min (Displays 0 when the value is below 200 L/min) 10.0 0 to 10%F.S. (Displays 0 when the value is below 100 L/min) : The zero-cut range of the accumulated value and accumulated pulse value should be 1%F.S. or more.

HEC_W-E

Table 3-1 Quality standard for fresh water (tap water) Item Standard value pH25oC 6.5 to 8.2 Electric conductivity (25oC) (S/cm) 100 to 800 Chloride ion (mgCl-/L) 200 or less 2-/L) 200 or less Sulphate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) 100 or less Total hardness (mgCaCO3/L) 200 or less Calcium hardness (mgCaCO3/L) 150 or less Quality item Ion silica (mgSiO2/L) 50 or less Iron

MGC

44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 25 38 80 60 MGP 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 32 46 95 70 75, 100 125, 150 200, 250 300 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 32 50 105 80 MGQ 70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 38 60 125 95 45 194 42 M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG Bore (mm) Z Y X W

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

320 0.7 MPa 500 CEP1 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point

Escapements Series MIW/MIS

320 0.7 MPa 500 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa 300 0.2 MPa 160 80 120 200 80 40 100 40 40 120 100 80 60 180 140 100 60 240 200 160 120 80 Point of application L (mm) Point of application L (mm) Point of application

VCL

Voltage 1 2 3 4 36 100 VAC 200 VAC 110 VAC 220 VAC 230 VAC Electrical entry G C T TL Grommet Conduit Conduit terminal Conduit terminal with indicator light Clip part no. Note) Indicate the valve model no. as a label will be attached to the clip.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

320 0.7 MPa 500 CEP1 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point

Compact Cylinder with Air Cushion and Lock Series RLQ

Lead-wire length (m) 0.5 (Nil) Rail mounting 32 to 63 Direct mount 32 to 63 Load voltage Indicator Electrical entry direction Wiring (output) Pre-wired connector 3 (L) 5 (Z) Applicable load None (N) Type Special function DC AC Perpendicular In-line Perpendicular In-line 3-wire (NPN equiv.) 5 V IC circuit A96 A96V A76H Reed switch Grommet 200 V A93 F9N F9P F9B F9NW F9PW F9BW F9BA A93V

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators Action Double acting Operating pressure 0.15 to 0.7 MPa Proof pressure 1.05 MPa 10 to 60C (No freezing) Ambient and fluid temperature 50 to 300 mm/s (Adjuster option/Metal stopper: 50 to 200 mm/s) Piston speed Rubber bumper (Standard, Adjuster option/Rubber stopper) None (Adjuster option/Metal stopper) Cushion Non-lube Lubrication +1 0 mm Stroke

RLQ

Lead-wire length (m) 0.5 (Nil) Rail mounting 32 to 6 Direct mounting 32 to 63 Load voltage Indicator light Electrical entry direction Wiring (output) Special function Pre-wired connector Applicable load None (N) Type 3 (L) 5 (Z) DC AC Perpendicular In-line Perpendicular In-line 3-wire (NPN equiv.) 5 V A96 A96V A76H IC circuit Reed switch Grommet 200 V A72 A73 A73C A79W F7NV F7PV F7BV J79C

The seven sizes are 10, 20, 30, 50, 70, 100, and 200 with rotational adjustments from 0-190 degrees, and auto switch capability. Additional features include a hollow shaft and direct load mounting possibility.

The seven sizes are 10, 20, 30, 50, 70, 100, and 200 with rotational adjustments from 0-190 degrees, and auto switch capability. Additional features include a hollow shaft and direct load mounting possibility.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Weight Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 LEKFS25 Product weight[kg] 1.7 1.8 2.0 2.1 2.3 2.4 2.5 2.6 2.8 2.9 3.2 3.5 3.8 0.26 Additional weight with lock[kg] LEKFS32 Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 Product weight[kg] 3.6 3.8 4.0 4.2 4.5 4.7 4.9 5.1 5.3 5.5 5.9 6.3 6.7 7.1 7.5 0.53 Additional weight with lock[kg

/

DC Specification Temperature increase (C) Note) Power consumption (W) (Holding) 24 VDC 0.19 0.29 0.44 Inrush current (A) (Inrush time: 200 ms) Model 12 VDC 0.38 0.58 0.88 25 25 30 1.5 2.3 3 VXE21 VXE22 VXE23 Note) Value for ambient temperature at 20C and when the rated voltage is applied.

HAW

AD Accessory (Option) GD Applicable model HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Screw flange (With companion flange) HAWF-141 HAWF-142 HAWF-200 HAWF-200 Auto drain AD402-04 AD600-06 AD600-10 Model Selection (Flow Capacity l/min (ANR)) JIS Symbol Model HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 50C 2000 6000 12000 12000 12000 18000 1000 70C 100C 180C Inlet air temperature

Series HAW Water Cooled Aftercooler 1

HA Accessory (Option) AT HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Applicable model Screw flange (With companion flange) HAWF-141 HAWF-142 HAWF-200 HAWF-200 ID Auto-drain AD402-04 AD600-06 AD600-10 AMG Model Selection (Flow Capacity l/min (ANR)) AFF HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model 1000 70C 100C 180C 50C 2000 6000 12000 15000 22000 30 Inlet air temperature

PFxx-OMX0007

(Displays 0 when the value is (Displays 0 when the value is below 90 L/min) below 180 L/min) 100 to 1050 L/min 200 to 2100 L/min 10.0 0 to 10%F.S. (Displays 0 when the value is (Displays 0 when the value is below 100 L/min) below 200 L/min) : The zero-cut range of the accumulated value and accumulated pulse value should be 1% F.S. or more.

VCS

Thread type Rc NPT G Nil N F OUT(2) 1 IN(1) Port size Voltage Port size 1/8 (6A) Class 3 Class 2 Class 4 Symbol 01 02 03 04 06 1 2 3 4 36 100 VAC 200 VAC 110 VAC 220 VAC 230 VAC 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Please consult with SMC regarding other voltages.

VNH

Gasket material A B NBR seals FKM seals Rated voltage Nil Air operated 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Valve size Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 8 1 2 3 4 Rc Rc Rc Rc1 10A 15A 20A 25A 1 2 3 4 4

ATX-OM-F003E

Table 2 Facility water system Circulating type Transient type Item Circulating fluid Filling of circulating fluid Transient fluid pH [25C] 6.5 to 8.2 6.0 to 8.0 6.8 to8.0 Electrical conductivity (mS/m) [25C] 80 or less 30 or less 40 or less Standard items Chloride ions (mg/L) 200 or less 50 or less 50 or less Sulfuric acid ions (mg/L) 200 or less 50 or less 50 or less Acid consumption [pH4.8