HRX-OM-S004

-A-20. 8-1 8.1.2 HRS100/150-A-40. 8-2 8.1.3 HRS100/150-A-46. 8-3 8.1.4 HRS100/150-W-20. 8-4 8.1.5 HRS100/150-W-40. 8-5 8.1.6 HRS100/150-W-46. 8-6 8.1.7 Refrigerant with GWP reference . 8-7 8.1.8 Communication specification . 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100

AC

VBA4100 20 Rc(PT)1/8 SVBA, #1 SVBA, #2 SVBA, #4 1.13-6 VBA1110 to 4200 Air operated style VBA2200-03, VBA4200-04 A 300 404 B 126.5 167 C 53 96 D 118 150 E 98 130 F 46 62.8 G 43 62 H 60.5 90 J 18 17 K 15 15 L M Rc1/16 Model Port size Rc(PT) 3/8 Rc(PT)1/2 VBA2200-03 VBA4200-04 VBA2200 VBA4200 SVBA, #3 SVBA, #5 20 Rc(PT) 1/8 Air Tank Precautions Be sure to read before handling.

LG1H

Bottom Mount LG1H21/ With coupling 8(4) x Mounting hole 6.6 95() 95(170) A() B() 95(150) 10 Long positioning hole A B A B Stroke Stroke 100 600 480 555 200 80 155 700 580 655 30 300 180 255 800 680 755 M6 bolt 10 + plate thickness 400 280 355 900 780 855 500 380 455 1000 880 955 Positioning hole 2 x 8H10 Dimensions inside ( ) are for a 100 mm stroke. 57 Series LG1H Deflection Data Deflection

VZ3000

connector (L) DIN terminal (D) M plug connector (M) 300 (Lead wire length) MAX. 10 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 (mm) 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 : With light/surge voltage suppressor 3-3-51 Series

Electric Actuator / Slider Type 《 AC Servo Motor 》

Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 250 150 75 300 200 100 375 250 125 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

148 160.5 185.5 198 210.5 235.5 248 L2 112.5 125 137.5 150 175 187.5 200 225 237.5 L3 88 104 120 136 152 168 184 200 216 L4 17.5 15.5 14 12 16.5 15 13 17.5 16 [47.9] R 41.9 34.5 29 22.4 19.1 Manual override (non-locking) (7.5) (DIN rail dimension) Manual override In case of locking type, ( turn after pushing in. ) U side G: Approx. 300 H: Approx. 600 lead wire length ( ) D side (L4) L3 DIN

Slider Type/Ball Bushing Bearing

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

Clamp Cylinder with Lock

-100/CLK2Pl50-100 CLKG50-R100 CLK2Gl50-125/CLK2Pl50-125 CLKG50-R125 Common CLK2Gl50-150/CLK2Pl50-150 CLKG50-R150 CLK2Gl63-50/CLK2Pl63-50 CKG40-R050 CLK2Gl63 series CLK2Pl63 series CLK2Gl63-75/CLK2Pl63-75 CKG40-R075 CLK2Gl63-100/CLK2Pl63-100 CKG40-R100 CLK2Gl63-125/CLK2Pl63-125 CKG40-R125 Common CLK2Gl63-150/CLK2Pl63-150 CKG40-R150 Switch mounting bracket (Band mounting) Round head Phillips

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Cover diameter 1.4 Cross sectional area 0.2mm2 SMC 35.5 A port PE 16 12 7.5 7.5 14.5 7 7.5 1/8 NPTF P,A,R port M5 x 0.8 PE port L type plug connector (L): VQZ115(R)L -01T M type plug connector (M): VQZ115(R)M -01T 51.5 300 (Lead wire length) 60.5 300 (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light 55.5 Indicator light Cover diameter 1.5 Cross sectional

VQC

160.5 3 76.5 133.5 162.5 173 4 87 144 175 185.5 5 97.5 154.5 175 185.5 6 108 165 187.5 198 7 118.5 175.5 200 210.5 8 129 186 212.5 223 9 139.5 196.5 225 235.5 10 150 207 237.5 248 11 160.5 217.5 237.5 248 12 171 228 250 260.5 13 181.5 238.5 262.5 273 14 192 249 275 285.5 15 202.5 259.5 287.5 298 16 213 270 300 310.5 17 223.5 280.5 300 310.5 18 234 291 312.5 323 19 244.5 301.5 325 335.5 20

5 Port Solenoid Valve, Series VQC

160.5 3 76.5 133.5 162.5 173 4 87 144 175 185.5 5 97.5 154.5 175 185.5 6 108 165 187.5 198 7 118.5 175.5 200 210.5 8 129 186 212.5 223 9 139.5 196.5 225 235.5 10 150 207 237.5 248 11 160.5 217.5 237.5 248 12 171 228 250 260.5 13 181.5 238.5 262.5 273 14 192 249 275 285.5 15 202.5 259.5 287.5 298 16 213 270 300 310.5 17 223.5 280.5 300 310.5 18 234 291 312.5 323 19 244.5 301.5 325 335.5 20

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

51

Up to 300 Up to 300 CS2 Up to 300 Up to 300 Use a thin wrench when tightening the piston rod.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

310.5 17 251 268.5 300 310.5 16 239.5 257 287.5 298 15 228 245.5 275 285.5 14 216.5 234 262.5 273 13 205 222.5 250 260.5 12 193.5 211 237.5 248 11 182 199.5 225 235.5 10 170.5 188 212.5 223 9 159 176.5 200 210.5 8 147.5 165 187.5 198 7 136 153.5 175 185.5 6 124.5 142 162.5 173 5 113 130.5 150 160.5 4 101.5 119 150 160.5 3 90 107.5 137.5 148 2 78.5 96 125 135.5 1 67 84.5 112.5 123 L1 L2 L3

CE

, 175, 200, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49

PF2A/PF2W

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 16-11-16 13 For details about certified products conforming to international standards, visit us at www.smcworld.com.

CE

, 175, 200, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49

CE

, 175, 200, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49

Fieldbus System

C4: 4 (SMC) C6: 6 (SMC) C8: 8 (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) L: DIN Rail Overall Length n: Stations L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 L5 148 160.5 185.5 198 210.5 235.5 248 260.5 273 298 310.5 323 335.5 360.5 373 385.5 410.5 423 435.5 137.5 150 175 187.5 200 225 237.5 250 262.5 287.5 300 312.5 325 350 362.5 375 400 412.5 425 120.2 136.2

C95Series

(mm) =~ J Standard Stroke Refer to page 19 on "Minimum Allowable Stroke When Mounting Auto Switches ~. 32 ' 25,50. 75,100, 125,150, 175, 200, 250,300, 350,400, 450,500 700 ~; 40 25, 50, 75, 100, 125, 150, 175. 200, 250, 300, 350, 400, 450, 500 800 SO 1200 25, 50, 75,100, 125, 150, 175, 200, 250, 300, 350, 400,450. 500, 600 63 25. 50,75,100. 125,150, 175,200, 250. 300, 350,400, 450,500, 600