3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300 3 1 P M plug connector (M) 300 (Lead wire) 92 80(81) 77(78) Indicator light Cover dia 1.5 Cross section 0.23mm2 66(71) R 3 1 P : AC Dimensins n: Station (Max.20) Equation L1=16n+10 L2=16n+20 L n 2 42 52 75 85.5 16 266 276 300 310.5 17 282 292 312.5 323 18 298 308 337.5 348 19 314 324 350 360.5 20 330 340 362.5 373 13 218 228 250 260.5 14 234 244 275 285.5 15 250 260 287.5 298 8 138 148 175
MHZ2-25C/MHZL2-25C MHZ2-6C/MHZA2-6C 140 Pressure 0.7 MPa Pressure 0.7 MPa 8 120 0.6 MPa 0.6 MPa Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) Gripping force (N) 100 6 0.5 MPa 0.5 MPa 0.6 MPa 0.6 MPa 80 0.4 MPa 0.4 MPa 0.5 MPa 0.5 MPa F 4 60 0.3 MPa 0.3 MPa 40 0.4 MPa 0.4 MPa 2 0.25 MPa 0.25 MPa 20 0.3 MPa 0.3 MPa 0 10 20 30 0 20 40 60 80 100120 Gripping point L (mm) Gripping point
MHZ2-25C/MHZL2-25C MHZ2-6C/MHZA2-6C 140 Pressure 0.7 MPa Pressure 0.7 MPa 8 120 0.6 MPa 0.6 MPa Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) Gripping force (N) 100 6 0.5 MPa 0.5 MPa 0.6 MPa 0.6 MPa 80 0.4 MPa 0.4 MPa 0.5 MPa 0.5 MPa F 4 60 0.3 MPa 0.3 MPa 40 0.4 MPa 0.4 MPa 2 0.25 MPa 0.25 MPa 20 0.3 MPa 0.3 MPa 0 10 20 30 0 20 40 60 80 100120 Gripping point L (mm) Gripping point
(M) 120 x 120L -45D (M) 125 x 125L -50D (M) 130 x 130L -75D (M) 155 x 155L -100D (M) 180 x 180L 253 CHQWB Series Construction CHQWB20 e !
With or without the terminating resistor (120) of this product can be set by the operation display panel.
m) AT IDF IDU SFB 20 02 0 IDF FS Clean gas strainers made of an element (120 m, stainless steel 316 sintered metal) to protect regulators and vacuum regulators are also available.
Refer to page 100 for part numbers. 109 Made to Order/Dust Seal Specification Series LJ1H10 Dimensions/LJ1H10 (X70) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting groove The two grooves at the bottom cannot be used. 6-M5 x 0.8 thread depth 9 90 203 (258) Work piece mounting reference plane 80 Stroke + 115 (table movement
PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB19 VRF1 50 Hz PB20 VRF2 50 Hz PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0001 ( ) PB28 CDT 100 ms PB33 VRF1B 60 Hz PB34 VRF2B 60 Hz (b) OFF OFF ON 63.4 CDT100ms 100 4.0 10.0 4.0 120 84 120 3000 4000 3000 20 50 20 50 60 50
(b) OFF ON OFF 63.4% CDT = 100 ms 100 50 100 4.00 10.00 4.00 120 84 120 3000 4000 3000 20 50 20 1 50 60 50 1 50 60 50 1 0.20 0.15 0.20 1 0.20 0.15 0.20 2 20 30 20 2 20 30 20 2 0.10 0.05 0.10 2 0.10 0.05 0.10 (2) (a) PB06 GD2 4.00 [] PB08 PG2 120 [rad/s] PB09 VG2 3000 [rad/s] PB10 VIC 20 [ms] PB29 GD2B 10.00 [] PB30 PG2B 84 [rad/s] PB31 VG2B
115/00 120/60 0,01s 0.018 115/60 120/60 0.014 0_014 .011 liho lo Dedr.rgiz: (S@nds) tLts: R.9or'6 liir'.6 et r|easurd with solsoid5 al 70'F (21iC.), 10o% voltags, srtd tr vstu clan ed lobdtod. At tin6s ft mGUd by mizirE ar rhe 160 ooint m f|o sm waw.
