ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Molded-case circuit breaker (Note 1, 3) Fuse Frame, rated current Magnetic contactor Driver Voltage Voltage AC [V] Class Current Power factor Power factor (Note 2) [A] AC [V] Improving reactor is Improving reactor is not used used LECSS2-T5 30 A frame 5 A S-N10 10 LECSS2-T7 LECSS2-T8 30 A frame 10 A 30 A frame 5 A 15 Mitsubishi 240 T 300 Electric Corporation LECSS2-T9 30 A frame 15 A 30 A

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

JXCx-OMT0023

(RES) A.10 Undervoltage A.12 Memory error 1 (RAM) A.13 Clock error A.15 Memory error 2 (EEP-ROM) A.16 Encoder initial communication error1 A.17 Board error A.19 Memory error 3 (Flash-ROM) A.1A Motor combination error A.1C Software combination error A.1E Encoder initial communication error 2 A.1F Encoder initial communication error 3 A.20 Encoder normal communication error 1 A.21 Encoder normal

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Vacuum Pad

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Vacuum Pad

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Vacuum Pad

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Vacuum Pad

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 Nil Cable color Circuit 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue S Standard cable Cable color Connector D terminal no. Shield 12 13 7 6 9 8 3 Brown Black Red Black Orange Black Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

A A A A A A* 1 2 1 1 2 1 1 1 MQR T * E: Union Elbow and U: Union only 325 Series LQ3 Dimensions Male connector: LQ3H-M Metric Size L,L H (A,A) Applicable tubing O.D.

VS7-6

To use a perfect valve and a spacer style regulator, use a manifold or a sub plate as the standard and stack in the following order: the perfect spacer, spacer style regulator, and the valve.

HRX-OM-M091

HRX-OM-M091-P Operation Manual Communication function Thermo chiller Air-Cooled Water-Cooled refrigerated type refrigerated type HRS012-A-10HRS012-W-10HRS018-A-10HRS018-W-10HRS012-A-20HRS012-W-20HRS018-A-20HRS018-W-20HRS024-A-20HRS024-W-20HRS030-A-20HRS030-W-20HRS040-A-20 HRS040-W-20HRS050-A-20HRS050-W-20HRS060-A-20HRS060-W-20Keep this manual available whenever necessary 2022 SMC CORPORATION

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

AR20-B to AR60-B

X425 w t e 03 q w t e r For high/low temperature Option/Semi-standard: Select one each for a to g.

HRX-OM-Q033

range. 03Data field of a command is not normal.

HRX-OM-S010

a response message from the product (slave).

HRX-OM-T004

range. 03Data field of a command is not normal.

HRX-OM-R028

range. 03Data field of a command is not normal.

A

Using a regulator on the secondary side When mounting a regulator on the secondary side (A port side), use a residual pressure relief regulator (AR2550 to 4050) or a check type regulator (AR2560 to 6060). With a standard regulator (AR1000 to 6000), the secondary side pressure may not be released when this valve is exhausted. 5.