MLU

114 119 142.5 8 6.5 9 12 M8 x 1.25 depth 13 Rc, NPT, 1/8 M8 x 1.25 depth 13 Rc, NPT, 1/8 M10 x 1.5 depth 15 Rc, NPT, 1/4 9-13-12 12 Series MLU Plate Cylinder with Lock Dimensions Axial foot style LY CL (mm) LH LS LH ZZ LT 114 132 140 166.5 LX 3.2 4.5 4.5 5 LY 11 12 15 18 LZ X 6 8 10 11 Y LD Model LT CL1 29 37 46 57 56 71 89 109 5.5 6.6 9 11 MLUL25 MLUL32 MLUL40 MLUL50 23 27 31 37 12 16 18

IDX-OM-W014

-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 2 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W014 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W014 i i-2 5 i

•

Changeable Range 01 Tie Rod Length (mm) Model' CS2 Bore-size 125 ' 140 160 Mounling brack.1 L 1!I, I'i q , C"D, T L I B, F, G, 'C, 0 , T L IB, F, G, C, 0, T ' -Mminimum 20 1 12 21 1 12 23 1 14 M.ro' axirourn . 270 rn 3 o o ~ n '5. ::J C.

Guide Cylinder Series MGG

size (mm) 20 25 32 40 50 Bore size (mm) S O P T U V W X Z HN HR Q Y R Y R Q 20 25 32 40 50 20 25 32 40 50 1/8 26 12 82 48 40 39 157 38.5 12(14) 98(106) 12 37 25.3 11 95 M6 x 1 depth 9 1/8 31 13 100 57 46 46 175 39 12(14) 98(106) 12 40 28.3 11 95 M6 x 1 depth 13 1/8 38 16 114 65 52 46 201 40 12(14) 101(109) 12 43 31.3 11 97 M6 x 1 depth 13 1/8 47 20 138 84 62 56 238 41 12(15) 109(118) 13

New

8 C6 13/64 VX210 1 5/64 1/8 C8 13/64 5/32 9/32 5/32 9/32 C8 VX220 2 C10 13/64 5/16 C10 25/64 13/64 VX230 3 5/16 C12 25/64 Note) Weight of grommet type.

Step Motor Controller (Servo / 24 VDC)

0 0 1 0 0 0 9 0 0 1 0 0 1 9 0 0 1 0 0 1 10 0 0 1 0 1 0 10 0 0 1 0 1 0 11 0 0 1 0 1 1 11 0 0 1 0 1 1 12 0 0 1 1 0 0 12 0 0 1 1 0 0 13 0 0 1 1 0 1 13 0 0 1 1 0 1 14 0 0 1 1 1 0 14 0 0 1 1 1 0 15 0 0 1 1 1 1 15 0 0 1 1 1 1 16 0 1 0 0 0 0 16 0 1 0 0 0 0 17 0 1 0 0 0 1 17 0 1 0 0 0 1 18 0 1 0 0 1 0 18 0 1 0 0 1 0 19 0 1 0 0 1 1 19 0 1 0 0 1 1 20 0 1 0 1 0 0 20 0 1 0 1 0 0 21 0 1 0 1 0 1 21 0 1

Pin Clamp Cylinder Series CKQ/CLKQ

1 !3 @2 q $4 #3 #1 #0 @1 $2 !7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

IDX-OM-W013

Specifications . 13 1 13 3 Remote operation . 13 1 13 4 How to connect the power and signal cable . 13 2 13 5 How to re-start the operation . 13 2 13 6 Electric circuit . 13 3 Chapter 14 Specification for Option V 14 1 Safety instructions . 14 1 14 2 Specifications . 14 2 14 3 How to perform maintenance . 14 2 14 4 Electric circuit . 14 3 Chapter 14 Service Record 15 1 Service Record . 15

High performance type Step Motor Controller (Servo/24 VDC)

1 0 0 13 0 0 1 1 0 1 13 0 0 1 1 0 1 14 0 0 1 1 1 0 14 0 0 1 1 1 0 15 0 0 1 1 1 1 15 0 0 1 1 1 1 16 0 1 0 0 0 0 16 0 1 0 0 0 0 17 0 1 0 0 0 1 17 0 1 0 0 0 1 18 0 1 0 0 1 0 18 0 1 0 0 1 0 19 0 1 0 0 1 1 19 0 1 0 0 1 1 20 0 1 0 1 0 0 20 0 1 0 1 0 0 21 0 1 0 1 0 1 21 0 1 0 1 0 1 22 0 1 0 1 1 0 22 0 1 0 1 1 0 23 0 1 0 1 1 1 23 0 1 0 1 1 1 24 0 1 1 0 0 0 24 0 1 1 0 0 0 25 0 1 1 0 0 1 25 0 1 1

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Output impedance: 1 k F: Analog output: 4 to 20 mA Load impedance: 50 to 600 Max. applied voltage: 28 V, Max. load current: 80 mA, Internal voltage drop: 1 V or less C: Analog output: 1 to 5 V or 0 to 10 V can be selected.

JXCx-OMT0062

Example) 1 byte Binary Decimal Hexadecimal (BIN) (OCT) (HEX) 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 0 0 0 0 0 0 1 0 2 2 0 0 0 0 0 0 1 1 3 3 0 0 0 0 0 1 0 0 4 4 0 0 0 0 0 1 0 1 5 5 0 0 0 0 0 1 1 0 6 6 0 0 0 0 0 1 1 1 7 7 0 0 0 0 1 0 0 0 8 8 0 0 0 0 1 0 0 1 9 9 0 0 0 0 1 0 1 0 10 A 0 0 0 0 1 0 1 1 11 B 0 0 0 0 1 1 0 0 12 C 0 0 0 0 1 1 0 1 13 D 0 0 0 0 1 1 1 0 14 E 0 0 0 0 1 1 1 1 15 F 0 0

JXCx-OMT0005CN

No.1 (2)(5)(10)(13) DRIVE No.

IDX-OM-W010

circuit . 12 3 Chapter 13 Specification for Option S 13 1 Safety instructions . 13 1 13 2 Specifications . 13 1 13 3 Power supply connection procedure . 13 2 13 4 Electric circuit . 13 2 Chapter 14 Specification for Option T 14 1 Safety instructions . 14 1 14 2 Specifications . 14 1 14 3 Remote operation . 14 1 14 4 How to connect the power and signal cable . 14 2 14 5 How to re-start the

ML2B

20 25 31 ED 60 74 94 EA 10 12 15 h 3.5 4.5 4.5 Applicable cylinder ML2B25 ML2B32 ML2B40 10-13-15 13 Series ML2B Dimensions Side support A MY-SA 2-G F E 2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

4/5 Port Air Operated Valve Series SYJA3000

Location A, B port Porting specifications Direction SX 1/8 1/8 1/4 1/8, C6 (One-touch fitting for 6) P, R port M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(

HRX-OM-Y120

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure *1 Alarm flag 1 6 Air exhaust fan failure *2 7 Reservation 8 CH1 abnormal rise of circulating fluid

Environment

1 !2 !

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

IDX-OM-W011

. 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15