High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Valve Single Unit

Series SX3000/5000/7000 Base Mounted Valve Single Unit How to Order 5 L N SX 5 2 40 Series Thread type 3 SX3000 5 SX5000 Nil Rc 7 SX7000 G F N NPT Type of actuation NPTF T 2 position single Port size 1 Manual override Applicable series Symbol Nil Port size Without sub-plate Nil: Non-locking push type 1 8 SX3000 01 With sub-plate 2 position double 1 4 SX5000 SX7000 02 2 With sub-plate 3 8

IDU/IDF

Dryer A G F E D C B B 7kVA IDF120D 360 30 11 300 260 400 540 IDF-TR7000-8 94 Three phase compound 9kVA IDF150D 400 40 13 350 300 450 650 IDF-TR9000-8 109 220, 240, 380, 400, 415, 440V (50/60Hz) 200V (50/60Hz) 11kVA IDF190D 550 60 13 400 350 600 450 IDF-TR11000-8 131 4-F A 13kVA IDF240D 400 60 13 350 300 450 600 IDF-TR13000-8 138 D 18kVA IDF370B 400 40 13 350 300 450 650 IDF-TR18000-8 179

Shock Absorbers and Rate Controls

4 f f i .

Profile Design ISO/VDMA Air Cylinder Series CP95

e Order No. b d f l1 c a 32 M10x1.25 GKM10-20 10 40 10 52 20 20 40 M12x1.25 GKM12-24 12 48 12 62 24 24 50/63 M16x1.5 GKM16-32 16 64 16 83 32 32 80/100 M20x1.5 GKM20-40 20 80 20 105 40 40 Rod end nut (standard equipment) 30 d D C H B Bore size (mm) Order No.

2-Color Display High Precision

--F ZSE40A(F)/ISE40A-WF1--F Panel mounting + Front protective cover 44.7 29.2 7.5 40 51.2 Panel thickness 1 to 5 38.6 11 Series ZSE40A(F)/ISE40A Dimensions ZSE40A(F)/ISE40A-C4-E ZSE40A(F)/ISE40A-C6-E Panel mounting 41.2 40 29.2 4 43.6 40 Panel thickness 1 to 5 38.6 ZSE40A(F)/ISE40A-C4-F ZSE40A(F)/ISE40A-C6-F Panel mounting + Front protective cover 44.7 40 7.5 29.2 51.2 Panel thickness 1 to

Valve Single Unit

Series SX3000/5000/7000 Base Mounted Valve Single Unit How to Order 5 L N SX 5 2 40 Series Thread type 3 SX3000 5 SX5000 Nil Rc 7 SX7000 G F N NPT Type of actuation NPTF T 2 position single Port size 1 Manual override Applicable series Symbol Nil Port size Without sub-plate Nil: Non-locking push type 1 8 SX3000 01 With sub-plate 2 position double 1 4 SX5000 SX7000 02 2 With sub-plate 3 8

Process Valve Series VNA

Water Hammer Characteristics VNC1 (N.C. 0.49 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.49 MPa VNC4 (N.C. 0.97 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.97 MPa 2.5 15A Peak pressure at valve closed (MPa) Peak pressure at valve closed (MPa) 8A 25A 2 1 20A 32 A F 15A 20A 40 A F 32 A F 1.6 0.8 25A 40 A F 50 A F 65F 50 A F 1.2 0.6 80F 65F 80F 0.8 0.4 0.4 0.2 0 1

Compressed Air Preparation Filter

42.5 Size 40 2 1/4, 3/8, 1/2 145.2 35.5 38.4 72.6 40 35.5 50 40 55 9 18 7 50 65 Size 50 2 3/4, 1 186.2 43 93.1 30 45 70 50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.