9 P3313128 P3313228 MHR3-10 MHR3-15 Description Cover Main parts MA D533 MHR3/MDHR3 Series Nominal Size 10 Without auto switch: MHR3-10R 3 x M3 x 0.5 thread depth 6 P.C.D.24 (Mounting thread) 120 120 25 25 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port 44 29 9h9 0 0.036 33.5 1 5 4 16 (36.5) 12 2 2 3e8 0.014 0.028 Open: 11 Closed: 8 8 0 0.05 4 3 x M3 x 0.5 thread depth 6 (Thread
PP-700-5 PP-700-15 PP-700-30 PP-700-60 PP-700-100 1 1 1 3 5 5 15 30 60 100 30 60 60 120 120 0.2 0.3 0.3 0.5 0.7 0.4 0.6 1.0 2.0 3.5 PPMOUNTING STYLE BARBED FITTING (FM & PM ONLY) VALVE FUNCTION RANGE (PSI) FM = FLUSH MOUNT PM = PANEL MOUNT PT = PIPE THREAD MM = MANIFOLD B80 = NYLON 1/16" I.D. TUBE B85 = NYLON 1/8" I.D.
Pad size slo-650: Std. 1omm: ODtional see Daoe 120 Spring lorce (ksr) 0.08 o.12 0.1 0.3 0.2 0.5 How to Ordel ZPY Pad dia.
Pad size slo-650: Std. 1omm: ODtional see Daoe 120 Spring lorce (ksr) 0.08 o.12 0.1 0.3 0.2 0.5 How to Ordel ZPY Pad dia.
ZZ + Stroke H 3.5 (mm) ZZ S P I E D A H H1 13.5 10.5 10.5 10.5 FL Bore size H2 41 32 32 26 B2 22 17 17 13 B1 AL K 11 8 8 8 13 F 12 10 8 6 KA MM NA NN G 0 50 45 45 41 6 6 5 8 8 8 40 32 25 20 24 22 22 18 21 19.5 19.5 15.5 14 12 10 8 20-0.033 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 M26 x 1.5 M26 x 1.5 M20 x 1.5 46.5 37.5 33.5 28 7 5.5 5.5 5 42.5 34.5 30 24 154 122 120 116 1/8 88 64 62 62 16
How to Order Burst pressure drop curve 1.0 TL0604 Metric sizes 20 Burst pressure drop coefficient 0.8 TIL01 20 Inch sizes 0.6 Length Applicable to both metric and inch size Tubing Model 0.4 Symbol 10 20 50 100 Type Length 10 m 20 m 50 m 100 m 0.2 Roll 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Temperature (C) Straight 2 m 2S Length Applicable to inch size only Eluting fluorine ion
0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump Circulating fluid head pressure head pressure Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] [m] [MPa] [m] [MPa] HRL300-Am-20 (CH1) HRL100/200/300-Am-20 (CH2) 0.9 0.6 90 60 0.8 80 0.5 50 0.7 70 Circulating fluid outlet 0.6 0.4 60 40 Usable flow rate range Circulating fluid outlet 0.5 50 0.3
Symbol H A L1 H1 Y type double knuckle I type single knuckle Bore size (mm) 125 140 160 Y-12 I-12 110 50 100 156.5 Y-14 I-14 110 50 105 161.5 Y-16 I-16 120 56 110 170.5 L1 H1 A, H dimensions when single/double knuckle joint and rod end nut are mounted together A H Bore size (mm) 125 140 160 65 125 65 125 76 140 Single knuckle joint and double knuckle joint should be used separately.
D-F5/J5 Same side 10 115 115 120 130 140 150 1 pc. 10 Different sides 10 2 pcs. D-F5W/J5W D-F5BAL Same side 10 120 120 120 135 140 150 1 pc. 10 Different sides 10 2 pcs. D-F59F D-F5NTL Same side 10 125 125 130 140 150 160 1 pc. 10 D-B5/B6 D-G5/K59 D-G5W/K59W D-G59F D-G5BAL/G5NTL Different sides 15 2 pcs. Same side 75 110 110 115 125 135 145 1 pc. 10 Different sides 20 2 pcs.
OFF-time (adjournment to nest output): 1 to 120 sec.