e

2-5H7 depth 5 (96.7) (49.6) 60 132.2 100 110.8 35.5 (60) 94 96.7 35.5 D-m D-m 71.5 43.5 Motor 60 102 60 42 E-MY E-MY (60) 60 128 7.5 8.2 60 60 5.5 2 x 9.5 counterbore depth 5.4 7.5 50 5 71.7 17.5 7.1 (Max. 10.1) 4 x M5 x 0.8 depth 9 37 6 9.5 5H7 Long hole depth 5 T-slot section for mounting 6 198 + Stroke 2 x 2 x 5.5 through hole Encoder cable on actuator side (4 wires) Noise filter Note

CL

CL CL1 Rod Side Flange Style Bore size (mm) MLGC B BZ FT FD FX FZ FY Rod side flange style: CLG1FN Head side flange style: CLG1GN 25 30 30 36 65 75 75 82 38 45 45 52 52 60 60 66 5.5 5.5 6.6 6.6 57.5 6 7 7 8 20 25 32 40 CNG 69 69 76 MNB For long stroke, refer to page 9-2-32.

MY1

Operating temperature range (C) 5 to 60 Standard strokes Theoretical output Unit: N Operating pressure (MPa) Bore size (mm) Piston area (mm) Bore size (mm) Standard stroke (mm) Max. manufacturable stroke (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 16 200 40 60 80 100 120 140 160 3000 16 100, 200, 300, 400, 500, 600, 700 800, 900, 1000, 1200, 1400, 1600 1800, 2000 314 62 94 125 157 188 219 251 20 20,

VQ7-6/7-8

Hz 200 VAC, 50/60 Hz 24 VDC 12 VDC Other Nil SB None With 10 10 stations VF Note) When equipped with control unit, 1 or 2 stations are used for mounting.

VQ7-6/7-8

Hz 200 VAC, 50/60 Hz 24 VDC 12 VDC Other Nil SB None With 10 10 stations VF Note) When equipped with control unit, 1 or 2 stations are used for mounting.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

MY1

Y = 6.525 x 9.8 x 29.6 x 103 = 1.89 (Nm) Y Load factor 2 = M3/M3max = 1.89/60 = 0.03 MTS m4 M3 MY 5.

Magnetically Coupled Rodless Cylinder

20 40 0 60 80 20 40 0 60 Moment (Nm) Moment (Nm) Moment (Nm) Vertical Operation Intermediate Stop When using in vertical operation, prevention of workpiece dropping due to breaking of the magnetic coupling should be considered.

HRL

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

Table of Contents

23 29 42 24 30 42 53 51 60 82 71 74 91 118 113 125 14 4 10.4 13.4 16 13.4 D1 17 14 6 12.8 13.4 17 13.4 24.5 L3 D2 17 L2 19 8 15.2 17.6 18.5 15.9 28.5 Connection thread (With seal) 21 10 21 18.5 20.6 21 19.2 31.5 12 26 20.9 25.2 22 21.6 34 Reference dimensions after R thread installation.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

220 VAC 50/60 Hz [230 VAC 50/60 Hz] 4 For type W, only DC voltage is available.

CY1

32 7 40 93 148 64 26 CY1R50 25 110 8.6 10 M8 x 1.25 15 159 48 42 60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 171 60 48 70 47 10 60 121 188 94 32 With auto switch CY1R6H .

Compact

: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

LX Series Compact Electric Actuators

: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

MK

14 depth 10.5 M12 x 1.75 M10 x 1.5 125 0.15 0.15 Note 1) This cylinder rod is retracted.

Table of Contents

(g) Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260

Table of Contents

Note 2) The flange can be mounted on the rotary actuator at 60-degree intervals.

30

N Applicable cylinder bore size Model Nominal size Pitch Center of sphere R M A B D E F G H Weight kg 20 25 32 32, 40 40 32, 40 50 50, 63 44 49.5 49.5 60 60 60 71.5 71.5 17.5 19.5 19.5 20 20 20 22 22 21 24 24 31 31 31 41 41 4.5 5 5 6 6 6 7.5 7.5 7 8 8 11 11 11 14 14 7 8 8 11 11 11 13.5 13.5 13 17 17 22 22 22 27 27 30.5 34 34 38 38 38 44.5 44.5 8 9 9 13 13 13 15 15 0.5 0.5 0.5 0.75 0.75 0.75

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

70 X 60 70 ZZ 180 192 Model CY1B50 CY1B63 Mounting Nut/included (2 pcs.)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

seal 2.2 (0.12) VQZ1350 20 or less 26 or less Closed center VQZ1000 56 Rubber seal 3.6 (0.2) VQZ1351 25 or less 33 or less VFS Metal seal 3.6 (0.2) VQZ1450 3 position 20 or less 26 or less Exhaust center Rubber seal 6.3 (0.35) VQZ1451 25 or less 33 or less VS Pressure center Rubber seal 3.6 (0.2) VQZ1551 25 or less 33 or less Metal seal 10.8 (0.6) VQZ2150 14 or less 18 or less VS7 Single 60