CG1

Standard stroke range (mm) Long stroke range (mm) Bore (mm) TC GB GA F E AL TB C D B1 ZZ A H H1 I J K KA MM NA P S TA WA WB W WH 30 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 14 11 11 20 25 32 40 50 63 80 100 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 10 (12) 35 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 M4 X 0.7 Depth 7 5 6 8 10 14 18 18

Fluoropolymer Piping Equipment

E E H L L M Min. port size W M H LQ3U1A 1/8" 10 9 11 46.5 44.5 14 2 10 LQ3U2A 1/4" 17 16 16 57 55 20 4 14 LQ3U3A 3/8" 22.5 19.5 21 79 73 25 6.4 18 LQ3U4A 1/2" 24.5 22.5 24 88 84 29 9.5 22 LQ3U5A 3/4" 26.5 24 32 103 98 37 16 30 LQ3U6A 1" 30 26 41 122 113.5 49 22 36 LQ3U7A 1 1/4" 35 35 50 142 142 64 28.5 46 LQ3U8A 1 1/2" 39 60 152 77 36 55 Class 7, 8 924 A Union Reducing LQ3 Series How to

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

VQ4 Electrical entry Body (Pilot exhaust) T: Conduit terminal D, Y: DIN terminal G: Grommet E: Grommet terminal 20: Individual EXH VQ5 VQC VQZ SQ Coil rated voltage 30: Common EXH 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) 9 Other 3 2 1 VFS 4 VFR 6 5 VQ7 7 Option Manifold only How to Order Pilot Valve Assembly Applicable

Metal Seal/Rubber Seal Series VQ Body Ported

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

Rotary Actuator/Vane Style Series CRB2

assembly 9 10 19 25 9 10 19 25 Auto switch unit + 2 switches 30 30 50 60 46.5 46.5 30 30 50 60 Angle adjuster 30 47 90 150 203 203 30 47 90 150 49 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Escapements Series MIW/MIS

MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0803-10 MI-A0803-20 MI-A1203-10 MI-A1203-20 MI-A1203-30 MI-A2003-10 MI-A2003-20 MI-A2003-30 MI-A2503-30 MI-A2503-50 MI-A3203-30 MI-A3203-50 e (1 pc.) @0 MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001

HRX-OM-X071

Sensitivity (High pump head Rated current voltage x size of leak current [Optional]) (A) [mA] 3 cores x12AWG 1-phase (3 cores x HRR050-A/W-2020 200-230V AC 3.5mm2) (50/60Hz) (including ground) 30 4 cores 3-phase x14AWG 380-415V AC(50/60Hz) (4 cores x HRR050-A/W-4010 2.0mm2) 460-480V AC(60Hz) (including ground) Installation/operation in accordance with the UL standard For operate the product

SMC Pneumatic Clean Series

20 30 32 2 2 14<12> 14<12> 58 58 218 218 80 40 37 32 50 25 40 3 20<17> 71 13 89 M10 x 1.5 depth 22 10 22 M22 x 1.5 80 3/8 10 122 10 20 264 100 40 37 41 60 30 50 3 20<17> 71 16 110 M12 x 1.75 depth 22 10 26 M26 x 1.5 100 1/2 10 122 10 20 264 50 35 32 63 35 32 11 11 58 72 10 10 23 20 M18 x 1.5 M18 x 1.5 55 69 1/4 1/4 10 10 102 102 7 7 18 18 M8 x 1.25 depth 16 M10 x 1.5 depth 16 Note) < >:

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

MTS

W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.1 0.01 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3) Graph (6) Maximum Speed: Up to 500 (mm/s) Maximum Speed: Up to 600 (mm/s) 0.3 20 30 40 50 0.2 10 0.1 Weight W (kg) Weight W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 20 0.02 16 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100

CG5-S

20 25.6 30 M10 x 1.25 20 12.8 14 IY-G03SUS +0.5 +0.3 +0.058 0 +0.070 0 I-G04SUS Y-G04SUS 40 40 10 10 18 18 M14 x 1.5 42 14 22 30 M14 x 1.5 12 14 42 16 22 41.6 30 36 12 14 IY-G04SUS +0.5 +0.3 +0.5 +0.3 I-G05SUS Y-G05SUS 50, 63 50,63 14 14 22 22 M18 x 1.5 56 18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 I-G08SUS Y-G08SUS 80 80 18 18 28 28 M22 x 1.5 71 21 38 50 M22 x

Compact Manifold Regulator Series ARM5

V L4=50+T+X 50 SMC H H L L O O S S U U C C P P K K 8 U 57 (at handle locked) DIN rail part no.

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

Cylinder with Lock Series MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

CNG

201 30 17 62 223 40 184 208 35 17 62 206 230 50 209 (216) 237 (244) 35 17 70 229 (236) 257 (264) Note) ( ): Denotes the dimensions for long stroke.

Thermo-chiller

or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 30 min 20 min 14 min 10 min Standard item 6 min 4 min Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v 2 min Operating time 1 min 30 s 20 s Max. 10 s Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1

energy saving effect

[MPa] Circulating fluid pressure [MPa] Usable flow rate range Usable flow rate range 0.5 0.5 50 HECR 50 0.43 0.45 Outlet Pump head [m] Pump head [m] Outlet 0.4 0.4 40 40 HEC 0.3 30 0.3 30 HEB 0.2 20 0.2 20 HED Return port 0.1 10 0.1 10 Return port 0 0 0 0 HEA 45 40 50 0 10 20 30 60 70 80 90 100 110 120 Circulating fluid flow rate [L/min] 45 0 20 10 40 30 50 60 70 80 90 100 110 120 130 Circulating

HRX-OM-X084

Rated Sensitivity Rated current voltage x size voltage of leak (A) [V] current [mA] 1-phase 100, HRR010-A/W-10100V AC(50/60Hz) 115 15 115V AC(60Hz) 3 cores x 14AWG (3 cores x 30 2.0mm2) (including 1-phase ground) 200, HRR010-A/W-20230 10 200-230V AC (50/60Hz) Installation/operation in accordance with the UL standard For the product operation in the UL compliant conditions, the conditions

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25