Low Friction Cylinders Series MQ

Action D Double acting Mounting Cylinder stroke Through hole & Double end tapped (Standard) Foot type Rod side flange type Head side flange type Double clevis type B L F G D Note) Bore size (mm) Standard stroke (mm) 10 10, 20, 30, 40 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 Note) Available with the MQQL only. 25 10, 20, 30, 40, 50, 75, 100 Mounting brackets are included when shipped

5 Port Solenoid Valve

Page 14 D-sub Connector F kit Page 18 Flat Ribbon Cable P kit P kit EX180 Page 22 PC Wiring System Compatible Flat Ribbon Cable J kit J kit Page 26 Manifold Optional Parts Page 28 Construction Page 29 Manifold Exploded View S kit Page 32 Plug-in Manifold Stacking Base EX260 Page 32 Serial Transmission S kit EX250 Page 44 D-sub Connector F kit EX600 Page 48 Flat Ribbon Cable P kit F kit EX500

ITV

Count ARP Pressure Characteristics Flow Characteristics Set pressure: 10 kPa IR 0 1 10 kPa 20 kPa Output deviation factor (% F .S.) 20 IRV 0.5 40 kPa Set pressure (kPa) 40 VEX Out 60 kPa 60 0 SRH Return 80 kPa 80 SRP 0.5 100 kPa 100 SRF 100 80 60 40 1 4 20 0 1 1.5 0.5 2 2.5 3 3.5 120 VCHR Supply pressure (kPa) Flow rate (L/min (ANR)) ITV ITV IC ITVX PVQ VEF VEP VER VEA VY1 VBA VBAT AP100

Thermo-chiller/Rack Mount Type

For pipe thread type F , a G thread conversion fitting set is included.

PF-OMM0004_C

P2dH n2dH P2dL n2dL P2AH n2AH P2AL n2AL P2L/n2L P2H/n2H H2 (38 ) tnL/tPL tnH/tPH Ht (40 ) P_2/n_2 H_2 (38 ) tn/tP H_t (40 ) (39 ) 4. [F 2] OUT2 -36No.PF-OMM0004-D 1. [F 2] [oUt2] OUT2 [-] 2. ON-OFF -37No.PF-OMM0004-D 3. a. ([n_2]) 4. [F 2] OUT2 b. ([n2L]) [P2H] or [n2H] ([n2H]) 4. [F 2] OUT2 -38No.PF-OMM0004-D c.

Cylinder with Lock Series MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

CV/MVGQ

N S + Stroke ZZ + Stroke M 73.6 l C B K CY h + l ZZ + l + Stroke MQQ M Stroke range Bore size (mm) S A AL B B1 C D E F H1 MM K KA M N HX J (mm) 40 50 63 80 100 RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6 27 32 32 37 37 6 7 7 11 11 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 60 70 86 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11 11 13 16

5 Port Air Operated Valve Series SYA3000/5000/7000 1

SYA 5 1 Base mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Nil Rc G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Nil Rc 2 position single G F Port size 1 N NPT Symbol Applicable series Nil Port size Without sub-plate NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 Symbol Nil Port size Without sub-plate Without sub-plate (Pilot

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

402 338 352 430 448 VVX21 VVX22 VVX23 (mm) Grommet Conduit DIN terminal Electrical entry Conduit terminal (B) Individual SUP type A B C D E F H J K M N Model Q 49 58 63 R S 42 51 56 T U 58 62 64.5 V X 62 65 68 W Y 95 98 101 VVX21 VVX22 VVX23 38 49 49 20.5 26.5 26.5 17.5 22.5 22.5 10.5 13 13 11 13 13 25 30 30 32 40 40 36 46 46 12 15 15 7 9 9 6.5 8.5 8.5 57 (65) 66 (74) 71 (79) 19.5 22.5 25

51

H ZZ MM Depth A1 CG1 20 25 32 40 50 63 80 100 Up to 200 18 22 22 30 35 35 40 40 15.5 19.5 19.5 27 32 32 37 37 35 40 40 50 58 58 71 71 94 102 104 114 144 144 178 179 Up to 300 CG3 CG3 Up to 300 Up to 300 Up to 300 JMB AL Up to 300 H A Up to 300 ZZ + Stroke ZZ + Stroke H MB Up to 300 Basic (mm) MB1 Bore size (mm) Standard stroke A AL B1 C D E F GA GB H1 H ZZ I J KA MM NA P S CA2 20 25 32 40

MXW Series Long Stroke Slide Table

A F L=200mm F F L=200mm A L L L L=200mm A MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 0.03 0.03 0.10 MXW12 MXW8 MXW16 MXW12 MXW8 MXW16 0.08 Table deflection quantity mm Table deflection quantity mm Table deflection quantity mm MXW12 MXW8 MXW16 0.02 0.02 0.06 0.04 0.01 0.01 0.02 0 0 0 100 75 50 25 100 20 40 60 75 50 25 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N =